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    • 2. 发明公开
    • AFM-SECM sensor
    • AFM-SECM-传感器
    • EP2458391A1
    • 2012-05-30
    • EP10193025.3
    • 2010-11-29
    • Technische Universität WienTechnische Universität GrazCEST Kompetenzzentrum für Elektrochemische Oberflächentechnologie GmbH
    • Avdic, AmraLugstein, Alois
    • G01Q60/02G01Q60/40G01Q60/60
    • G01Q60/02G01Q60/40G01Q60/60
    • The invention discloses an atomic force microscopy-scanning electrochemical microscopy (AFM-SECM) sensor comprising
      - an AFM tip on an AFM cantilever,
      - with a conductive layer on the AFM tip which forms a conductive AFM tip and wherein said conductive tip is connected to a contact region on the cantilever, said contact region providing the contact site for delivering the measurement signal to the AFM microscope,
      - wherein said conductive layer is covered by an insulating layer except for the immediate tip and the contact site,
      - wherein said insulating layer is covered by a conductive protection layer, and
      - wherein, due to a cavity between the conductive protection layer and the conductive AFM tip, said cavity being formed by the absence or by removal of a tip located portion of the insulating layer, the region of the conductive AFM tip forms a ring electrode with the conductive protection layer, and methods for producing such sensors.
    • 本发明公开了一种原子力显微镜扫描电化学显微镜(AFM-SECM)传感器,其包括 - AFM悬臂上的AFM尖端 - 在AFM尖端上具有导电层,其形成导电AFM尖端,并且其中所述导电尖端连接到 所述接触区域提供用于将所述测量信号传送到所述AFM显微镜的接触位置, - 其中所述导电层被除了直接尖端和接触位置之外的绝缘层覆盖,其中所述绝缘层 由导电保护层覆盖,并且其中,由于导电保护层和导电AFM尖端之间的空腔,所述空腔由绝缘层的末端位置部分的不存在或除去而形成, 导电AFM尖端形成具有导电保护层的环形电极,以及用于制造这种传感器的方法。