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    • 3. 发明公开
    • COVER BODY AND SUBSTRATE RECEIVING CONTAINER
    • 盖部件与基材RECORD CONTAINER
    • EP2068357A4
    • 2011-12-28
    • EP07828756
    • 2007-09-28
    • SHINETSU POLYMER CO
    • HASEGAWA AKIHIROTODA JUNYA
    • H01L21/673B65D55/14B65D85/00B65D85/86
    • B65D55/14B65D2585/86H01L21/67373
    • To provide a door structure and a substrate storage container with which there is less fear that even when the door is manually opened and closed, its parts, accessories and the like are lost, with which particles are unlikely to arise due to vibration, impacts and the like during transportation and with which it does not take long time to dry after washing. A container body 1 for accommodating substrates and a door structure 10 to be detachably fitted into an open front portion 2 of this container body 1 are provided. Door structure 10 is constructed of a casing detachably fitted into open front portion 2 of container body 1, a locking mechanism 14 disposed on the front side of the casing for locking the casing by projecting an engaging claw from the peripheral wall of the casing in a retractable manner as rotary plate 15 is turned so that the claw engages the inner periphery of open front portion 2 of container body 1, a cover plate 22 attached on the front side of the casing to cover the locking mechanism, and operational windows 30 which are formed in cover plate 22 so as to partially oppose rotary plate 15. A manual operating means is provided for rotary plate 15 of locking mechanism 14 at the position opposing operational window 30.
    • 8. 发明公开
    • SUBSTRATE STORAGE CONTAINER AND METHOD OF POSITIONING THE CONTAINER
    • 基板收纳容器和方法用于容器POSITIONIERUING
    • EP1758161A4
    • 2009-04-29
    • EP05734662
    • 2005-04-19
    • SHINETSU POLYMER CO
    • SUMI ATSUSHI
    • H01L21/68B65D85/86H01L21/673
    • H01L21/67379
    • A substrate storage container enabling the proper positioning thereof even when the container is mounted on an apparatus with the cover body side of a container body tilted downward to prevent troubles from occurring in operations after thereafter and a method of positioning the container. The container comprises the container body (1) in which a plurality of precise substrates are orderly stored, the cover body opening/closing the opened front face of the container body (1), and a plurality of positioning bodies (40) orderly installed at the bottom part of the container body (1). Each positioning body (40) is formed in a recessed part of a pair of parallel ribs (2) formed on the bottom face of the container body (1) and the inner surface (9) of the curved part (8) of a track (6) formed on a bottom plate (4). The inner surface (9) of the track (6) is tilted from the upper side to the lower side to be gradually diverged linearly, and the upper end parts of the inner surface (9) are formed by extending to opposed areas (2a) positioned in the clearances thereof from the lower end parts of the pair of parallel ribs (2).
    • 9. 发明公开
    • SUBSTRATE-STORING CONTAINER
    • 基板收纳容器
    • EP1548820A4
    • 2007-06-06
    • EP03795227
    • 2003-08-19
    • SHINETSU POLYMER CO
    • MIMURA HIROSHINIIYA WATARUYAJIMA TOSHITSUGU
    • H01L21/68H01L21/673
    • H01L21/67369H01L21/67383H01L21/67393
    • A substrate-storing container capable of preventing a substrate and a clean environment for processing the substrate from being contaminated because of production of wear powder. A substrate-storing container has a front opening box-type container main body for storing plural substrates in an orderly manner, a cover body for opening and closing in a sealable manner an opened front face of the container main body, and an inner pressure-adjusting mechanisms fitted in the container main body and in an installation portion for the cover body, and for adjusting inner pressure of the container main body closed by the cover body. The inner pressure-adjusting mechanisms each structured of an elastic installation tube, a filter holder fitted and protected in the installation tube, and plural filters held in the filter holder. Installation holes are provided in the container main body and the cover body, so that the inner pressure adjusting-mechanisms can be installed only by installing the installation tubes, with a simple construction, in the installation holes with the tubes deformed elastically. Therefore, screw holes that are complex to process are not required, and the construction of a die for forming the container main body does not become complex.