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1. 发明公开

EP2204469A1 MAGNETRON UNIT, MAGNETRON SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE 审中-公开
标题翻译： MAGNETRONEINHEIT，MAGNETRON-SPUTTERING-VORRCHTUNG UND VERFAHREN ZUR HERSTELLUNG EINER ELEKTRONISCHEN VORRICHTUNG
公开(公告)号：EP2204469A1
公开(公告)日：2010-07-07
申请号：EP08843409.7
申请日：2008-10-30
申请人： Canon Anelva Corporation
发明人： ENDO, Tetsuya , ABARRA, Einstein Noel
IPC分类号： C23C14/35 , H01L21/285
CPC分类号： C23C14/35 , C23C14/562 , H01J37/3408 , H01J37/3455
摘要： A magnetron unit includes a plurality of first magnet elements each including first magnets which have the same polarity and are provided on two end portions of a yoke plate made of a magnetic material and a second magnet which has a polarity different from that of the first magnets and is provided on a middle portion of the yoke plate, a base plate on which a moving unit is placed to make each of the plurality of first magnet elements move in one direction, and a second magnet element which includes yoke plates made of a magnetic material and fixed to two end portions, respectively, of the base plate, a magnet which has the same polarity as that of the second magnet and is placed on the yoke plate and a magnet which has the same polarity as that of the first magnet and is placed on the magnet.
摘要翻译：磁控管单元包括多个第一磁体元件，每个第一磁体元件包括具有相同极性的第一磁体并且设置在由磁性材料制成的磁轭板的两个端部上，第二磁体具有与第一磁体的极性不同的极性并且设置在轭板的中间部分，基板，放置移动单元以使多个第一磁体元件沿一个方向移动;第二磁体元件，其包括由磁性材料制成的磁轭板材料并分别固定在基板的两个端部，具有与第二磁体的极性相同的极性并放置在磁轭板上的磁体和具有与第一磁体相同极性的磁体，放在磁铁上。

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