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    • 3. 发明公开
    • Dry vacuum pump apparatus and method of cooling the same
    • Trockenvakuumpumpenvorrichtung undKühlverfahrendafür
    • EP2378122A2
    • 2011-10-19
    • EP11003266.1
    • 2011-04-18
    • Ebara Corporation
    • Ito, KazumaOyama, AtsushiUsui, Katsuaki
    • F04C25/02F04C29/04F04C28/08
    • F04C25/02F01C21/007F04C28/08F04C29/045F04C29/047F04C2220/12F04C2240/30F04C2240/40F04C2240/403F04C2240/808
    • A dry vacuum pump apparatus is small in size as it includes a highly efficient cooling unit for cooling, with a coolant such as cooling water, large-current circuit components of high self-heating value, typically switching devices of an inverter. The dry vacuum pump apparatus includes a dry vacuum pump including a pump unit and a motor for actuating the pump unit, an inverter for converting AC power from an AC power supply into AC power having a predetermined frequency and supplying the AC power to the motor, an electric equipment enclosure accommodating therein a control electronic circuit assembly including the inverter, a pump enclosure accommodating therein the dry vacuum pump and an operation monitoring sensor of the dry vacuum pump, a liquid-cooled partition interposed between the electric equipment enclosure and the pump enclosure, and having a coolant circulating therein, and an external enclosure housing therein the electric equipment enclosure, the pump enclosure, and the liquid-cooled partition as an integral structure.
    • 干式真空泵装置尺寸小,因为其包括用于冷却的高效冷却单元,冷却剂如冷却水,具有高自发热值的大电流电路部件,通常是逆变器的开关装置。 干式真空泵装置包括干式真空泵,其包括泵单元和用于启动泵单元的马达,用于将来自AC电源的AC电力转换成具有预定频率的AC电力并将AC电力提供给电动机的逆变器, 其中容纳有包括逆变器的控制电子电路组件的电气设备外壳,容纳干燥真空泵的泵壳体和干式真空泵的操作监测传感器,介于电气设备外壳和泵外壳之间的液体冷却分隔件 并且具有在其中循环的冷却剂,以及将电气设备外壳,泵外壳和液体冷却隔板作为整体结构容纳在其中的外部外壳。
    • 4. 发明公开
    • Dry vacuum pump apparatus
    • Trockenvakuumpumpenvorrichtung
    • EP2378125A3
    • 2014-11-26
    • EP11003265.3
    • 2011-04-18
    • Ebara Corporation
    • Ito, KazumaUsui, Katsuaki
    • F04C29/06F04C25/02
    • F04C29/061F04C18/12F04C2220/12
    • A dry vacuum pump apparatus includes a dry vacuum pump (10) having a final outlet port (18) and an intermediate release outlet port (19), an exhaust section check valve (51) connected to the final outlet port (18) and having an outlet port, an intermediate section check valve (52) connected to the intermediate release outlet port (19) and having an outlet port, and an exhaust passage (56) connected to the outlet port of the exhaust section check valve (51) and the outlet port of the intermediate section check valve (52), a silencer (53) connected to the exhaust passage (56) and having an outlet port connected to a final exhaust passage (56a) which is vented to the atmosphere.
    • 干式真空泵装置包括具有最终出口(18)和中间释放出口(19)的干式真空泵(10),连接到最终出口(18)的排气部止回阀(51),并具有 出口,连接到中间释放出口(19)并具有出口的中间部止回阀(52)和连接到排气部止回阀(51)的出口的排气通道(56),以及 中间部止回阀(52)的出口,连接到排气通道(56)的消音器(53),并具有连接到排放到大气中的最终排气通道(56a)的出口。