会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明公开
    • VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG EINES BILDES EINER DÜNNEN SCHICHT EINES OBJEKTS
    • 方法和设备用于生成对象的薄层的图像
    • EP2038690A2
    • 2009-03-25
    • EP07726163.4
    • 2007-06-27
    • Carl Zeiss Meditec AG
    • WESTPHAL, PeterBUBLITZ, Daniel
    • G02B21/16G02B21/36G02B21/06
    • G02B21/367G02B21/06G02B21/16
    • The invention relates to a method for producing an image of a layer of an object (4) by means of a wide field optical element (5) on a resolving detector (6). According to the invention, the object (4) is illuminated in a focused manner on at least one object plane (3) having at least two binary illuminating patterns (26, 27; 33, 34) and for each illuminating pattern (26, 27; 33, 34), the corresponding images are detected. The illuminating patterns (26, 27; 33, 34) respectively comprise dark areas (27; 34) and light areas (26; 33), the light and/or the dark areas completely covering the object (4) when the illuminating pattern (26, 27; 33, 34) is superimposed. A layer image is determined from the detected images, said layer image comprising a partial segment that respectively reproduces a partial area of the object (4) that is arranged inside the light area of one of the used illuminating patterns such that said edges are arranged at a distance from the edges of the light area about at least one predefined minimum distance, and which are respectively determined with at least partial artificial light correction using at least two images which are respectively detected for different illumination patterns in which the partial area corresponding to the respective partial segment is arranged completely inside the light area of a first different illuminating pattern or completely inside a dark area of a second of the different illuminating pattern.