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    • 1. 发明公开
    • Method and apparatus for placing substrate support components
    • 用于放置基板支撑部件的方法和设备
    • EP2445328A2
    • 2012-04-25
    • EP12150347.8
    • 2010-03-23
    • Illinois Tool Works Inc.
    • Doyle, DennisDonelan, MichaelFoster, StevenPerault, Joseph
    • H05K13/00B41M1/12H05K3/00
    • B41M1/12H05K1/0269H05K3/0008H05K3/1216H05K3/3415H05K2203/0165H05K2203/0173Y10T29/49826
    • An apparatus for depositing viscous material on an electronic substrate includes a frame, a dispensing unit coupled to the frame, and a substrate support assembly coupled to the frame. The substrate support assembly includes a plurality of support elements, a table coupled to the frame. The table has a support surface to support at least one support element of the plurality of support elements, and a marking device coupled to the frame. The apparatus further includes an imaging system coupled to the frame. The imaging system is configured to capture images of the support surface of the table. A controller is coupled to at least the marking device and the imaging system, and configured to manipulate the marking device to mark the support surface of the table on predetermined positions and to manipulate the imaging system to verify whether the marks on the support surface of the table are accurate. Embodiments of the apparatus and related methods are further disclosed.
    • 一种用于在电子基板上沉积粘性材料的设备,包括框架,耦合到框架的分配单元以及耦合到框架的基板支撑组件。 基板支撑组件包括多个支撑元件,耦合到框架的台。 桌子具有支撑表面以支撑多个支撑元件中的至少一个支撑元件,以及耦合到框架的标记装置。 该设备还包括耦合到框架的成像系统。 成像系统被配置成捕获桌子的支撑表面的图像。 控制器至少连接到标记装置和成像系统,并且被配置为操纵标记装置以在预定位置上标记工作台的支撑表面,并且操纵成像系统以验证支撑表面上的标记 表格是准确的。 该装置和相关方法的实施例被进一步公开。