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1. 发明公开

EP4109165A1 OPTICAL SCANNING DEVICE AND CONTROL METHOD THEREOF 审中-公开
公开(公告)号：EP4109165A1
公开(公告)日：2022-12-28
申请号：EP22179749.1
申请日：2022-06-17
申请人： FUJIFILM Corporation
发明人： NAONO, Takayuki , TANAKA, Nobuya , NISHIURA, Yosuke , ABE, Masaaki
IPC分类号： G02B26/08
摘要： Provided are an optical scanning device and a control method thereof capable of realizing a spiral rotation operation in which a change speed of a swing amplitude is fast and a radius vector changes linearly even in a case where a resonance frequency and a driving frequency do not match.
An optical scanning device includes a mirror device that has a mirror portion, which is swingable around a first axis and a second axis orthogonal to each other, having a reflecting surface reflecting incident light, a first actuator causing the mirror portion to swing around the first axis by applying a rotational torque around the first axis to the mirror portion, and a second actuator causing the mirror portion to swing around the second axis by applying a rotational torque around the second axis to the mirror portion, and a processor that provides a first driving signal to the first actuator and provides a second driving signal to the second actuator. The processor, with the first driving signal and the second driving signal each as cyclic voltage signals whose amplitudes and phases change with time, causes the mirror portion to perform a spiral rotation operation including a period in which a swing amplitude around the first axis and a swing amplitude around the second axis change linearly.

2. 发明公开

EP4270085A1 OPTICAL SCANNING DEVICE AND ABNORMALITY DETECTION METHOD 审中-实审
公开(公告)号：EP4270085A1
公开(公告)日：2023-11-01
申请号：EP23167694.1
申请日：2023-04-13
申请人： FUJIFILM Corporation
发明人： ABE, Masaaki , NAONO, Takayuki , NISHIURA, Yosuke
IPC分类号： G02B26/08
摘要： Provided are an optical scanning device and an abnormality detection method with which an abnormal operation of a mirror can be detected at high speed during the operation.
An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, and an actuator that allows the mirror to swing; a control device configured to control an operation of the actuator; a light irradiation device configured to irradiate a back surface of the mirror on a side opposite to the reflecting surface with illumination light; a detection device to which reflected light of the illumination light that has been reflected by the mirror is incident and configured to output a position signal representing a position of the incidence light; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount of the position signal.

3. 发明公开

EP4270051A1 OPTICAL SCANNING DEVICE AND ABNORMALITY DETECTION METHOD 审中-实审
公开(公告)号：EP4270051A1
公开(公告)日：2023-11-01
申请号：EP23167690.9
申请日：2023-04-13
申请人： FUJIFILM Corporation
发明人： ABE, Masaaki , NAONO, Takayuki , NISHIURA, Yosuke
IPC分类号： G01S7/481
摘要： Provided are an optical scanning device and an abnormality detection method with which an abnormal operation of a mirror can be detected at high speed during the operation.
An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, an actuator that allows the mirror to swing, and a piezoelectric element that generates and outputs electromotive force by the swinging of the mirror; a control device configured to control an operation of the actuator; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount in an output signal from the piezoelectric element.

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