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    • 8. 发明公开
    • HOCHFREQUENZZERSTÄUBUNGSVORRICHTUNG
    • 射频溅射
    • EP1701802A1
    • 2006-09-20
    • EP05700704.9
    • 2005-01-05
    • Blue Membranes GmbH
    • KUNSTMANN, JürgenRATHENOW, JörgASGARI, Sohéil
    • B05B17/06
    • B05B17/0607B05B5/087B05B14/00B05B16/20
    • The invention relates to a high frequency spraying device which is suitable for coating substrates with a coating fluid. According to the invention, coating is carried out with the aid of spray unit (1) which, for example is excited with a piezoceramic element at frequent vibrations, whereby the coating fluid undergoes capillary wave excitation and extremely fine coating agent drops are pinched off at the nodal points thereof. The inventive high-frequency atomization device also comprises a substrate holder (8) enabling the substrate (14) which is to be coated to be maintained in a position which is suitable for coating and to be subsequently moved into the area of a drying device (6) where the freshly coated substrate (14) can be dried. Preferably, the inventive device comprises a suction device (10) which is used to suction the overspray, a device for tempering the application chamber or parts of the application chamber and/or the used coating solutions, in addition to an anode and pole flange plate system for producing magnetic fields and/or electrostatic or ionizing fields in order to influence the distribution of coating solutions and/or the geometric orientation of particle components of said coating solutions.