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2. 发明公开

EP2662881A2 ENERGY-SAVING SILENCER ASSEMBLY, A SEMICONDUCTOR MANUFACTURING VACUUM PUMP WITH SAME AND METHOD FOR HEATING NITROGEN GAS 有权
标题翻译：节能装置消声器，半导体制造订单真空和方法加热并使氮气
公开(公告)号：EP2662881A2
公开(公告)日：2013-11-13
申请号：EP11854652.2
申请日：2011-12-28
申请人： J-Solution Co., Ltd.
发明人： LEE, Seung Yong
IPC分类号： H01L21/02
CPC分类号： F04B39/005 , F01N5/02 , F01N2240/02 , F04D19/04 , F04D29/663 , F24H3/12 , F28D7/026 , F28D7/103 , F28D7/106 , Y10T137/6525
摘要： The present invention pertains to an energy-saving silencer assembly, a semiconductor manufacturing vacuum pump with the same and a method for heating nitrogen gas. Nitrogen gas is heated using the high temperature of the surface of a silencer and supplied to the inside of the silencer so as to resolve blockage problems due to the solidification of reaction by-products while saving energy costs due to the use of additional heat sources. The energy-saving silencer assembly in the present invention as above includes: a silencer connected to a discharge side of a pump section, which pumps reaction by-product gas into a vacuum pump, so as to pass the pumped reaction by-product gas from a rear end portion to a front end portion; an outer pipe surrounding the outer peripheral surface of the silencer at an interval so as to provide a heating space between the silencer and the outer pipe; a nitrogen gas supply section for supplying nitrogen gas to the heating space; and a nitrogen gas injection section for injecting heated nitrogen gas to the inside of the silencer by the contact with the outer peripheral surface of the silencer in the heating space.
摘要翻译：本发明涉及到在节能器消声器组件，半导体制造真空泵用相同的和用于加热氮气的方法。氮气被用消音器的表面的高温下加热并供给到消音器的内部，以便解决堵塞问题，是由于副产物，同时节省由于使用额外的热源的能量成本反应的固化。在如上述，本发明的节能消音器组件包括：连接到泵部的排出侧的消音器，其中泵的反应副产物气体进入一个真空泵，以便通过泵送反应副产物气体从后端部至前端部; 上围绕至少在间隔以便提供消音器和所述外管之间的加热室中的消音器的外周表面的外管; 用于供给氮气的加热空间中的氮气供给部; 和用于通过与所述加热室中的消音器的外周表面的接触注入加热的氮气至消音器的内部的氮气注入部分。

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