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1. 发明公开

EP3176552A1 COLLIMATION EVALUATION DEVICE AND COLLIMATION EVALUATION METHOD 有权
标题翻译：科学评价装置与评价方法
公开(公告)号：EP3176552A1
公开(公告)日：2017-06-07
申请号：EP15827109.8
申请日：2015-07-29
申请人： Hamamatsu Photonics K.K.
发明人： OKUMA, Junji , IGASAKI, Yasunori
IPC分类号： G01J9/02 , G01B9/02 , G01M11/00
CPC分类号： G01M11/00 , G01J9/02 , G01J9/0215
摘要： A first reflection member 10, when light transmitted through a second reflection member 20 is incident, reflects a part of the light by a first reflection surface 11, reflects light transmitted through the first reflection surface 11 in the light by a second reflection surface 12, and emits reflected light components in an opposite direction. The second reflection member 20, when light emitted from the first reflection member 10 is incident, reflects a part of the light by a first reflection surface 21, reflects light transmitted through the first reflection surface 21 in the light by a second reflection surface 22, and emits reflected light components. Interference fringes are formed on a screen 30 by light L 12 reflected on the first reflection surface 11 of the first reflection member 10 and the second reflection surface 22 of the second reflection member 20 and light L 21 reflected on the second reflection surface 12 of the first reflection member 10 and the first reflection surface 21 of the second reflection member 20. Thus, a device and a method that can evaluate collimation of light with high sensitivity, even when a coherence length of the light is short, are realized.
摘要翻译：当透过第二反射构件20的光入射时，第一反射构件10通过第一反射面11反射一部分光，通过第二反射面12反射透过第一反射面11的光中的光，并沿相反方向发射反射光分量。当从第一反射构件10发射的光入射时，第二反射构件20通过第一反射表面21反射一部分光，通过第二反射表面22将透过第一反射表面21的光反射到光中，并发射反射光分量。通过在第一反射部件10的第一反射表面11和第二反射部件20的第二反射表面22上反射的光L12以及在第一反射的第二反射表面12上反射的光L21，在屏幕30上形成干涉条纹构件10和第二反射构件20的第一反射表面21.因此，实现了即使在光的相干长度短的情况下也能够以高灵敏度评估光的准直的装置和方法。

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