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2. 发明公开

EP2427902A1 APPARATUS AND METHOD FOR PLASMA TREATMENT OF CONTAINERS 有权
标题翻译： VORRICHTUNG UND VERFAHREN ZUR PLASMABEHANDLUNG VONBEHÄLTERN
公开(公告)号：EP2427902A1
公开(公告)日：2012-03-14
申请号：EP10719867.3
申请日：2010-05-06
申请人： 3M Innovative Properties Company
发明人： HANSON, Daniel R. , DAVID, Moses M. , WHITE, David J. , KELLY, Jean A. , ALBAND, Todd D.
IPC分类号： H01J37/32 , B05D7/22 , C23C16/04
CPC分类号： H01J37/32394 , A61M15/009 , A61M2205/0238 , B05D1/62 , B05D3/142 , B05D5/083 , B05D7/227 , B05D2202/25 , C23C16/045 , C23C16/45578 , H01J37/32366 , H01J37/3244
摘要： An apparatus (9) for plasma treating multiple containers. The apparatus includes a manifold (2) comprising at least a first chamber with multiple outlet openings and multiple hollow, electrically-conductive nozzles (10) for at least one of delivering or exhausting plasma-generating gas. The multiple hollow, electrically-conductive nozzles are connected to the multiple outlet openings and protrude from the manifold. A method of plasma treating multiple containers is also disclosed. The method includes providing a reactor system comprising an apparatus disclosed herein, inserting the multiple hollow, electrically-conductive nozzles into the multiple containers (30), evacuating the multiple containers, grounding the multiple hollow, electrically-conductive nozzles while applying radio frequency power to the multiple containers, providing a gas inside the containers, and generating a plasma. At least one of evacuating or providing the gas is carried out through the hollow, electrically-conductive nozzles.
摘要翻译：一种用于等离子体处理多个容器的装置（9）。该装置包括歧管（2），其包括具有多个出口开口的至少第一室和用于输送或排出等离子体产生气体的至少一个的多个中空的导电喷嘴（10）。多个中空的导电喷嘴连接到多个出口开口并从歧管突出。还公开了一种等离子体处理多个容器的方法。该方法包括提供包括本文公开的装置的反应器系统，将多个中空的导电喷嘴插入多个容器（30）中，抽空多个容器，将多个中空的导电喷嘴接地，同时施加射频功率多个容器，在容器内提供气体，并产生等离子体。抽空或提供气体中的至少一个通过中空的导电喷嘴进行。

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