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    • 1. 发明公开
    • Spectroscopy module
    • Spektroskopiemodul
    • EP2801802A1
    • 2014-11-12
    • EP14173959.9
    • 2008-06-10
    • Hamamatsu Photonics K.K.
    • Shibayama, KatsumiYokino, TakafumiSuzuki, TomofumiTeichmann, HelmutHiller, DietmarStarker, Ulrich
    • G01J3/02G01J3/18
    • G01J3/18G01J3/02G01J3/0205G01J3/0208G01J3/0237G01J3/0259G01J3/0291
    • A spectroscopy module comprises a light transmitting portion for transmitting light made incident upon a plane of the light transmitting portion. The spectroscopy module further comprises a spectroscopic portion which is provided on a convex surface of the light transmitting portion, opposite the plane, to disperse light transmitted through the light transmitting portion and reflect said light towards the plane. The spectroscopy module further comprises a light detecting element which is provided on the plane to detect light dispersed and reflected by the spectroscopic portion. The spectroscopic portion comprises a diffracting layer formed along the convex surface of the light transmitting portion, a reflecting layer formed on a surface of the diffracting layer, and a peripheral edge portion formed on the convex surface of the light transmitting portion. The peripheral edge portion is formed integrally with the diffracting layer, and by using a same material as that of the diffracting layer, so as to enclose a periphery of the diffracting layer.
    • 光谱模块包括用于透射入射在光透射部分的平面上的光的光透射部分。 光谱模块还包括分光部分,其设置在透光部分的与平面相对的凸表面上,以分散透过透光部分的光并将光反射到平面。 光谱模块还包括光检测元件,其设置在平面上以检测由分光部分分散和反射的光。 分光部包括沿着透光部的凸面形成的衍射层,形成在衍射层的表面上的反射层和形成在透光部的凸面上的周缘部。 周边部分与衍射层一体形成,并且通过使用与衍射层相同的材料,以包围衍射层的周边。
    • 6. 发明公开
    • Optical waveguide chip and method of manufacturing the same
    • Optischer Wellenleiterchip und Herstellungsverfahrendafür
    • EP1930757A1
    • 2008-06-11
    • EP08003128.9
    • 2005-04-21
    • Hamamatsu Photonics K.K.
    • Yokino, TakafumiShibayama, Katsumi
    • G02B6/13G02B6/122
    • G02B6/30G02B6/13G02B2006/12147Y10T83/04
    • The present invention relates to an optical waveguide chip, etc., having a structure for effectively avoiding or suppressing peeling of an optical waveguide layer in a process of cutting a wafer. The optical waveguide chip comprises a substrate having a main surface, and an optical waveguide layer formed on the main surface of the substrate. The optical waveguide layer comprises a cladding portion and a core portion that is disposed inside the cladding portion and that has a higher refractive index than the cladding portion, and at least one of side surfaces of the optical waveguide layer is positioned at a predetermined distance toward a center of the main surface from an edge of the main surface. This arrangement includes an arrangement having a thin film portion at a peripheral region that includes the edge of the main surface. In the case that the optical waveguide layer has the thin film portion at its periphery, the optical waveguide layer has a side surface that coincide with the side surface of the substrate including the edge of the main surface and a side surface that is separated by a predetermined distance from edge of the main surface. By this arrangement, when cutting a wafer into chip units, even if chipping occurs at an edge of the main surface of the substrate to be cut, peeling of the optical waveguide layer, formed on the substrate, is suppressed effectively.
    • 本发明涉及一种具有在切割晶片的过程中有效地避免或抑制光波导层的剥离的结构的光波导芯片等。 光波导芯片包括具有主表面的基板和形成在基板的主表面上的光波导层。 光波导层包括包层部分和芯部分,该芯部分设置在包层部分内部并且具有比包层部分更高的折射率,并且光波导层的至少一个侧表面位于预定距离处 主表面的中心从主表面的边缘。 这种布置包括在包括主表面的边缘的周边区域具有薄膜部分的布置。 在光波导层的周边具有薄膜部的情况下,光波导层具有与包含主面的边缘的基板的侧面重合的侧面和由 从主表面的边缘预定的距离。 通过这样的结构,即使在切割晶片成为芯片单元时,即使在要切割的基板的主表面的边缘处发生切屑,也有效地抑制了形成在基板上的光波导层的剥离。