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61. 发明公开

EP2035784A2 ÜBERWACHUNGSGERÄT FÜR EIN MEßGERÄT 审中-公开
标题翻译：监控测量装置
公开(公告)号：EP2035784A2
公开(公告)日：2009-03-18
申请号：EP07785834.8
申请日：2007-06-21
申请人： BAM Bundesanstalt für Materialforschung und- Prüfung
发明人： ZECIROVIC, Remzi
IPC分类号： G01D13/26 , G01L9/12
CPC分类号： G01L19/083 , G01D13/26 , G01L19/12
摘要： The invention relates to a monitoring device for a measuring device (100), comprising an indicator (120) and a sheet (110). Said indicator (120) and sheet (110) have a reflection behaviour for light which are different from each other. Said device comprises at least one first detection means (210) comprising a light source (220), and a sensor (230), at least one securing means (250) for securing the detection means (210) to the measuring device (100). Said detection means (210) can be arranged, with the aid of the securing means (250) such that the first sensor (230) can capture the light (228) reflected by the measuring device (100), the light being emitted by the first light source (220).

62. 发明公开

EP1929264A1 PRESSURE TRANSMITTER WITH ACOUSTIC PRESSURE SENSOR 有权转让
标题翻译：压力变送器声压传感器
公开(公告)号：EP1929264A1
公开(公告)日：2008-06-11
申请号：EP06814912.9
申请日：2006-09-19
申请人： Rosemount, Inc.
发明人： HEDTKE, Robert, C.
IPC分类号： G01L11/04 , G01L9/12 , G01F1/38 , G01L27/00
CPC分类号： G01F1/383 , G01L9/0072 , G01L11/04 , G01L27/007
摘要： A transmitter configured to measure a process variable of an industrial process, includes a pressure sensor configured to couple to a pressure of a fluid. An acoustic detector receives an acoustic signal from the fluid. Measurement circuitry coupled to the pressure sensor and the acoustic detector provides an output related to pressure of the fluid.

63. 发明公开

EP1923685A1 DIAPHRAGM MOUNTING STRUCTURE OF ELECTROSTATIC CAPACITANCE TYPE PRESSURE GAUGE 审中-公开
标题翻译：薄膜UR UR UR UR UR ES PS PS PS PS PS PS PS PS PS PS PS PS PS PS PS PS PS PS PS PS PS PS
公开(公告)号：EP1923685A1
公开(公告)日：2008-05-21
申请号：EP06782165.2
申请日：2006-08-02
申请人： Horiba Stec, Co., Ltd.
发明人： IKEDA, Toru
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , G01L9/0048
摘要： The present invention provides a diaphragm attaching structure of an electrostatic capacity type pressure gauge which can achieve an improvement of a measuring precision by inhibiting a poor weld and a heat strain from being generated while restricting an increase of a cost with an easy manufacturing.
The present invention is a diaphragm attaching structure of an electrostatic capacity type pressure gauge in which a diaphragm for receiving a fluid pressure is provided in a tensional manner on one end of a tubular case, and a fixed side electrode for picking up a deflection displacement of the diaphragm as a change of an electric capacity is provided within the tubular case on a side opposite to a pressure receiving surface of the diaphragm, wherein an outer peripheral edge portion of the diaphragm is formed thicker than a center portion thereof, and the thick outer peripheral edge portion is thermally molten to be welded and firmly attached to an end surface portion around the opening on the one end of the tubular case.
摘要翻译：本发明提供了一种静电电容型压力计的隔膜安装结构，通过抑制焊接不良和产生热应变，能够在容易制造的同时限制成本增加的同时，提高测量精度。本发明是一种静电电容式压力计的隔膜安装结构，其中在管状壳体的一端以拉伸方式设置用于接收流体压力的隔膜，以及用于拾取偏转位移的固定侧电极作为电容变化的隔膜设置在管状外壳的与隔膜的受压面相反的一侧，其中隔膜的外周边缘部分形成得比其中心部分厚，周边部分被热熔融以被焊接并且牢固地附接到围绕管状壳体的一端上的开口的端表面部分。

64. 发明公开

EP1817560A1 DRUCKSENSOR 失效转让
公开(公告)号：EP1817560A1
公开(公告)日：2007-08-15
申请号：EP05813620.1
申请日：2005-11-25
申请人： Endress u. Hauser GmbH u.Co. KG
发明人： DREWES, Ulfert , HEGNER, Frank
IPC分类号： G01L9/00 , G01L9/12 , G01L19/14
CPC分类号： G01L19/14 , G01L9/0075
摘要： Disclosed is a pressure sensor (1) comprising a pressure measuring cell (2) with a first dimensionally stable, substantially planar sealing surface (24), and an opposite member (4) with a hole that is surrounded by a second dimensionally stable, essentially planar sealing surface (45). The pressure measuring cell (2) and the opposite member (4) are pressed against each other by means of a clamping force which acts in an axial direction that runs substantially perpendicular to the planes of the sealing surfaces. A flat seal (51) is clamped in a bare manner between the first sealing surface and the second sealing surface by means of the axial clamping force such that the entire axial clamping force is transmitted via the flat seal (51). The opposite member (4) can be embodied as a disconnecting ring between a metallic housing (3) and a ceramic pressure measuring cell (2), a flat seal (52) also being clamped between the disconnecting ring and the housing. Preferably, the pressure measuring cell is elastically biased.
摘要翻译：公开了一种压力传感器（1），该压力传感器包括具有第一尺寸稳定的基本上平面的密封表面（24）的压力测量单元（2）和具有孔的对置构件（4），所述孔由第二尺寸稳定的平面密封表面（45）。压力测量元件（2）和相对构件（4）通过夹紧力相互挤压，该夹紧力作用在基本上垂直于密封表面的平面的轴向方向上。平面密封件（51）通过轴向夹紧力在第一密封面和第二密封面之间裸露地夹紧，使得整个轴向夹紧力通过平坦密封件（51）传递。相对构件（4）可以构造为金属壳体（3）和陶瓷压力测量单元（2）之间的隔离环，同时夹紧在隔离环和壳体之间的平面密封件（52）。优选地，压力测量单元被弹性偏置。

65. 发明公开

EP1788372A2 Capacitive pressure sensor 有权
标题翻译：电容式压力传感器
公开(公告)号：EP1788372A2
公开(公告)日：2007-05-23
申请号：EP06023560.3
申请日：2006-11-13
申请人： ALPS ELECTRIC CO., LTD.
发明人： Fukuda, Tetsuya , Kikuiri, Katsuya , Sato, Kiyoshi , Nakamura, Yoshinobu , Kobayashi, Hiroyuki
IPC分类号： G01L9/12
CPC分类号： G01L9/0073
摘要： A first silicon substrate is bonded to one principal surface of a glass substrate. In a cavity in the other principal surface of the glass substrate, a protruding portion is formed. In the first silicon substrate, a protruding portion is disposed inside the cavity, and a protruding portion is disposed outside the cavity. A fixed electrode is formed on the protruding portion of the glass substrate. On the protruding portion, an electrode pad is formed with a contact layer and a seed layer therebetween. A second silicon substrate that has a diaphragm corresponding to a movable electrode of a capacitive pressure sensor is bonded to a bonding surface of the other principal surface of the glass substrate (region other than a recessed portion).
摘要翻译：第一硅衬底结合到玻璃衬底的一个主表面上。在玻璃基板的另一个主面中的空腔中形成突出部。在第一硅衬底中，突出部分设置在空腔内部，突出部分设置在空腔外部。固定电极形成在玻璃基板的突出部分上。在突出部分上，电极焊盘在其间形成有接触层和种子层。具有与电容式压力传感器的可动电极对应的振动板的第二硅基板与玻璃基板的另一个主面（凹部以外的区域）的接合面接合。

66. 发明公开

EP1653209A4 QUARTZ TYPE PRESSURE SENSOR, AND PRODUCTION METHOD THEREFOR 审中-公开
标题翻译：压力传感器石英类及其制造方法
公开(公告)号：EP1653209A4
公开(公告)日：2007-03-07
申请号：EP04746882
申请日：2004-07-02
申请人： TOYO COMMUNICATION EQUIP
发明人： WATANABE JUN
IPC分类号： G01L9/12 , G01L9/00
CPC分类号： G01L9/0075
摘要： A quartz type pressure sensor which can eliminate, by using quartz as the detection piece of a pressure sensor, such defects of a pressure sensor using a silicon detection piece, as the difficulty of controlling the thickness of a diaphragm due to a low etching accuracy and a resultant lower detection accuracy, and a poor repeatability in elastic deformation. The pressure sensor comprises a bottom plate consisting of an insulation material, a lower electrode film and a dielectric film sequentially layered on the surface of the bottom plate, a detection piece provided with a thin-wall portion in a position facing the dielectric film and fixed to the surface of the bottom plate, an upper electrode film formed on at least part of the thin-wall portion and in a positional relation of facing the lower electrode film, and a fine-gap airtight space between the lower surface of the detection piece and the dielectric film, characterized in that the detection piece consists of a quartz material.

67. 发明公开

EP1653209A1 QUARTZ TYPE PRESSURE SENSOR, AND PRODUCTION METHOD THEREFOR 审中-公开
标题翻译： DRUCKSENSOR DES QUARZ-TYPS UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP1653209A1
公开(公告)日：2006-05-03
申请号：EP04746882.2
申请日：2004-07-02
申请人： Toyo Communication Equipment Co., Ltd.
发明人： WATANABE, Jun, c/o Toyo Communicat. Equip. Co. Ltd
IPC分类号： G01L9/12
CPC分类号： G01L9/0075
摘要： In a touch-mode capacitance type pressure sensor, a quartz pressure sensor that can solve difficulty in thickness control on a diaphragm due to a low etching precision which is a drawback in a pressure sensor using a detecting piece made from silicon, and deterioration in a detecting accuracy and poor repetitive reproducibility in elastic deformation due to the difficulty, respectively, is provided by utilizing quartz as a detecting piece for the pressure sensor. The quartz pressure sensor including a bottom plate made from an insulating material, a lower electrode film and a dielectric film sequentially laminated on a face of the bottom plate, a detecting piece provided at a position thereof opposed to said dielectric film with a thin portion and fixed on the face of the bottom plate, and an upper electrode film formed in at least one portion of the thin portion having a positional relationship thereof opposed to the lower electrode film, in which a fine gap airtight space is provided between a lower face of the detecting piece and the dielectric film is characterized in that the detecting piece is made from a quartz material.
摘要翻译：在触摸式电容式压力传感器中，由于采用硅制的检测片的压力传感器的缺点，由于蚀刻精度低而能够解决膜片厚度控制困难的石英压力传感器，通过利用石英作为压力传感器的检测件，分别提供了由于难度而导致的弹性变形中的检测精度和差的重复再现性。所述石英压力传感器包括由绝缘材料制成的底板，下电极膜和依次层压在所述底板的表面上的电介质膜，所述检测片设置在与所述电介质膜相对的位置上，所述检测片具有薄的部分，固定在底板的表面上;以及上部电极膜，形成在薄膜部分的至少一部分中，具有与下部电极膜相对的位置关系，其中，在下部电极膜的下表面之间设置有微小的间隙密封空间检测片和电介质膜的特征在于，检测片由石英材料制成。

68. 发明公开

EP1369676A3 Capacitive pressure sensor and method for manufacturing the pressure sensor 审中-公开
标题翻译：电容式压力传感器及其制造方法
公开(公告)号：EP1369676A3
公开(公告)日：2006-01-18
申请号：EP03010138.0
申请日：2003-05-05
申请人： OMRON CORPORATION
发明人： Morishita,Sadaharu, c/o Omron Corporation , Toya,Takashi, c/o Omron Corporation , Yoshida,Shinsuke, c/o Omron Corporation , Nozoe,Satoshi, c/o Omron Corporation , Kuzuyama,Daisuke, c/o Omron Corporation
IPC分类号： G01L9/12 , G01L9/00
CPC分类号： G01L9/0075
摘要： The present invention provides a small-sized electrostatic condenser type pressure sensor having high assembly accuracy but no dispersion in a detection accuracy, and a method for manufacturing the pressure sensor. An annular spacer is mounted on the confronting faces of substrates around flat electrodes, and a frit is mounted around the spacer and is made of a material having a lower softening or melting point than that of the spacer.

69. 发明公开

EP1490662A1 LEAD IRON TUNGSTATE CAPACITIVE TRANSDUCER, RELAXOR MATERIAL THEREFOR, METHOD OF MANUFACTURE OF RELAXOR MATERIAL 审中-公开
标题翻译：铅铁钨容量换能器，其用于松弛材料，制造松弛材料的方法
公开(公告)号：EP1490662A1
公开(公告)日：2004-12-29
申请号：EP02717027.3
申请日：2002-03-28
申请人： Council of Scientific andIndustrial Research , Indian Institute of Technology
发明人： JAIN, Kamlesh Kumar,National Physical Laboratory , KUMAR, Vijay,National Physical Laboratory , KASHYAP, Subhash Chand,Indian Institute of Tech.
IPC分类号： G01L9/12 , C04B35/497
CPC分类号： G01L9/0075 , C04B35/495 , C04B35/497 , C04B2235/3258 , C04B2235/326 , C04B2235/3272 , C04B2235/3296 , C04B2235/72
摘要： The present invention discloses a relaxor material lead iron tungstate which has been synthesized in doped and undoped conditions by single and two step heat treatment. The relaxor material is seen to exhibit almost negligible hysteresis and a transducer made thereby shows pressure measurement capability over a wide range from 0.5MPa to 415MPa with accuracy of ± 0.05%.
摘要翻译：本发明公开了一种松弛材料钨酸铅，它是在掺杂和未掺杂条件下通过单步和两步热处理合成的。可以看出松弛材料的迟滞几乎可以忽略不计，由此制成的换能器在0.5MPa至415MPa的宽范围内显示压力测量能力，精确度为±0.05％。

70. 发明授权

EP1091202B1 Capacitive pressure sensor 有权
标题翻译：一种电容压力传感器
公开(公告)号：EP1091202B1
公开(公告)日：2004-08-04
申请号：EP00250331.6
申请日：2000-10-05
申请人： Yamatake Corporation
发明人： Ishikura, Yoshiyuki , Kimura, Shigeo , Masuda, Takashi , Soeda, Masaru , Kataoka, Toshiyuki
IPC分类号： G01L9/12 , G01L9/00
CPC分类号： G01L9/0075

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