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    • 1. 发明公开
    • RELIABLE PIEZO-RESISTIVE PRESSURE SENSOR
    • ZUVERLÄSSIGERPIEZORESISTIVER DRUCKSENSOR
    • EP1747441A4
    • 2007-10-31
    • EP05752165
    • 2005-05-17
    • KAVLICO CORP
    • OBERMEIER HORST
    • G01L9/00G01L7/08G01L9/16G01L19/06
    • G01L19/147G01L9/0054G01L19/0627
    • A pressure sensor system for measuring the pressure of a corrosive media includes a silicon plate forming a diaphragm and a glass plate or ring bonded to said silicon plate with an opening over the diaphragm. The diaphragm has resistive areas of different orientations to provide first resistive areas which have increased resistance with diaphragm deflection, and other areas which have decreased or little change in resistance with diaphragm deflection. The resistive areas may be formed by doping the silicon plate. The resistive areas have broad doped connectors extending outward to areas beyond the seal between the glass plate or ring, to wire bond areas on the silicon plate. Accordingly, the wire bond pads are not exposed to the corrosive media.
    • 用于测量腐蚀介质的压力的压力传感器系统包括形成隔膜的硅板和通过隔膜上的开口接合到所述硅板的玻璃板或环。 膜片具有不同取向的电阻区域,以提供具有增大的膜片偏转阻力的第一电阻区域和其他区域,其中膜片偏转具有减小或几乎不变的电阻。 电阻区域可以通过掺杂硅板形成。 电阻区域具有宽广的掺杂连接器,其向外延伸到玻璃板或环之间的密封件之外的区域,以及硅板上的引线键合区域。 因此,导线接合焊盘不会暴露于腐蚀性介质。
    • 8. 发明公开
    • CAPACITIVE OIL DETERIORATION AND CONTAMINATION SENSOR
    • KAPAZITIVERÖL-ALTERUNGS UND-VERSCMUTZUNGSSENSOR
    • EP0965032A4
    • 2001-05-30
    • EP97932524
    • 1997-07-08
    • KAVLICO CORP
    • PARK KYONG MNASSAR MARCOS A
    • G01N11/00G01N27/22G01N33/28G01N33/30G01N27/26
    • G01N27/221G01N33/2888H01R13/5045
    • An oil deterioration and contamination sensor (10) includes a housing (14), a substrate (24) with a first capacitive plate (30) mounted within the housing (14), a second capacitive plate (34) mounted to the housing (14) close to the first capacitive plate (30), and a total reference capacitor which includes an external fixed reference capacitor (58). The second capacitive plate (34) is mounted to the housing (14) such that a mixed fluid including oil freely circulates within a gap (40) between the first and second capacitive plates (30, 34) thereby defining an oil deterioration and contamination sensor capacitor. The respective capacitances of the oil deterioration and contamination capacitor and the total reference capacitor provide an indication of a dielectric constant of the mixed fluid including oil within the gap (40). The sensor (10) includes circuitry to indicate when dielectric cons tant exceeds a predetermined value or exceeds a predetermined value at a rate of dielectric constant change in excess of a maximum ordinary rate of oil dielectric constant change.
    • 油劣化和污染传感器(10)包括壳体(14),具有安装在壳体(14)内的第一电容板(30)的基板(24),安装到壳体(14)的第二电容板 )靠近第一电容板(30),以及包括外部固定参考电容器(58)的总参考电容器。 第二电容板(34)安装到壳体(14),使得包含油的混合流体在第一电容板和第二电容板(30,34)之间的间隙(40)内自由循环,从而限定油劣化和污染传感器 电容。 油劣化和污染电容器和总参考电容器的相应电容提供间隙(40)内的包括油的混合流体的介电常数的指示。 传感器(10)包括用于指示介电常数何时超过预定值或超过预定值的电路,介电常数变化率超过最大常规油介电常数变化率。
    • 10. 发明公开
    • CAPACITIVE PRESSURE TRANSDUCER WITH AN INTEGRALLY FORMED FRONT HOUSING AND FLEXIBLE DIAPHRAGM
    • KAPAZITIVER DRUCKWANDLER MIT INTEGRAL GEFORMTEMTEILGEHÄUSEUND FLEXIBLER MEMBRAN
    • EP0890087A4
    • 1999-04-21
    • EP97914753
    • 1997-02-07
    • KAVLICO CORP
    • PARK KYONG M
    • G01L9/00G01L9/12
    • G01L9/0075
    • A simplified capacitive pressure transducer (10) includes a conductive surface (26), a portion of which is a surface of a flexible diaphragm (24) in direct contact with a pressure to be measured, and an insulating substrate (30) defining a plurality of capacitor electrodes sized to accommodate the measurement of pressures within a particular pressure range. The pressure transducer (10) includes a front housing (12) and a rear housing (14) which are fitted together to provide a transducer chamber within which a hybrid circuit (46) is secured. The insulating substrate (30) includes a reference capacitor electrode (40), a variable capacitor electrode (42) and vias (48). The insulating substrate (30) is mechanically coupled to the front housing (12) such that the conductive surface (26) of the front housing (12) and the reference capacitor electrode (40) form a reference capacitor, and the conductive surface (26) and the variable capacitor electrode (42) form a variable capacitor. The reference capacitor electrode (40) and the variable capacitor electrode (42) are electrically connected to the hybrid circuit (46) through the vias (48).
    • 简化的电容式压力传感器(10)包括导电表面(26)和绝缘衬底(30),所述导电表面(26)的一部分是柔性隔膜(24)的与待测量的压力直接接触的表面,所述绝缘衬底(30) 的电容器电极的尺寸被设计成适应特定压力范围内的压力的测量。 压力传感器(10)包括装配在一起的前壳体(12)和后壳体(14),以提供其中固定混合电路(46)的换能器室。 绝缘衬底(30)包括参考电容器电极(40),可变电容器电极(42)和通孔(48)。 绝缘衬底(30)机械连接到前壳体(12),使得前壳体(12)的导电表面(26)和参考电容器电极(40)形成参考电容器,并且导电表面(26 )和可变电容器电极(42)形成可变电容器。 参考电容器电极(40)和可变电容器电极(42)通过通孔(48)电连接到混合电路(46)。