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    • 4. 发明公开
    • Method and apparatus for detecting wire bond pull test failure modes
    • Verfahren und Vorrichtung zur Erkennung der Fehlerart beiZugprüfungvon Drahtverbindungen。
    • EP0595652A1
    • 1994-05-04
    • EP93308666.2
    • 1993-10-29
    • FORD MOTOR COMPANY
    • Pham, Cuong VanHayden, Brian J.
    • G01N3/00G01N19/04G01N27/20H01L21/66
    • G01N19/04G01N3/00G01N2203/0296G01N2203/0617H01L22/12H01L24/48H01L24/78H01L24/85H01L2224/48472H01L2224/78H01L2224/859H01L2924/00014H01L2924/14H01L2224/45099H01L2224/05599H01L2924/00
    • Provided is a method and apparatus for electrically detecting the location of bond failure and wire breakage occurring during tensile strength testing of a wire sample (14) having first and second bond foots (16,18) affixed to respective first and second support pads (20,22). The method and apparatus monitors the voltage levels of first and second electrically conductive probes (28,34). The first probe (28) has a primary lead (24) in electrical contact with the first support pad (20) and a secondary lead (26) in electrical contact with the first bond foot (16). Similarly, the second electrically conductive probe (34) has a primary lead (30) in electrical contact with the second support pad (22) and a secondary lead (32) in electrical contact with the second bond foot (18). Voltage detection means is provided in electrical contact with the first and second probes (28,34) for detecting the voltage level at each of the respective (58,60,62,64) primary and secondary leads to generate the respective corresponding output signals. Comparator means is further provided in electrical contact with the voltage detection means for receiving and comparing each of the output signals to a selected reference value and generating a supplemental output signal indicating the location of bond failure or wire breakage.
    • 提供了一种用于电检测在具有固定到相应的第一和第二支撑垫(20)上的第一和第二接合脚(16,18)的线样品(14)的拉伸强度测试期间发生的接合失效和断线的位置的方法和装置, ,22)。 该方法和装置监测第一和第二导电探针(28,34)的电压电平。 第一探针(28)具有与第一支撑垫(20)电接触的主导线(24)和与第一键脚(16)电接触的次导线(26)。 类似地,第二导电探针(34)具有与第二支撑垫(22)电接触的主导线(30)和与第二接合脚(18)电接触的次级引线(32)。 提供与第一和第二探针(28,34)电接触的电压检测装置,用于检测各个(58,60,62,64)主引线和次引线中的每一个上的电压电平,以产生相应的相应输出信号。 进一步提供比较器装置与电压检测装置电接触,用于接收并将每个输出信号与所选择的参考值进行比较,并产生指示接合故障或断线位置的补充输出信号。