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    • 46. 发明公开
    • Laser working method and manufacturing method of liquid jet recording head using such a laser working method
    • 使用这种激光加工方法制造喷液记录头的激光加工方法和加工
    • EP1149658A2
    • 2001-10-31
    • EP01111840.3
    • 1998-03-13
    • CANON KABUSHIKI KAISHA
    • Ishimatsu, ShinInaba, MasakiSaito, AkioGoto, AkiraFurukawa, MasaoHasegawa, ToshinoriIto, Miki
    • B23K26/06B41J2/16
    • B41J2/1642B23K26/04B23K26/066B23K26/364B41J2/1604B41J2/1623B41J2/1631B41J2/1634B41J2/1637Y10S430/146
    • The invention relates to a laser working method by using a laser light source (31) and a shaping optical system (35a) for shaping a laser beam (32) emitted from the laser light source (31). Further an illumination optical system (35a) is used for illuminating a laser mask (37) having a fine (10) and a less fine (14) pattern corresponding to a working shape of a work (38) to be treated in the laser working method; and a projection optical system (35b) allows formation of an image of the laser mask (37) at a predetermined magnification. According to the invention, an observation measuring system (36) is used, which is arranged behind the work (38) with respect to the laser light source (31) for observing and measuring the position of the work (38) set on a workstation (38), and a moving means (34c) is used for operating the workstation (38a) in accordance with the measured position. Then, the laser source (31) for works the shape of the work (38) sequentially from the shape of the fine mask pattern (10) to the less fine mask pattern (14). This method is particularly suitable for use in the production of ink jet recording heads.
    • 本发明通过使用激光光源(31)和用于成形从激光光源(31)发射的激光束(32)一个整形光学系统(35A)涉及一种激光加工方法。 进一步对于照明光学系统(35A)用于照射具有微细(10)和以下的细的激光掩模(37)(14)的图案相对应的工件(38)的工作的形状,以在激光加工来治疗 法; 和投影光学系统(35B)允许以规定的倍率形成激光掩模(37)的图像的。 。根据本发明,观察测量用于观察和测量的工作位置的系统(36)时,所有这一切都在工作(38)相对于所述激光光源(31)的后面布置(38)设置在工作站上 (38),和一个移动装置(34C)被用于与所测量的位置操作在雅舞蹈工作站(38A)。 然后,激光源(31),用于工作的工作(38)的形状顺序地从精细掩模图案(10)到所述以下的细掩模图案(14)的形状。 该方法特别适用于生产喷墨记录头的使用。