专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

EP4385064A1 LINEAR SORTER USING VACUUM BELT 审中-实审
公开(公告)号：EP4385064A1
公开(公告)日：2024-06-19
申请号：EP22856394.6
申请日：2022-07-08
申请人： Applied Materials, Inc.
发明人： SCHLEZINGER, Asaf , STOPPER, Markus J.
IPC分类号： H01L21/67 , H01L21/677 , H01L21/683
CPC分类号： B07C5/36 , B65G47/71 , B65G21/2036 , B65G2207/1820130101 , B65G2201/02220130101

2. 发明公开

EP3091566A1 SUBSTRATE ROTARY LOADER 审中-实审
标题翻译： ROTIERENDER SUBSTRATLADER
公开(公告)号：EP3091566A1
公开(公告)日：2016-11-09
申请号：EP16168394.1
申请日：2016-05-04
申请人： Applied Materials, Inc.
发明人： STOPPER, Markus J. , SCHLEZINGER, Asaf
IPC分类号： H01L21/677
CPC分类号： B65G47/91 , B65G47/04 , H01L21/67736 , H01L21/67766
摘要： A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection station is disclosed herein. The loading module includes two arms, a plurality of substrate grippers, two rotatable support members, a conveyor, and at least one actuator. Each arm has a first end and a second end, wherein the second end is opposite the first end. Each substrate gripper is disposed at a respective end of each arm. Each rotatable support member is coupled to a respective one of the arms. The conveyor is disposed between the rotatable support members. The at least one actuator is configured to rotate the arms about the rotatable support members to selectively position the grippers over the conveyor in a location that allows a substrate held by the gripper to be released onto the conveyor.
摘要翻译：本文公开了一种在检查站中装载基板的方法和装置。在一个实施例中，本文公开了一种用于基板检查站的加载模块。加载模块包括两个臂，多个基板夹持器，两个可旋转的支撑构件，输送机和至少一个致动器。每个臂具有第一端和第二端，其中第二端与第一端相对。每个基板夹持器设置在每个臂的相应端部。每个可旋转的支撑构件联接到相应的一个臂。输送机设置在可旋转的支撑构件之间。所述至少一个致动器构造成使所述臂绕所述可旋转的支撑构件旋转，以将所述夹持器选择性地定位在所述输送机上方的位置，所述位置允许由所述夹持器保持的基板被释放到所述输送机上。

3. 发明公开

EP4260364A1 METHOD AND APPARATUS FOR CONTINUOUS SUBSTRATE CASSETTE LOADING 审中-实审
公开(公告)号：EP4260364A1
公开(公告)日：2023-10-18
申请号：EP21904060.7
申请日：2021-10-19
申请人： Applied Materials, Inc.
发明人： SCHLEZINGER, Asaf , STOPPER, Markus J.
IPC分类号： H01L21/677 , H01L21/66 , H01L21/67 , H02S50/10

4. 发明授权

EP3127147B1 HIGH SPEED ROTARY SORTER 有权转让
公开(公告)号：EP3127147B1
公开(公告)日：2020-09-02
申请号：EP16785079.1
申请日：2016-04-05
申请人： Applied Materials, Inc.
发明人： STOPPER, Markus J. , SCHLEZINGER, Asaf
IPC分类号： H01L21/66 , H01L21/67 , B07C5/10 , B07C5/344 , H01L21/683 , G01B11/00 , B07C5/342 , G01N21/64 , G01N21/95

5. 发明公开

EP3127147A1 HIGH SPEED ROTARY SORTER 有权转让
标题翻译： HOCHGESCHWINDIGKEITSDREHSORTIERER
公开(公告)号：EP3127147A1
公开(公告)日：2017-02-08
申请号：EP16785079.1
申请日：2016-04-05
申请人： Applied Materials, Inc.
发明人： STOPPER, Markus J. , SCHLEZINGER, Asaf
IPC分类号： H01L21/66 , H01L21/677
CPC分类号： H01L21/67271 , B07C5/10 , B07C5/342 , B07C5/344 , G01B11/00 , G01N21/6489 , G01N21/9501 , G01N2021/845 , H01L21/67766 , H01L21/67769 , H01L21/6838 , H01L22/12
摘要： Embodiments of the present disclosure generally relate to expandable substrate inspection systems. The inspection system includes multiple metrology units adapted to inspect, detect, or measure one or more characteristics of a substrate, including thickness, resistivity, saw marks, geometry, stains, chips, micro cracks, and crystal fraction. The inspection systems may be utilized to identify defects on substrates and estimate cell efficiency prior to processing a substrate. Substrates may be transferred through the inspection system and/or between metrology units on a track or conveyor, and then sorted via at least one gripper coupled with the high speed rotatory sorting apparatus into respective bins based upon the inspection data. The rotary sorting apparatus maintains a sorting capability of at least 5,400 substrates per hour. Each bin may optionally have a gas support cushion for supporting the substrate as it falls from the rotary sorting apparatus into the respective bin.
摘要翻译：本公开的实施例一般涉及可扩展基板检查系统。检查系统包括适于检查，检测或测量衬底的一个或多个特性的多个测量单元，包括厚度，电阻率，锯痕，几何形状，污渍，碎片，微裂纹和晶体分数。检查系统可用于识别基板上的缺陷并且在处理基板之前估计电池效率。基板可以通过检查系统和/或在轨道或输送机上的计量单元之间传送，然后基于检查数据，通过与高速旋转分选设备耦合的至少一个夹具分选到相应的箱中。旋转分选装置保持每小时至少5400个底材的分选能力。每个箱子可以可选地具有气体支撑衬垫，用于当衬底从旋转分选设备落到相应的箱中时支撑衬底。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式