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1. 发明公开

EP2141494A1 GAS ANALYZER 审中-公开
标题翻译：气体分析仪
公开(公告)号：EP2141494A1
公开(公告)日：2010-01-06
申请号：EP08739702.2
申请日：2008-04-02
申请人： Horiba Stec, Co., Ltd.
发明人： AOKI, Junji , KITAURA, Hirokazu , SAID, Boumsellek
IPC分类号： G01N27/62
CPC分类号： H01J49/0009 , G01L21/30 , H01J41/02 , H01J41/10 , H01J49/0027
摘要： A gas analyzer using a quadrupole mass spectrometric method etc. is provided with an ionizer 211 to ionize a sample gas, a first ion detector 212 and a second ion detector 213 each configured to detect a respective ion from ionizer 211, and each being disposed a respective distance from the ionizer 211 on an opposite side of the ionizer 211, the respective distances being different from each other, a filter 214 interposed between the ionizer 211 and the first ion detector 212 to selectively allow ions from the ionizer 211 to pass therethrough, and an arithmetic device 3 to correct a partial pressure PP 1 of a specific component obtained from the first ion detector 212 and selected by the filter 214 by using a first total pressure TP 1 of the sample gas obtained from the first ion detector 212 and a second total pressure TP 2 of the sample gas obtained from the second ion detector 213.
摘要翻译：使用四极质量分析法等的气体分析仪设置有用于离子化样品气体的离子发生器211，第一离子检测器212和第二离子检测器213，第一离子检测器212和第二离子检测器213均被配置为检测来自离子发生器211的各个离子，在离子发生器211的相对侧上的离子发生器211的相应距离，各个距离彼此不同;过滤器214，置于离子发生器211和第一离子检测器212之间以选择性地允许离子发生器211的离子通过，以及运算装置3，其使用从第一离子检测器212获得的样本气体的第一总压力TP1和从第一离子检测器212获得的第二总和来校正从第一离子检测器212获得并由过滤器214选择的特定成分的分压PP1 从第二离子检测器213获得的样本气体的压力TP2。

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