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    • 6. 发明公开
    • THREE-DIMENSIONAL SHAPE MEASURING APPARATUS USING DIFFRACTION GRATING
    • DREIDIMENSIONALE FORMMESSVORRICHTUNG MIT BEUNGUNGSGITTER
    • EP3220100A4
    • 2017-09-20
    • EP15859393
    • 2015-11-11
    • KOH YOUNG TECH INC
    • SER JANG IL
    • G01B11/24G01B9/02G01B11/06G01N21/956H01L21/66
    • G01B11/2441G01B9/02021G01B9/02025G01B9/02044G01B11/0608G01B2210/56G01B2290/20G01N21/956
    • Disclosed is a three-dimensional shape measuring apparatus using a diffraction grating, comprising: a light splitter installed in a traveling direction of a light generated from a light source unit and configured to reflect a portion of the light along a first path and transmit a portion of the light along a second path; an image sensor unit configured to receive a light traveling along the first path and reflected from a measurement target having at least one hole, and measure the shape of the measurement target; and a diffraction grating disposed on at least one light path among a light path between the light source unit and the light splitter, a light path between the measurement target and the light splitter, and a light path between the measurement target and the image sensor unit.
    • 公开了一种使用衍射光栅的三维形状测量装置,包括:分光器,其安装在从光源单元产生的光的行进方向上,并且被配置为沿着第一路径反射一部分光并且将光的一部分 沿着第二路径的光; 图像传感器单元,被配置为接收沿着第一路径行进并从具有至少一个孔的测量目标反射的光,并且测量测量目标的形状; 以及衍射光栅,其设置在所述光源单元和所述分光器之间的光路中的至少一个光路上,所述测量目标和所述分光器之间的光路以及所述测量目标和所述图像传感器单元之间的光路 。