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    • 89. 发明公开
    • ADHESIVE FILM FOR SEMICONDUCTOR WAFER PROCESSING
    • EP3439024A1
    • 2019-02-06
    • EP17774499.2
    • 2017-03-21
    • Mitsui Chemicals Tohcello, Inc.
    • KURIHARA HiroyoshiFUKUMOTO Hideki
    • H01L21/304H01L21/683
    • An adhesive film for processing a semiconductor wafer (100) of the present invention includes a base material layer (10) and an ultraviolet-curable adhesive resin layer (20) provided on one surface side of the base material layer (10) and is used to protect a surface of a semiconductor wafer or fix the semiconductor wafer. In addition, in the adhesive film (100), the adhesive resin layer (20) includes an ultraviolet-curable adhesive resin, and a saturated electrostatic potential V 1 of the adhesive resin layer (20) after ultraviolet curing, which is measured using a method described below, is equal to or less than 2.0 kV.
      (Method)
      Ultraviolet rays having a main wavelength of 365 nm are radiated to the adhesive resin layer using a high-pressure mercury lamp in an environment of 25°C at a radiation intensity of 100 mW/cm 2 and an ultraviolet amount of 1,080 mJ/cm 2 , thereby photocuring the adhesive resin layer (20). Next, a voltage is applied to a surface of the adhesive resin layer (20) for 30 seconds under conditions of an applied voltage of 10 kV, a distance between a specimen and electrodes of 20 mm, 25°C, and 50%RH, and the saturated electrostatic potential (V 1 ) of the surface of the adhesive resin layer is computed according to JIS L1094.