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    • 5. 发明公开
    • Fluid flow rate measurement apparatus
    • Durchflussmessvorrichtung
    • EP2072973A1
    • 2009-06-24
    • EP08021635.1
    • 2008-12-12
    • Hitachi Ltd.
    • Hoshika, HiroakiTokuyasu, NoboruKokubu, TakanoriKashio, Kaori
    • G01F1/68
    • G01F1/6842G01F1/692
    • Disclosed herein is a fluid flow rate measurement apparatus which prevents accumulation of pollutional substances in a sub-passage to enable high-accuracy fluid flow rate measurement.
      A heater pattern 34 is formed on the surface of a cylindrical rod 3. When electricity is conducted in the heater pattern 34 and heat is generated, the heat is transmitted to the sub-passage 26 through an insulating layer. The heat is gradually transmitted up to the leading end of the sub-passage 26, and burns out pollutional substances adhering to the sub-passage 26. In this way, accumulation in the sub-passage 26 of pollutional substances can be prevented, thus attaining a fluid flow rate measurement apparatus that enables high-accuracy fluid flow rate measurement.
    • 本文公开了一种流体流量测量装置,其防止污染物质在子通道中积聚,以实现高精度流体流量测量。 在圆柱形杆3的表面上形成加热器图案34.当在加热器图案34中传导电力并产生热量时,热量通过绝缘层传递到子通道26。 热量逐渐传递到子通道26的前端,并且燃烧附着在副通道26上的污染物质。这样就可以防止污染物质的副通道26中的积聚,从而达到 能够进行高精度流体流量测量的流体流量测量装置。
    • 8. 发明公开
    • Thermal flow meter control method
    • Steuerverfahrenfüreinen thermischen Durchflussmesser
    • EP2045584A2
    • 2009-04-08
    • EP08017400.6
    • 2008-10-02
    • Hitachi Ltd.
    • Sukegawa, YoshihiroTokuyasu, NoboruHoshika, HiroakiKashio, Kaori
    • G01F1/684G01F1/698
    • G01F1/684G01F1/698G01F1/74G01F15/02G01F15/04
    • A thermal flow meter corrects flow rate detection errors produced by vaporization of liquid phase components included in a gas to be measured. The thermal flow meter includes a correction circuit 500 that applies respectively different predetermined voltages to heating resistors consisting of first heating resistor Rh1 and second heating resistor Rh2 of a sensor element disposed in the gas to be measured to set a first temperature state and a second temperature state, calculates a first flow rate value Q1 of the gas to be measured in the first temperature state and a second flow rate value Q2 of the gas to be measured in the second temperature state, and calculates a flow rate correction value ΔQ based on a ratio (Q1/Q2) between the first flow rate value and second flow rate value or a fourth-power value (Q1/Q2) 4 of the ratio to correct a flow rate of the gas to be measured.
    • 热流量计校正由待测气体中包含的液相成分汽化产生的流量检测误差。 热流量计包括校正电路500,该校正电路500分别对设置在被测量气体中的传感器元件的第一加热电阻器Rh1和第二加热电阻器Rh2组成的加热电阻器施加不同的预定电压,以设定第一温度状态和第二温度 状态,在第二温度状态下,计算第一温度状态下的被测量气体的第一流量值Q1和待测气体的第二流量值Q2,并计算出基于 第一流量值和第二流量值之间的比率(Q1 / Q2)或校正要测量的气体的流量的比率的第四功率值(Q1 / Q2)4。