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1. 发明公开

EP2686133A1 METHOD FOR PRODUCING A REFLECTIVE OPTICAL COMPONENT FOR AN EUV PROJECTION EXPOSURE APPARATUS AND COMPONENT OF THIS TYPE 有权转让
标题翻译：制造用于EUV投射曝光装置及零件这种类型的反射性光学部件
公开(公告)号：EP2686133A1
公开(公告)日：2014-01-22
申请号：EP12708143.8
申请日：2012-03-13
申请人： Carl Zeiss Laser Optics GmbH , Carl Zeiss SMT GmbH
发明人： KIEREY, Holger , SIEKMANN, Heiko , BRESAN, Andre
IPC分类号： B24B13/00 , G02B5/18
CPC分类号： G02B5/208 , B24B13/00 , G02B1/10 , G02B5/0891 , G02B5/10 , G02B5/1838 , G02B5/1852 , G02B5/1857 , G03F7/70316 , G21K2201/064 , G21K2201/065 , G21K2201/067
摘要： A method for producing a reflective optical component (10) for an EUV projection exposure apparatus, said component having a substrate (12) having a base body (14), and a reflective layer (20) arranged on the substrate (12), wherein the substrate (12) has an optically operative microstructuring (16), comprises the following steps: working the microstructuring (16) into the substrate (12), polishing the substrate (12) after the micro-structuring (16) has been worked into the substrate (12), applying the reflective layer (20) to the substrate (12). A reflective optical component for an EUV projection exposure apparatus correspondingly has a polished surface between the microstructuring and the reflective layer.

2. 发明授权

EP1743222B1 OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR 有权
标题翻译：具有改进的热性能的光学元件
公开(公告)号：EP1743222B1
公开(公告)日：2011-09-28
申请号：EP05742246.1
申请日：2005-05-04
申请人： Carl Zeiss Laser Optics GmbH
发明人： EGLE, Wilhelm , HAFNER, Wolfgang , ANDERL, Willi , BINGEL, Ulrich , MÜNZ, Holger , NEIDHARDT, Thomas
IPC分类号： G03F7/20
CPC分类号： G03F7/70891 , G03F7/70175 , G03F7/70858
摘要： An optical component is suggested, comprising at least one optically effective optical element (A1) which heats up when irradiated with light, and at least one holding element (B1) for the at least one optical element for holding the at least one optical element (A1) in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system (B2) for carrying off heat from the at least one optical element.

3. 发明公开

EP1941317A1 BEAM SEPARATING OPTICAL ELEMENT 有权
标题翻译：梁RACE终端光学元
公开(公告)号：EP1941317A1
公开(公告)日：2008-07-09
申请号：EP06806211.6
申请日：2006-10-12
申请人： Carl Zeiss Laser Optics GmbH
发明人： LE MAIRE, Michel , TRITSCHLER, Thorsten , SHKLOVER, Vitaly , MÜNZ, Holger , EGGER, Rafael , DERST, Gerhard
IPC分类号： G02B27/09
CPC分类号： G02B27/0905 , B23K26/066 , G02B27/0972 , G02B27/0977 , G02B27/0988
摘要： The invention relates to a beam seperating optical element (26) for limiting an illuminating field of an incident optical beam (24) comprising: a first surface (28) and a second surface (30), said first surface and said second surface enclosing an angle and forming an edge (32), said edge spatially separating said incident optical beam into at least two sub-beam (34, 36), and having a deviation from a predetermined shape of not more than 20 µm/m length.

4. 发明公开

EP2130234A2 CONTINUOUS COATING INSTALLATION AND METHODS FOR PRODUCING CRYSTALLINE THIN FILMS AND SOLAR CELLS 有权
标题翻译：安装连续涂层及其制造方法晶薄膜中的
公开(公告)号：EP2130234A2
公开(公告)日：2009-12-09
申请号：EP08707800.2
申请日：2008-02-25
申请人： Carl Zeiss Laser Optics GmbH , Carl Zeiss SMT AG
发明人： SHAH, Arvind , SCHADE, Horst , MUENZ, Holger , VOELCKER, Martin , SCHALL, Michael , KRANTZ, Matthias
IPC分类号： H01L31/18
CPC分类号： H01L31/1824 , C23C14/18 , C23C14/30 , C23C14/562 , C23C14/5813 , H01L31/076 , H01L31/1872 , H01L31/206 , Y02E10/545 , Y02E10/548 , Y02P70/521
摘要： The invention relates to a continuous coating installation (100) comprising a vacuum chamber (110) having a supply opening (102) for supplying a substrate (106) to be coated and a discharge opening (101) for discharging the coated substrate (106), a physical vapour deposition device (112) for coating a surface (126) of the substrate (106), a laser crystallization system (122) for simultaneously illuminating at least one sub-partial area (132) of a currently coated partial area (130) of the surface (126) of the substrate (106) with at least one laser beam (124), comprising a transport device (108) for transporting the substrate (106) in a feedthrough direction (136) from the supply opening (102) to the discharge opening (104) and for continuously or discontinuously moving the substrate (106) during the coating thereof in the feedthrough direction (136).

5. 发明公开

EP1964220A1 OPTICAL SYSTEM AND METHOD FOR SHAPING A PROFILE OF A LASER BEAM 审中-公开
标题翻译：光学系统和一种用于形成激光束的简介
公开(公告)号：EP1964220A1
公开(公告)日：2008-09-03
申请号：EP06829792.8
申请日：2006-12-20
申请人： Carl Zeiss Laser Optics GmbH
发明人： SHKLOVER, Vitaliy , MUENZ, Holger , LE MAIRE, Michel , HOESS, Christian
IPC分类号： H01S3/00 , G02B27/09
CPC分类号： G02B27/0927 , B23K26/032 , B23K26/064 , B23K26/0652 , G02B27/0972 , G02B27/0977
摘要： An optical system for shaping an incoming beam having a divergence with an angular distribution at least in a first direction comprises at least one angle selective optical element (26,28) for clipping the angular distribution in the at least first direction. The approach according to the present invention bases on using an angle-selective device (25,32) operated by the principle of total internal reflection to reduce divergence of the incoming beam, in contrast to a spatially-selective device as for example a field-stop or slit. The method according to the present invention has the advantage that no physical sharp edges have to be exposed at high energy densities. Thus, thermal impact and demands on the optical elements to withstand a high power laser beam are significantly reduced.

6. 发明公开

EP1743222A2 OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR 有权
标题翻译：具有改进的热性能的光学元件
公开(公告)号：EP1743222A2
公开(公告)日：2007-01-17
申请号：EP05742246.1
申请日：2005-05-04
申请人： Carl Zeiss Laser Optics GmbH
发明人： EGLE, Wilhelm , HAFNER, Wolfgang , ANDERL, Willi , BINGEL, Ulrich , MÜNZ, Holger , NEIDHARDT, Thomas
IPC分类号： G03F7/20
CPC分类号： G03F7/70891 , G03F7/70175 , G03F7/70858
摘要： An optical component is suggested, comprising at least one optically effective optical element (A1) which heats up when irradiated with light, and at least one holding element (B1) for the at least one optical element for holding the at least one optical element (A1) in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system (B2) for carrying off heat from the at least one optical element.

7. 发明公开

EP1363157A2 Verfahren und Vorrichtung zum variablen Abschwächen der Intensität eines Lichtstrahls 审中-公开
标题翻译：用于可变地衰减光束的强度的方法和装置
公开(公告)号：EP1363157A2
公开(公告)日：2003-11-19
申请号：EP03008627.6
申请日：2003-04-15
申请人： Carl Zeiss Laser Optics GmbH
发明人： Seifert, Wolfgang
IPC分类号： G02F1/19
CPC分类号： G02F1/19
摘要： Die Erfindung betrifft ein Verfahren zum variablen Abschwächen der Intensität (I 0 ) eines Lichtstrahls (12), bei dem man den Lichtstrahl (12e) auf zumindest eine optische Anordnung (14), die zumindest einen für den Lichtstrahl transparenten Körper (16) aufweist, richtet, derart, daß der Lichtstrahl (12e) durch eine Lichteinfallsfläche (20) in den zumindest einen Körper (16) eintritt und durch eine Lichtaustrittsfläche (22) aus dem zumindest einen Körper (16) wieder austritt, wobei der zumindest eine Körper (16) relativ zu dem einfallenden Lichtstrahl (12e) lageverstellt wird, um die Intensität (I a ) des austretenden Lichtstrahls (12a) in bezug auf die Intensität (I 0 ) des einfallenden Lichtstrahls (12e) zu ändern. Es wird vorgeschlagen, daß man den Lichtstrahl (12e) in dem zumindest einen Körper (16) zwischen der Lichteinfallsfläche (20) und der Lichtaustrittsfläche (22) auf zumindest eine Grenzfläche (24) zu einem optisch dünneren Medium einfallen läßt, wobei der zumindest eine Körper (16) relativ zu dem einfallenden Lichtstrahl (12e) so lageverstellt wird, daß der Einfallswinkel (ϕ e ) des Lichtstrahls auf die Grenzfläche (24) auf einen Winkel eingestellt wird, der kleiner oder größer als oder gleich dem Grenzwinkel der Totalreflexion an dieser Grenzfläche (24) ist. Des weiteren wird eine Vorrichtung insbesondere zur Durchführung des Verfahrens beschrieben (Fig. 1).
摘要翻译：本发明涉及一种用于可变地衰减光束（12），其中在至少一个光学组件（14）引导所述光束（12E）的强度（I0），其包括至少一部分透明的光束主体（16），使得光束（12E）通过光入射面（20）进入至少一个主体（16）和所述至少一个主体的一个光出射表面（22）（16）退出时，所述至少一个主体（16）相对于所述入射光束（12E）设置在位置相对于所述入射光束（12E）的强度（I 0）来改变出射光束（12a）的强度（Ia）的调整。所以建议是允许在所述光入射面（20）和光出射表面（22）之间的至少一个主体（16）发生的光束（12E）的至少一个边界表面（24）上的光学薄介质，其中所述至少一个体（16）相对于所述入射光束（12E），所述光束的入射角（φE）与接口（24）被设置成一角度，其在适当的位置调节，使得在该界面处小于或大于或等于全反射的临界角（24）。此外，装置（图1）尤其是用于实施该方法的说明。

8. 发明授权

EP2245497B1 ILLUMINATING APPARATUS AND METHOD FOR CONTROLLING ENERGY OF A LASER SOURCE 有权
标题翻译：照明装置和一种用于控制激光源的功率
公开(公告)号：EP2245497B1
公开(公告)日：2016-12-14
申请号：EP09709143.3
申请日：2009-01-22
申请人： Carl Zeiss Laser Optics GmbH , Cymer, LLC
发明人： WEIGL, Bernhard , SANDSTROM, Richard
IPC分类号： G02B27/09 , B23K26/073 , H01S3/13 , B23K26/70 , B23K26/06
CPC分类号： G02B27/0927 , B23K26/0626 , B23K26/0738 , B23K26/705 , H01S3/1305

9. 发明公开

EP2010355A1 APPARATUS FOR LASER ANNEALING OF LARGE SUBSTRATES AND METHOD FOR LASER ANNEALING OF LARGE SUBSTRATES 审中-公开
标题翻译：装置：用于大型基板的激光退火大型激光退火基材和方法
公开(公告)号：EP2010355A1
公开(公告)日：2009-01-07
申请号：EP07727502.2
申请日：2007-03-29
申请人： Carl Zeiss Laser Optics GmbH
发明人： EGGER, Rafael , MARCZUK, Piotr , SEIFERT, Wolfgang , TRITSCHLER, Thorsten , ZENZINGER, Markus , ANDERL, Willi , WALTHER, Jörg
IPC分类号： B23K26/06 , B23K26/08 , G02B27/09 , B23K26/073 , H01L21/20
CPC分类号： G02B27/09 , B23K26/0604 , B23K26/0648 , B23K26/0652 , B23K26/066 , B23K26/0738 , B23K26/0823 , B23K26/083 , H01L21/02691 , H01L21/2026 , H01L27/1285
摘要： The invention relates to an apparatus for laser annealing of large substrates comprising an optical device for generating a narrow illuminating line (31) on an illumination plane (36) of said substrate (32), said illumination line (31) being generated from a laser beam and having a cross-section with an expansion in a first direction and an expansion in a second direction, whereby said expansion in said first direction exceeds said expansion in said second direction by a multiple, and a scanning device being constructed for scanning a first section of said illumination plane of said substrate with said illuminating line in said second direction. According to the invention the apparatus comprises a rotating device for rotating (39) said substrate (32) relative to said illuminating line (31) by 180° about an axis (38) of rotation being normal to said illumination plane (36) after scanning said first section (37), whereby said scanning device is constructed for scanning a second section of said illumination plane (36) of said substrate (32) being adjacent to said first section of said illumination plane (36) of said substrate (32) with said illuminating line (31) in said second direction (y).

10. 发明公开

EP1351091A3 Optische Anordnung mit einer Blende 审中-公开
标题翻译：有孔的光学组件
公开(公告)号：EP1351091A3
公开(公告)日：2007-11-21
申请号：EP03000445.1
申请日：2003-01-10
申请人： Carl Zeiss Laser Optics GmbH
发明人： Anderl, Willi
IPC分类号： G02B27/09
CPC分类号： G02B7/008 , G02B5/005
摘要： Eine optische Anordnung (10) innerhalb eines optischen Systems weist ein in einem Gehäuse (18) angeordnetes optisches Bauelement (20) auf, das einen optisch wirksamen ersten Bereich (24), der auf einer optischen Achse (16) des optischen Systems positioniert ist, und einen den optisch wirksamen ersten Bereich (24) zumindest teilweise umgebenden optisch unwirksamen zweiten Bereich (26) auf. Mit dem optisch unwirksamen zweiten Bereich (26) des Bauelements (20) ist zumindest ein wärmeleitfähiges Element (32, 34) zum Abführen von Wärme von dem optisch unwirksamen zweiten Bereich (26) aus dem Gehäuse (18) heraus wärmeleitend verbunden (Fig. 2).

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