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    • 10. 发明公开
    • PROCESS AND MATERIALS FOR MAKING CONTAINED LAYERS AND DEVICES MADE WITH SAME
    • 用于制造含有层的方法和材料以及用该方法制造的器件
    • EP2673818A2
    • 2013-12-18
    • EP12744890.0
    • 2012-02-10
    • E.I. Du Pont De Nemours and Company
    • PARK, Kyung-HoRADU, Nora, SabinaDOBBS, Kerwin, D.FENNIMORE, Adam
    • H01L51/50C07C211/54H01L51/56
    • H01L51/0002G03F7/038G03F7/0755G03F7/325H01L51/0003H01L51/0059H01L51/56
    • There is provided a process for forming a contained second layer over a first layer, including the steps: forming the first layer having a first surface energy; treating the first layer with a priming material to form a priming layer; exposing the priming layer patternwise with radiation resulting in exposed areas and unexposed areas; developing the priming layer to effectively remove the priming layer from the unexposed areas resulting in a first layer having a pattern of developed priming layer, wherein the pattern of developed priming layer has a second surface energy that is higher than the first surface energy; and forming the second layer by liquid depositions on the pattern of developed priming layer on the first layer. The priming material has at least one unit of Formula I In Formula I: R1 through R6 are D, alkyl, aryl, or silyl, where adjacent R groups can join together to form an aromatic ring; X is a single bond, H, D, or a leaving group; Y is H, D, alkyl, aryl, silyl, or vinyl; a-f are an integer from 0-4; m, p and q are an integer of 0 or greater.
    • 提供了一种在第一层上形成所容纳的第二层的方法,包括以下步骤:形成具有第一表面能的第一层; 用底涂材料处理第一层以形成底涂层; 用带有辐射的图案在曝光区域和未曝光区域曝光底涂层; 显影所述底涂层以从所述未曝光区域有效地移除所述底涂层,从而导致具有显影底涂层图案的第一层,其中所述底涂层显影图案具有比所述第一表面能高的第二表面能; 以及通过液体沉积在第一层上的显影底涂层图案上形成第二层。 引发材料具有至少一个式I的单元:在式I中:R 1至R 6为D,烷基,芳基或甲硅烷基,其中相邻的R基团可以连接在一起形成芳环; X是单键,H,D或离去基团; Y是H,D,烷基,芳基,甲硅烷基或乙烯基; a-f是0-4的整数; m,p和q是0或更大的整数。