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    • 4. 发明公开
    • ACCELEROMETER
    • BESCHLEUNIGUNGSMESSER
    • EP1446671A4
    • 2009-02-18
    • EP02789205
    • 2002-10-16
    • KIONIX INC
    • ADAMS SCOTT GMILLER SCOTT AJOHNSON WENDY JO H
    • G01P9/04G01P15/125G01P15/08H01L29/00
    • G01P15/0802G01P15/125G01P2015/0814G01P2015/0828
    • An accelerometer. A silicon wafer is etched to form a fixed portion, a movable portion, and a resilient coupling between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.
    • 加速度计。 蚀刻硅晶片以形成固定部分,可移动部分以及通常布置在晶片的平面内的固定部分和可移动部分之间的弹性耦合,可移动部分的质量集中在弹性耦合件的一侧上 。 硅结构的固定部分和可移动部分之一包括第一电极。 固定部分和可移动部分中的另一个包括平行于加速轴取向的第二电极和作为与第二电极机械耦合的共面的第三电极电连接的导电层。 第二电极和第三电极与第一电极电容性地相对设置,第一电极与第三电极之间的电容随着可移动部分相对于固定部分沿着加速度轴线的方向移动而增加并且随着可移动部分移动而减小 在相反的方向。 弹性联接器保持第一和第三电极跨越电容间隙彼此电容性地相反,同时响应于沿着垂直于晶片平面的加速轴的加速度允许第一电极相对于第二和第三电极的运动, 并且在加速停止时将第一电极弹性恢复到平衡位置。 当电极处于平衡位置时,第二电极与第一电极的大部分表面区域相对。 测量第一和第三电极之间的电容以获得沿轴的加速度的测量结果。
    • 8. 发明公开
    • Integrated monolithic microfabricated electrospray and liquid chromatography system and method
    • 集成单片微制造电喷雾和液相色谱系统和方法
    • EP1876443A3
    • 2008-03-12
    • EP07019029.3
    • 1999-09-01
    • Advion BioSciences, Inc.KIONIX, INC.
    • Moon, James, E.Schultz, Gary, A.Corso, Thomas, N.Davis, Timothy, J.Galvin, Gregory, J.Lowes, Stephen
    • G01N30/60
    • G01N30/6095G01N30/7266G01N2030/6013H01J49/0018H01J49/167Y10T436/24Y10T436/2575
    • An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.
    • 公开了电喷雾装置,液相色谱装置和电喷雾液相色谱系统。 该电喷射装置包括基板,该基板在注射表面上的入口孔与喷射表面上的出口孔之间限定通道,由从围绕出口孔的喷射表面凹进的部分限定的喷嘴和用于施加电的电极 对底物进行优化和产生电喷雾的潜力; 并且可选地附加电极以进一步修改电喷雾。 所述液相色谱装置包括分离基底,所述分离基底限定入口孔与储存器之间的引入通道以及所述储存器与出口孔之间的分离通道,所述分离通道填充有垂直于所述流体流的分离柱; 粘合到所述分离基板上以覆盖所述储存器和所述分离通道并邻近所述盖基板的盖基板; 以及可选的用于向流体施加电势的电极。 液相色谱装置的出口孔可以与电喷雾装置的入口孔均匀地接合以形成集成的单一系统。 可以在单个单片芯片中制造多个系统的阵列,用于快速顺序流体处理和产生电喷雾用于随后的分析,例如通过将电喷射装置的出口孔定位在质谱仪的取样孔口附近。
    • 10. 发明公开
    • Integrated monolithic microfabricated electrospray and liquid chromatography system and method
    • 集成用于液相色谱单片产生微基站和电的系统和方法
    • EP1876443A2
    • 2008-01-09
    • EP07019029.3
    • 1999-09-01
    • Advion BioSciences, Inc.KIONIX, INC.
    • Moon, James, E.Schultz, Gary, A.Corso, Thomas, N.Davis, Timothy, J.Galvin, Gregory, J.Lowes, Stephen
    • G01N30/60
    • G01N30/6095G01N30/7266G01N2030/6013H01J49/0018H01J49/167Y10T436/24Y10T436/2575
    • An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.
    • 电喷射设备,液相色谱设备和电喷雾 - 液相色谱系统中游离缺失光盘。 电喷雾装置包括在入口孔的喷射表面上的底物限定的通道之间和到喷射表面的出口孔,通过从围绕出口孔喷射表面凹入的部分限定的喷嘴,并且在电极的电气的应用 电位施加到基片,以优化和产生到电喷雾; 和,任选地,另外的(多个)电极つweiterer修改电。 液相色谱装置包括分离的基板限定之间的入口孔和储存器之间和出口孔的分离通道中的引入通道的贮存器,并且分离通道被填充有分离的帖子垂直于所述流体流动; 结合到分离的基板以封闭所述容器和所述分离通道邻近所述盖基板的盖基板; 和,任选地,(多个)电极为一个电位的流体的应用。 液相色谱装置的出口孔可与电装置的入口孔被均匀地接口到形成在集成的单个系统。多个系统的阵列可在用于电喷射的快速连续的流体处理和生成一个单芯片来制造 随后的分析,颜色:如通过定位附近的质谱仪的取样孔的电设备的出口孔。