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1. 发明授权

EP1205223B1 Evacuating system 有权
标题翻译：疏散系统
公开(公告)号：EP1205223B1
公开(公告)日：2010-09-01
申请号：EP01126890.1
申请日：2001-11-12
申请人： EBARA CORPORATION
发明人： Nomura, Norihiko , Noji, Nobuharu , Yanagisawa, Kiyoshi
IPC分类号： B01D8/00
CPC分类号： C23C16/4412 , B01D8/00 , Y10S55/15

2. 发明公开

EP0847789A1 Trapping device 失效
标题翻译： Falle zur Trennung von Abgasen
公开(公告)号：EP0847789A1
公开(公告)日：1998-06-17
申请号：EP97122149.4
申请日：1997-12-16
申请人： EBARA CORPORATION , CKD Corporation
发明人： Noji, Nobuharu , Nomura, Norihiko , Sugiura, Tetsuro , Matsuoka, Yuji
IPC分类号： B01D53/00 , B01D8/00
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02
摘要： A trapping device is presented to improve production efficiency of vacuum processing devices. The trapping device comprises an exhaust path for evacuating process gas from a hermetic chamber through a vacuum pump; a regeneration path disposed adjacent to the exhaust path and comprising a regeneration means; not less than two trap sections communicable either with the exhaust path or with the regeneration path; and switching means for transposing the trap sections either to the exhaust path or to the regeneration path. A trapping operation and a regeneration operation can be performed concurrently respectively in the exhaust path and the regeneration path.
摘要翻译：提出了一种捕获装置，以提高真空处理装置的生产效率。捕集装置包括用于通过真空泵将来自密封室的处理气体排出的排气路径; 再生路径，邻近排气通道设置并包括再生装置; 不少于两个可与排气路径或再生路径通信的陷阱区段; 以及用于将捕获部分转置到排气路径或再生路径的切换装置。捕集作业和再生操作也可以在排气通路和再生路径中同时进行。

3. 发明公开

EP1914423A2 Trap apparatus and trap system 审中-公开
标题翻译： Falle und Fallensystem
公开(公告)号：EP1914423A2
公开(公告)日：2008-04-23
申请号：EP08002135.5
申请日：1999-01-21
申请人： EBARA CORPORATION
发明人： Nomura, Norihiko , Noji, Nobuharu
IPC分类号： F04B37/16 , F04B37/08
CPC分类号： F04B37/16 , B01D45/08 , F04B37/08
摘要： The present invention provides a trap apparatus which is capable of increasing the trapping efficiency while fulfilling a conductance allowed by a vacuum chamber in a depositing process or the like, for thereby increasing the service life of a vacuum pump and protecting a toxic substance removing device for increased operation reliability, and reducing equipment and running costs. The trap apparatus has a trap unit (18) disposed in a discharge passage (14) for discharging therethrough a gas from a vacuum chamber (10) with a vacuum pump (12) for trapping and removing a product in a discharged gas. The trap unit (18) has trap passages comprising an upstream passage portion (44) spreading outwardly from the center and a downstream passage portion (42) directed inwardly toward the center.
摘要翻译：本发明提供一种捕集装置，其能够在沉积过程等中实现真空室允许的导电性的同时提高捕集效率，从而提高真空泵的使用寿命并保护有毒物质去除装置提高运行可靠性，降低设备运行成本。捕集装置具有设置在排出通道（14）中的捕集单元（18），用于通过真空室（10）从真空室（10）中排出气体，用于在排放气体中捕获和去除产物。捕集器（18）具有捕集通道，该通道包括从中心向外展开的上游通道部分（44）和向内朝向中心的下游通道部分（42）。

4. 发明授权

EP0847789B1 Trapping device 失效
标题翻译：用于废气的分离的情况下
公开(公告)号：EP0847789B1
公开(公告)日：2003-11-12
申请号：EP97122149.4
申请日：1997-12-16
申请人： EBARA CORPORATION
发明人： Noji, Nobuharu , Nomura, Norihiko , Sugiura, Tetsuro , Matsuoka, Yuji
IPC分类号： B01D53/00 , B01D8/00
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02

5. 发明公开

EP1074287A2 Trap apparatus 审中-公开
标题翻译：诱捕装置
公开(公告)号：EP1074287A2
公开(公告)日：2001-02-07
申请号：EP00116812.9
申请日：2000-08-03
申请人： EBARA CORPORATION
发明人： Nomura, Norihiko
IPC分类号： B01D5/00 , B01D8/00 , B01D53/00 , C23C16/44
CPC分类号： C23C16/4412 , B01D8/00 , B01D53/02 , B01D53/14 , B01D53/34
摘要： A trap apparatus comprises a discharge path for evacuating a hermetically sealed chamber through a vacuum pump, a hermetically sealed trap container extended across the discharge path and a regeneration path disposed adjacent to the discharge path, a trap unit disposed in the trap container for attaching a product in a discharged gas thereon and removing the product from the discharged gas, the trap unit being selectively located at the discharge path or the regeneration path, a valve element disposed on both sides of the trap unit and being movable integrally with the trap unit, and a sealing material mounted on an outer circumferential surface of the valve element so as to slide over an inner circumferential surface of the trap container when the trap unit is moved.
摘要翻译：一种收集装置包括：排出通道，用于通过真空泵排出密封室;密封的收集容器，延伸穿过排出通道和邻近排出通道设置的再生通道;收集单元，设置在收集容器中用于连接并将产物从排放气体中排出，所述捕集单元选择性地位于所述排放路径或所述再生路径;阀元件，所述阀元件设置在所述捕集单元的两侧并且可与所述捕集单元一体地运动，以及密封材料，所述密封材料安装在所述阀元件的外周表面上，以便当所述收集单元移动时在所述收集容器的内圆周表面上滑动。

6. 发明公开

EP0811413A2 Evacuation system 失效
标题翻译： Auslasssystem
公开(公告)号：EP0811413A2
公开(公告)日：1997-12-10
申请号：EP97108313.4
申请日：1997-05-22
申请人： EBARA CORPORATION
发明人： Noji, Nobuharu , Niimura, Yasuhiro , Ogamino, Hiroaki , Hattori, Hiroshi , Nomura, Norihiko , Sugiura, Tetsuro , Matsuoka, Yuji
IPC分类号： B01D53/00
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02 , Y02C20/30
摘要： An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.
摘要翻译：公开了一种使用寿命长，紧凑结构和高可靠性的疏散系统。该系统能够使工艺气体重新使用，从而减少资本投资和运营的总体成本。该系统包括处理室和通过用于抽空处理室的抽空管道与处理室连通的真空泵。排气管设置有不少于两个串联布置的捕集装置，并在不同温度下操作，用于捕获从处理室排出的废气中所含的不同部件。

7. 发明公开

EP1719551A2 Evacuation system 失效
标题翻译：排气系统
公开(公告)号：EP1719551A2
公开(公告)日：2006-11-08
申请号：EP06015405.1
申请日：1997-05-22
申请人： EBARA CORPORATION
发明人： Noji, Nobuharu , Niimura, Yasuhiro , Ogamino, Hiroaki , Hattori, Hiroshi , Nomura, Norihiko , Sugiura, Tetsuro , Matsuoka, Yuji
IPC分类号： B01D53/00 , C23C16/44
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02 , Y02C20/30
摘要： An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.

8. 发明公开

EP1074287A3 Trap apparatus 审中-公开
标题翻译：陷阱
公开(公告)号：EP1074287A3
公开(公告)日：2003-03-12
申请号：EP00116812.9
申请日：2000-08-03
申请人： EBARA CORPORATION
发明人： Nomura, Norihiko
IPC分类号： B01D5/00 , B01D8/00 , B01D53/00 , C23C16/44
CPC分类号： C23C16/4412 , B01D8/00 , B01D53/02 , B01D53/14 , B01D53/34
摘要： A trap apparatus (10) comprises a discharge path for evacuating a hermetically sealed chamber (12) through a vacuum pump (14), a hermetically sealed trap container (32) extended across the discharge path (16) and a regeneration path (18) disposed adjacent to the discharge path, a trap unit disposed in the trap container for attaching a product in a discharged gas thereon and removing the product from the discharged gas, the trap unit being selectively located at the discharge path or the regeneration path, a valve element disposed on both sides of the trap unit and being movable integrally with the trap unit, and a sealing material mounted on an outer circumferential surface of the valve element so as to slide over an inner circumferential surface of the trap container when the trap unit is moved.

9. 发明授权

EP0811413B1 Evacuation system 失效
标题翻译：疏散系统
公开(公告)号：EP0811413B1
公开(公告)日：2007-02-07
申请号：EP97108313.4
申请日：1997-05-22
申请人： EBARA CORPORATION
发明人： Noji, Nobuharu , Niimura, Yasuhiro , Ogamino, Hiroaki , Hattori, Hiroshi , Nomura, Norihiko , Sugiura, Tetsuro , Matsuoka, Yuji
IPC分类号： B01D53/00 , B01D8/00 , C23C16/44
CPC分类号： C23C16/4412 , B01D53/002 , F25B21/02 , Y02C20/30

10. 发明授权

EP0847790B1 Method of operation for a trapping device 失效
标题翻译：操作用于陷阱方法用于废气的分离
公开(公告)号：EP0847790B1
公开(公告)日：2003-11-19
申请号：EP97122150.2
申请日：1997-12-16
申请人： EBARA CORPORATION
发明人： Noji, Nobuharu , Nomura, Norihiko , Sugiura, Tetsuro
IPC分类号： B01D53/00 , B01D8/00
CPC分类号： C23C16/4412 , B01D8/00 , B01D53/002

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