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1. 发明公开

EP1313216A3 Temperature compensation mechanism for a micromechanical ring resonator 有权
标题翻译：微机械环形谐振器的温度补偿机制
公开(公告)号：EP1313216A3
公开(公告)日：2005-07-13
申请号：EP02079955.7
申请日：2000-11-01
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Giousouf, Metin , Kück, Heinz , Platz, Rainer
IPC分类号： H03B5/30 , H03H9/24 , H03H9/02
CPC分类号： G01C19/5712 , H03B5/30
摘要： There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate, according to a first oscillation mode, around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit. Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.
摘要翻译：描述了包括谐振器（4）和集成电子电路（3）的时基，用于驱动谐振器振荡并且响应于该振荡产生具有确定频率的信号。谐振器是集成的微机械环形谐振器，其支撑在衬底（2）上方并且适于根据第一振荡模式围绕基本垂直于衬底的旋转轴线（O）振荡，环形谐振器包括中心柱（5 ），所述独立振荡结构（6）连接到所述中心支柱并且包括与所述旋转轴线同轴并且通过多个所述中心支柱连接到所述中心支柱的外部环（60）弹簧元件（62）以及设置在外环周围并连接到集成电子电路的电极结构（9; 9 *）。电极（100,120; 130,150）以这样的方式定位在独立式振荡结构之下，以便在基本上垂直于衬底的平面中驱动和感测第二振荡模式，并且具有不同于第一振荡模式的谐振频率，两个振荡模式的谐振频率之间的频率差用于补偿温度对由时基产生的信号的频率的影响。

2. 发明公开

EP1313215A2 Temperature compensation mechanism for a micromechanical ring resonator 有权
标题翻译：微机械环形谐振器的温度补偿机制
公开(公告)号：EP1313215A2
公开(公告)日：2003-05-21
申请号：EP02079954.0
申请日：2000-11-01
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Giousouf, Metin , Kück, Heinz , Platz, Rainer
IPC分类号： H03H9/24 , H03H3/013
CPC分类号： G01C19/5712 , H03B5/30
摘要： There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit. The free-standing oscillating structure further comprises a plurality of thermally compensating members (65) which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring resonator.
摘要翻译：描述了包括谐振器（4）和集成电子电路（3）的时基，用于驱动谐振器振荡并且响应于该振荡产生具有确定频率的信号。该谐振器是一种集成的微机械环形谐振器，其被支撑在衬底（2）之上并适于围绕基本上垂直于衬底的旋转轴线（O）振荡，环形谐振器包括从衬底沿轴线一个独立的摆动结构（6），它连接到中心支柱上并包括一个与旋转轴线同轴并通过多个弹簧元件（62）连接到中心支柱的外环（60），以及设置在外环周围并连接到集成电子电路的电极结构（9; 9 *）。自立式摆动结构还包括多个热补偿构件（65），所述多个热补偿构件适于根据温度改变自立振荡结构的惯性质量矩以便补偿温度对环形谐振器的谐振频率。

3. 发明授权

EP1313216B1 Temperature compensation mechanism for a micromechanical ring resonator 有权
标题翻译：温度补偿机构用于微机械环形谐振器
公开(公告)号：EP1313216B1
公开(公告)日：2011-08-10
申请号：EP02079955.7
申请日：2000-11-01
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Giousouf, Metin , Kück, Heinz , Platz, Rainer
IPC分类号： H03B5/30 , H03H9/24 , H03H9/02
CPC分类号： G01C19/5712 , H03B5/30

4. 发明公开

EP1313215A3 Temperature compensation mechanism for a micromechanical ring resonator 有权
标题翻译：温度补偿机构用于微机械环形谐振器
公开(公告)号：EP1313215A3
公开(公告)日：2005-07-13
申请号：EP02079954.0
申请日：2000-11-01
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Giousouf, Metin , Kück, Heinz , Platz, Rainer
IPC分类号： H03B5/30 , H03H9/24 , H03H9/02
CPC分类号： G01C19/5712 , H03B5/30
摘要： There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit. The free-standing oscillating structure further comprises a plurality of thermally compensating members (65) which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring resonator.

5. 发明公开

EP1313216A2 Temperature compensation mechanism for a micromechanical ring resonator 有权
标题翻译： Temperaturkompensations机制fen einen mikromechanischen ringresonator
公开(公告)号：EP1313216A2
公开(公告)日：2003-05-21
申请号：EP02079955.7
申请日：2000-11-01
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Giousouf, Metin , Kück, Heinz , Platz, Rainer
IPC分类号： H03H9/24 , H03H3/013
CPC分类号： G01C19/5712 , H03B5/30
摘要： There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate, according to a first oscillation mode, around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit. Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.
摘要翻译：描述了包括谐振器（4）和集成电子电路（3）的时基，用于将谐振器驱动到振荡中，并且响应于振荡产生具有确定频率的信号。所述谐振器是支撑在衬底（2）上并且适于根据第一振荡模式围绕基本上垂直于衬底的旋转轴线（O）振荡的集成微机械环谐振器，所述环形谐振器包括中心柱（5 ），从所述基板沿着旋转轴线延伸的独立的摆动结构（6），其连接到所述中心柱并且包括与所述旋转轴线共轴的外环（60），并通过多个连接到所述中心柱弹簧元件（62）和设置在外圈周围并连接到集成电子电路的电极结构（9; 9 *）。电极（100,120,130,150）位于自立式振荡结构下面，以便在基本上垂直于衬底的平面中驱动和感测第二振荡模式，并具有不同于第一振荡模式的谐振频率，两个振荡模式的谐振频率之间的频率差被用于补偿温度对由时基产生的信号的频率的影响。

6. 发明授权

EP1174756B1 Ensemble d'affichage comportant une cellule électro-optique et une cellule photovoltaique 有权
标题翻译：与电光和光伏电池显示部
公开(公告)号：EP1174756B1
公开(公告)日：2015-09-09
申请号：EP00202624.3
申请日：2000-07-21
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Platz, Rainer , Saurer, Eric , Basturk, Naci
IPC分类号： G02F1/1335 , G02F1/157 , G04C9/06
CPC分类号： G02F1/13306 , G02F1/133553 , G04C10/02

7. 发明授权

EP1313215B1 Temperature compensation mechanism for a micromechanical ring resonator 有权
标题翻译：温度补偿机构用于微机械环形谐振器
公开(公告)号：EP1313215B1
公开(公告)日：2012-05-02
申请号：EP02079954.0
申请日：2000-11-01
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Giousouf, Metin , Kück, Heinz , Platz, Rainer
IPC分类号： G01C19/56 , H03B5/30
CPC分类号： G01C19/5712 , H03B5/30

8. 发明授权

EP1217735B1 Time base comprising an integrated micromechanical tuning fork resonator 有权
标题翻译：具有集成的微机械音叉谐振器的时间基准
公开(公告)号：EP1217735B1
公开(公告)日：2007-11-14
申请号：EP00204720.7
申请日：2000-12-21
申请人： ETA SA Manufacture Horlogère Suisse
发明人： Giousouf, Metin , Kück, Heinz , Platz, Rainer
IPC分类号： H03H9/21
CPC分类号： H03H9/2484 , H03H9/21 , H03H2009/02299

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