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    • 3. 发明公开
    • Thin film field-effect transistor and display using the same
    • Dünnschicht-Feldeffekttransistor und diesen verwendende Anzeige
    • EP2161756A1
    • 2010-03-10
    • EP09010930.7
    • 2009-08-26
    • FUJIFILM Corporation
    • Itai, Yuichiro
    • H01L29/786
    • H01L29/7869H01L29/78609H01L29/78621H01L29/78696
    • The present invention provides a thin film field-effect transistor comprising a substrate having thereon at least a gate electrode, a gate insulating film, an active layer, a source electrode, and a drain electrode, wherein the active layer is an oxide semiconductor layer, a resistance layer having an electric conductivity that is lower than an electric conductivity of the active layer is provided between the active layer and at least one of the source electrode or the drain electrode, and an intermediate layer comprising an oxide comprising an element having a stronger bonding force with respect to oxygen than that of the oxide semiconductor in the active layer is provided between the active layer and the resistance layer.
    • 本发明提供了一种薄膜场效应晶体管,其包括至少具有栅电极,栅极绝缘膜,有源层,源电极和漏电极的基板,其中有源层为氧化物半导体层, 具有低于有源层电导率的电导率的电阻层设置在有源层与源电极或漏电极中的至少一个之间,以及包含氧化物的中间层,该氧化物包括具有较强的元素的氧化物 在活性层和电阻层之间设置相对于氧的活性层中氧化物半导体的结合力。