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2. 发明公开

EP2706335A1 Capacitive pressure sensor 有权
标题翻译： Kapazitiver Drucksensor
公开(公告)号：EP2706335A1
公开(公告)日：2014-03-12
申请号：EP13183108.3
申请日：2013-09-05
申请人： DYNISCO INSTRUMENTS LLC
发明人： Barron, Leo E. , Czazasty, John A. , Galler, Francis A.
IPC分类号： G01L9/00 , G01L9/12 , G01L19/00 , G01L19/04
摘要： High temperature pressure sensing devices and methods are disclosed. In some embodiments, a high temperature pressure sensor including intrinsic zero output and span correction versus temperature is disclosed. In addition, ways in which to improve high temperature performance through the use of intermediate circuits located towards the distal end of the high temperature pressure sensor as well as configurations to reduce thermally induced stresses within the pressure sensor are disclosed. The disclosed embodiments also detail ways in which to reduce signal loss due to various stray capacitances within the pressure sensor to improve signal fidelity and sensitivity.
摘要翻译：公开了高温压力感测装置和方法。在一些实施例中，公开了包括本征零输出和量程校正与温度的高温压力传感器。此外，公开了通过使用位于高温压力传感器的远端的中间回路来提高高温性能的方法以及减少压力传感器内的热诱导应力的构造。所公开的实施例还详细说明了减少由于压力传感器内的各种杂散电容引起的信号损失以提高信号保真度和灵敏度的方式。

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