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51. 发明授权

EP1410397B1 NANOTUBE FILMS AND ARTICLES 有权
公开(公告)号：EP1410397B1
公开(公告)日：2018-07-04
申请号：EP02789152.2
申请日：2002-07-25
申请人： Nantero, Inc.
发明人： RUECKES, Thomas , SEGAL, Brent, M.
IPC分类号： G11C11/00 , H01L51/00 , H01L27/12 , H01H1/00 , G11C23/00 , H01L29/41 , G11C13/02 , H01L21/768 , H01L27/10
CPC分类号： G11C23/00 , B82Y10/00 , G11C13/025 , G11C2213/16 , G11C2213/77 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L27/10 , H01L27/1203 , H01L29/413 , H01L51/0048 , H01L51/444 , H01L2221/1094 , Y10S977/75 , Y10S977/778 , Y10S977/843 , Y10S977/857 , Y10S977/888
摘要： Nanotube films and articles and methods of making the same are disclosed. A conductive article includes an aggregate of nanotube segments in which the nanotube segments contact other nanotube segments to define a plurality of conductive pathways along the article. The nanotube segments may be single walled carbon nanotubes, or multi-walled carbon nanotubes. The various segments may have different lengths and may include segments having a length shorter than the length of the article. The articles so formed may be disposed on substrates, and may form an electrical network of nanotubes within the article itself. Conductive articles may be made on a substrate by forming a nanotube fabric on the substrate, and defining a pattern within the fabric in which the pattern corresponds to the conductive article. The nanotube fabric may be formed by growing the nanotube fabric on the substrate using a catalyst, for example, in which the catalyst is a gas phase catalyst, or in which the catalyst is a metallic gas phase catalyst. The nanotube fabric may be formed by depositing a solution of suspended nanotubes on the substrate. The deposited solution may be spun to create a spin-coating of the solution. The solution may be deposited by dipping the substrate into the solution. The nanotube fabric is formed by spraying an aerosol having nanotubes onto a surface of the substrate.

52. 发明授权

EP2044485B1 Etching hole arrays 有权
标题翻译： ÄTENVON LOCH-ARRAYS
公开(公告)号：EP2044485B1
公开(公告)日：2013-06-05
申请号：EP07872537.1
申请日：2007-06-28
申请人： Northwestern University
发明人： MIRKIN, Chad , SALAITA, Khalid
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , Y10S977/849 , Y10S977/855 , Y10S977/856 , Y10S977/857 , Y10S977/888 , Y10T428/24479 , Y10T428/24802

53. 发明授权

EP1801068B1 Method of fabricating nanodevices 有权
标题翻译：一种用于制造纳米器件过程
公开(公告)号：EP1801068B1
公开(公告)日：2012-09-26
申请号：EP06126836.3
申请日：2006-12-21
申请人： FEI COMPANY
发明人： Schwind, Gregory , Magera, Gerald , Scipioni, Lawrence
IPC分类号： B82B3/00
CPC分类号： H01J37/06 , B82Y15/00 , B82Y30/00 , H01J1/304 , H01J9/025 , H01J37/073 , H01J2201/30469 , H01J2209/0223 , H01J2237/06341 , Y10S438/962 , Y10S977/742 , Y10S977/745 , Y10S977/748 , Y10S977/75 , Y10S977/752 , Y10S977/773 , Y10S977/856 , Y10S977/857

54. 发明公开

EP1855861A4 SURFACE AND SITE-SPECIFIC POLYMERIZATION BY DIRECT-WRITE LITHOGRAPHY 审中-公开
标题翻译：表面特定地点专用的聚合BY直写光刻版
公开(公告)号：EP1855861A4
公开(公告)日：2010-12-01
申请号：EP04816778
申请日：2004-07-19
申请人： UNIV NORTHWESTERN
发明人： MIRKIN CHAD A , GUO SHOUWU , LIU XIAOGANG
IPC分类号： B29C35/08 , B41J2/15 , C08F2/00 , G03F7/00 , G03F7/20 , H01J20060101
CPC分类号： G03F7/0002 , G01Q80/00 , G03F7/2049 , H01J2237/31738 , Y10S977/857 , Y10S977/882 , Y10S977/897

55. 发明授权

EP1850972B1 THERMAL CONTROL OF DEPOSITION IN DIP PEN NANOLITHOGRAPHY 有权
标题翻译：矿床DPN热控（DIP笔纳米光刻）
公开(公告)号：EP1850972B1
公开(公告)日：2010-10-20
申请号：EP05771292.9
申请日：2005-05-10
申请人： The Government of the United States of America as represented by the Secretary of the Navy
发明人： SHEEHAN, Paul E , Whitman, Lloyd J. , KING, William P
IPC分类号： G03F7/00 , B05D5/00 , B05C11/00
CPC分类号： G03F7/0002 , G01Q80/00 , Y10S977/849 , Y10S977/851 , Y10S977/855 , Y10S977/857
摘要： The present invention describes an apparatus for nanolithography and a process for thermally controlling the deposition of a solid organic 'ink' from the tip of an atomic force microscope to a substrate. The invention may be used to turn deposition of the ink to the substrate on or off by either raising its temperature above or lowing its temperature below the ink's melting temperature. This process may be useful as it allows ink deposition to be turned on and off and the deposition rate to change without the tip breaking contact with the substrate. The same tip can then be used for imaging purposes without fear of contamination. This invention can allow ink to be deposited in a vacuum enclosure, and can also allow for greater spatial resolution as the inks used have lower surface mobilities once cooled than those used in other nanolithography methods.

56. 发明公开

EP2044485A2 ETCHING AND HOLE ARRAYS 有权
标题翻译：蚀刻孔阵列
公开(公告)号：EP2044485A2
公开(公告)日：2009-04-08
申请号：EP07872537.1
申请日：2007-06-28
申请人： Northwestern University
发明人： MIRKIN, Chad , SALAITA, Khalid
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , Y10S977/849 , Y10S977/855 , Y10S977/856 , Y10S977/857 , Y10S977/888 , Y10T428/24479 , Y10T428/24802
摘要： Lithographic and nanolithographic methods that involve patterning a first compound on a substrate surface, exposing non-patterned areas of the substrate surface to a second compound and removing the first compound while leaving the second compound intact. The resulting hole patterns can be used as templates for either chemical etching of the patterned area of the substrate or metal deposition on the patterned area of the substrate.

57. 发明公开

EP1850972A4 THERMAL CONTROL OF DEPOSITION IN DIP PEN NANOLITHOGRAPHY 有权
标题翻译：矿床DPN热控（DIP笔纳米光刻）
公开(公告)号：EP1850972A4
公开(公告)日：2008-02-27
申请号：EP05771292
申请日：2005-05-10
申请人： US GOV SEC NAVY
发明人： SHEEHAN PAUL E , WHITMAN LLOYD J , KING WILLIAM P
IPC分类号： G03F7/00 , B05C11/00 , B05D5/00 , G01Q10/00 , G01Q60/24 , G01Q80/00
CPC分类号： G03F7/0002 , G01Q80/00 , Y10S977/849 , Y10S977/851 , Y10S977/855 , Y10S977/857
摘要： The present invention describes an apparatus for nanolithography and a process for thermally controlling the deposition of a solid organic 'ink' from the tip of an atomic force microscope to a substrate. The invention may be used to turn deposition of the ink to the substrate on or off by either raising its temperature above or lowing its temperature below the ink's melting temperature. This process may be useful as it allows ink deposition to be turned on and off and the deposition rate to change without the tip breaking contact with the substrate. The same tip can then be used for imaging purposes without fear of contamination. This invention can allow ink to be deposited in a vacuum enclosure, and can also allow for greater spatial resolution as the inks used have lower surface mobilities once cooled than those used in other nanolithography methods.

58. 发明公开

EP1881368A2 Verfahren zum Aufbringen von Membranlipiden auf ein Substrat 有权转让
公开(公告)号：EP1881368A2
公开(公告)日：2008-01-23
申请号：EP07012255.1
申请日：2007-06-22
申请人： Forschungszentrum Karlsruhe GmbH
发明人： Lenhert, Steven , Fuchs, Harald
IPC分类号： G03F7/00 , B82B3/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10S977/713 , Y10S977/783 , Y10S977/849 , Y10S977/855 , Y10S977/857 , Y10S977/883
摘要： Die Erfindung betrifft ein Verfahren zum Aufbringen von Membranlipiden auf ein Substrat. Hierzu werden zunächst ein Substrat und ein Tintenvorrat mit einer Tinte aus den Membranlipiden bereitgestellt. Dann wird die Spitze eines Rasterkraftmikroskops in die Tinte aus den Membranlipiden eingetaucht, wodurch die Membranlipide auf die Spitze des Rasterkraftmikroskops aufgebracht werden. Anschließend wird die Spitze des Rasterkraftmikroskops mit der Oberfläche des Substrats in Kontakt gebracht und derart über Bereiche der Oberfläche bewegt, dass die Membranlipide in diesen Bereichen von der Spitze des Rasterkraftmikroskops auf die Oberfläche des Substrats wandern und sich dort in Form einer einzelnen Lipidschicht oder in Form einer oder mehrerer, übereinander aufgebrachter Lipid-Doppelschichten anordnen. Schließlich wird die Spitze von der Oberfläche des Substrats entfernt.
Das erfindungsgemäße Verfahren eignet sich für die nicht-kovalente Strukturierung von Oberflächen insbesondere aus Silizium, Glas, Metall oder Polymer mit Membranlipiden als Tinte bei einer lateralen Auflösung unterhalb von 100 nm.
摘要翻译：该方法包括从膜脂质提供基底（1）和墨水供应源。将光栅力显微镜的尖端（2）从薄膜脂质中浸入墨水中，其中将膜脂质施加在光栅力显微镜的尖端上。光栅力显微镜的尖端与衬底表面接触，其中尖端移动通过表面。将膜脂质从光栅力显微镜的尖端移动到基底表面上并且以单个脂质层的形式或以一个或多个相互排列的脂质双层的形式排列。尖端从衬底的表面移除。衬底由硅，玻璃，金属或聚合物制成。

59. 发明公开

EP1410397A4 NANOTUBE FILMS AND ARTICLES 有权
标题翻译：纳米管膜和制品
公开(公告)号：EP1410397A4
公开(公告)日：2007-08-29
申请号：EP02789152
申请日：2002-07-25
申请人： NANTERO INC
发明人： RUECKES THOMAS , SEGAL BRENT M
IPC分类号： B82B1/00 , B81B3/00 , G11C13/02 , G11C23/00 , H01L21/3205 , H01L21/768 , H01L23/52 , H01L27/10 , H01L27/12 , H01L27/24 , G11C11/00
CPC分类号： G11C23/00 , B82Y10/00 , G11C13/025 , G11C2213/16 , G11C2213/77 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L27/10 , H01L27/1203 , H01L29/413 , H01L51/0048 , H01L51/444 , H01L2221/1094 , Y10S977/75 , Y10S977/778 , Y10S977/843 , Y10S977/857 , Y10S977/888
摘要： Nanotube films and articles and methods of making the same are disclosed. A conductive article includes an aggregate of nanotube segments in which the nanotube segments contact other nanotube segments to define a plurality of conductive pathways along the article. The nanotube segments may be single walled carbon nanotubes, or multi-walled carbon nanotubes. The various segments may have different lengths and may include segments having a length shorter than the length of the article. The articles so formed may be disposed on substrates, and may form an electrical network of nanotubes within the article itself. Conductive articles may be made on a substrate by forming a nanotube fabric on the substrate, and defining a pattern within the fabric in which the pattern corresponds to the conductive article. The nanotube fabric may be formed by growing the nanotube fabric on the substrate using a catalyst, for example, in which the catalyst is a gas phase catalyst, or in which the catalyst is a metallic gas phase catalyst. The nanotube fabric may be formed by depositing a solution of suspended nanotubes on the substrate. The deposited solution may be spun to create a spin-coating of the solution. The solution may be deposited by dipping the substrate into the solution. The nanotube fabric is formed by spraying an aerosol having nanotubes onto a surface of the substrate.

60. 发明公开

EP1508161A2 METHODS OF POSITIONS AND/OR ORIENTING NANOSTRUCTURES 审中-公开
标题翻译：程序的职位和/或定向性纳米结构的
公开(公告)号：EP1508161A2
公开(公告)日：2005-02-23
申请号：EP03746100.1
申请日：2003-04-01
申请人： Nanosys, Inc.
发明人： DUAN, Xiangfeng , DANIELS, Hugh , NIU, Chunming , SAHI, Vijendra , HAMILTON, Jim , ROMANO, Linda, T.
IPC分类号： H01L21/00
CPC分类号： H01L51/0048 , B01J23/52 , B81B2203/0361 , B81B2207/015 , B81C3/005 , B81C99/008 , B81C2203/057 , B82B3/00 , B82Y10/00 , B82Y30/00 , B82Y40/00 , G11B5/743 , G11C2213/81 , H01L29/7869 , H01L51/0001 , H01L51/0595 , H01L2924/0002 , Y10S438/962 , Y10S977/762 , Y10S977/856 , Y10S977/857 , Y10S977/858 , Y10S977/89 , H01L2924/00
摘要： Methods of positioning and orienting nanostructures, and particularly nanowires, on surfaces for subsequent use or integration. The methods utilize mask based processes alone or in combination with flow based alignment of the nanostructures to provide oriented and positioned nanostructures on surfaces. Also provided are populations of positioned and/or oriented nanostructures, devices that include populations of positioned and/or oriented nanostructures, systems for positioning and/or orienting nanostructures, and related devices, systems and methods.

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