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1. 发明公开

EP2368824A1 FLEXIBLE SUBSTRATE PROCESSING DEVICE 审中-公开
标题翻译： VORRICHTUNG ZUR VERARBEITUNG柔性基板
公开(公告)号：EP2368824A1
公开(公告)日：2011-09-28
申请号：EP09834758.6
申请日：2009-12-17
申请人： Fuji Electric Co., Ltd.
发明人： YAMADA, Takanori , YOKOYAMA, Shoji , FUNO, Hidekazu , TSUKAHARA, Yuji
IPC分类号： B65H23/025 , B65H23/038 , H01L21/205 , H01L31/04
CPC分类号： B65H23/038 , B65H23/0322 , B65H2301/3113 , B65H2301/323 , B65H2301/51145 , B65H2404/15212 , B65H2601/2532 , B65H2701/1752 , C23C14/562 , C23C16/545 , H01L21/67132 , H01L21/67706 , H01L21/67721 , H01L21/68 , H01L31/1876 , Y02E10/50 , Y02P70/521
摘要： A position control device (21, 5) that controls a widthwise position of a flexible substrate 1 includes: a pair of upper nip rollers 21 (24, 25) that nip an upper edge portion of the flexible substrate, rotating shafts of the pair of upper nip rollers being inclined so that a rotation direction in a nipping portion thereof faces obliquely upward at a slight bias angle (α) with respect to a conveying direction of the flexible substrate; an upper support mechanism including a movable support member 26 and a fixed support member 27 that support the pair of upper nip rollers so that the pair of upper nip rollers can be rotated and brought close to, or withdrawn from each other; a spring 51 that biases, via the movable support member, one upper nip roller 25 of the pair of upper nip rollers in a direction of pressing against the other upper nip roller 24 of the pair of upper nip rollers; and drive means (56) for displacing the biasing member so as to adjust a nipping pressure of the pair of upper nip rollers. Occurrence of sagging and wrinkling of the flexible substrate can be inhibited, even when the strip-like flexible substrate is conveyed over a long distance, and a constant widthwise position of the flexible substrate can be maintained, thereby ensuring high-quality treatment.
摘要翻译：控制柔性基板1的横向位置的位置控制装置（21,5）包括：一对夹持柔性基板的上边缘部分的上夹持辊21（24,25），该对夹持辊上夹辊是倾斜的，使得其夹持部分中的旋转方向相对于柔性基板的传送方向以稍微偏置角（±）倾斜地向上倾斜; 上部支撑机构包括可移动支撑构件26和固定支撑构件27，该支撑构件支撑所述一对上部夹持辊，使得所述一对上部夹持辊可以旋转并彼此靠近或退出; 弹簧51，通过可移动的支撑构件，在一对上夹持辊的一个上夹持辊25的一个上压合辊24的另一个上夹紧辊24的方向上偏压; 以及驱动装置（56），用于移动偏置构件，以便调节一对上夹持辊的夹紧压力。即使条带状柔性基板长距离地输送，也能够抑制柔性基板的下垂和起皱的发生，能够维持挠性基板的宽度方向的位置，能够进行高品质的处理。

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