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    • 10. 发明公开
    • ACCELEROMETER
    • BESCHLEUNIGUNGSMESSER
    • EP1446671A4
    • 2009-02-18
    • EP02789205
    • 2002-10-16
    • KIONIX INC
    • ADAMS SCOTT GMILLER SCOTT AJOHNSON WENDY JO H
    • G01P9/04G01P15/125G01P15/08H01L29/00
    • G01P15/0802G01P15/125G01P2015/0814G01P2015/0828
    • An accelerometer. A silicon wafer is etched to form a fixed portion, a movable portion, and a resilient coupling between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.
    • 加速度计。 蚀刻硅晶片以形成固定部分,可移动部分以及通常布置在晶片的平面内的固定部分和可移动部分之间的弹性耦合,可移动部分的质量集中在弹性耦合件的一侧上 。 硅结构的固定部分和可移动部分之一包括第一电极。 固定部分和可移动部分中的另一个包括平行于加速轴取向的第二电极和作为与第二电极机械耦合的共面的第三电极电连接的导电层。 第二电极和第三电极与第一电极电容性地相对设置,第一电极与第三电极之间的电容随着可移动部分相对于固定部分沿着加速度轴线的方向移动而增加并且随着可移动部分移动而减小 在相反的方向。 弹性联接器保持第一和第三电极跨越电容间隙彼此电容性地相反,同时响应于沿着垂直于晶片平面的加速轴的加速度允许第一电极相对于第二和第三电极的运动, 并且在加速停止时将第一电极弹性恢复到平衡位置。 当电极处于平衡位置时,第二电极与第一电极的大部分表面区域相对。 测量第一和第三电极之间的电容以获得沿轴的加速度的测量结果。