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    • 9. 发明公开
    • Front-wing cantilever for the conductive probe of electrical scanning probe microscopes
    • 弯曲具有用于电扫描探针显微镜的导电探针前翼梁。
    • EP1610345A1
    • 2005-12-28
    • EP05012741.4
    • 2005-06-14
    • National Applied Research Laboratories
    • Chang, Mao-Nan
    • G12B21/02
    • G01Q70/16G01Q60/30G01Q70/10
    • The present invention discloses a front-wing cantilever for the conductive probe of electrical scanning probe microscopes, wherein two symmetrical front wings are installed to extend from two lateral sides of the front end of the cantilever so that those two front wings are positioned on two lateral sides of the conductive tip. The front-wing structure of the cantilever can effectively inhibit the optical perturbation in the electrical scanning probe microscopes and obviously promote the analysis accuracy thereof. The front-wing structure can provide the scanned region with an effective dark field lest the optical absorption appears in the scanned region of semiconductor specimen and inhibit the optical perturbation occurs during the measurement and analysis of the differential capacitance.
    • 本发明盘松动用于电扫描探针显微镜的导电探针的前翼悬臂,worin两个对称的前翼被安装到从所述悬臂的前端的两个侧面延伸,以便做这两个前翼上的两个横向定位 所述导电尖端的侧面。 悬臂的前翼结构能有效地抑制在光学扰动在电扫描探针显微镜和明显促进其分析精度。 前翼结构可以与在有效暗场读出的光吸收显示于半导体样品的扫描区域和抑制差动电容的测量和分析过程中发生的光学扰动提供被扫描区域。