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31. 发明公开

EP2406587A4 FLOW SENSING DEVICE AND PACKAGING THEREOF 有权
标题翻译：流量计和住房THEREFOR
公开(公告)号：EP2406587A4
公开(公告)日：2014-05-21
申请号：EP10750289
申请日：2010-03-10
申请人： SENSORTECHNICS GMBH
发明人： GRUDIN OLEG , FROLOV GENNADIY , LANDSBERGER LESLIE , SALMAN SAED
IPC分类号： G01F1/688 , G01F1/684 , G01F1/692 , G01F15/14 , G01L13/00
CPC分类号： G01F1/6888 , G01F1/6842 , G01F1/6845 , G01F1/692
摘要： There is described a flow sensing device having a semiconductor chip with a flow channel integrated therein and a sensing element positioned in the flow channel, and a package base attached to the semiconductor chip and allowing access to the two passage-openings of the flow channel from opposite sides of the package base.

32. 发明公开

EP2677283A1 HEAT CONDUCTION-TYPE SENSOR HAVING INFLUENCE OF TEMPERATURE AND KIND OF FLUID CORRECTED THEREIN, AND HEAT-TYPE FLOW SENSOR AND HEAT-TYPE BAROMETRIC SENSOR USING THE HEAT CONDUCTION-TYPE SENSOR 审中-公开
标题翻译：温度的热传导散热传感器校准效果或与该传感器流体式和热流传感器和热传感器指标
公开(公告)号：EP2677283A1
公开(公告)日：2013-12-25
申请号：EP12701978.4
申请日：2012-01-13
申请人： Tohoku, Gakuin
发明人： KIMURA, Mitsuteru
IPC分类号： G01F1/692 , G01F15/04 , G01L21/14
CPC分类号： G01F1/6965 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01L11/002 , G01L19/0092 , G01L27/002
摘要： There are provided a heat conduction-type sensor that can correct (calibrate) effects of a temperature of a measurement target fluid and a type of the fluid on a measurement value in measurement of a flow velocity, a mass flow, or an atmospheric pressure, and also provided a thermal flow sensor and a thermal barometric sensor that have this correcting function, high sensitivity, and a simple configuration and that are inexpensive.
At least two thin films that are thermally separated from a substrate through the same cavity are provided, one thin film 10 comprises a heater and a temperature sensor, and the other thin film 12 comprises at least one temperature sensor, the temperature sensors being thin-film thermocouples. The thin film 12 is arranged in proximity so that it is heated only through the measurement target fluid by heating of the heater. Calibration circuit means calculates and compares quantities concerning heat transfer coefficients of a standard fluid and the unknown measurement target fluid based on respective pieces of information of a temperature difference between the thin film 12 and a heater temperature measured in both the standard fluid and the unknown measurement target fluid at a predetermined temperature in a state having no flow, absolute temperature information, and others, and correction (calibration) is performed to enable indicating a physical state such as a true mass flow or an atmospheric pressure.
摘要翻译：本发明提供一种热传导式传感器确实能够校正被测量流体的温度，并且在流速的测定的类型上的测量值的流体的的（校准）的影响，质量流量，或在大气压力下，从而提供了一种热式流量传感器和热传感器气压thathave此校正功能，灵敏度高，并以简单的结构并做是廉价的。至少两个薄膜没有热是从基板通过设置在同一腔体分开，一个薄膜10包括一个加热器和一个温度传感器，而另一薄膜12个包括至少一个温度传感器，所述温度传感器是薄壁电影热电偶。薄膜12被布置在接近所以没它只能通过由加热器加热的测量目标流体被加热。校准电路装置计算并比较数量关于基于所述薄膜12和在这两个标准液测得的加热器的温度和未知的测量之间的温度差的信息respectivement片标准流体和未知的测量目标流体的传热系数在不具有流动，绝对温度的信息，和其他人，并校正（校准）的状态的规定的温度的目标流体被执行以使指示物理状态：如真质量流量或在大气压力下。

33. 发明公开

EP2600116A1 FLOW MEASUREMENT STRUCTURE AND FLOW MEASUREMENT DEVICE 审中-公开
标题翻译：流量测量结构和流量测量装置
公开(公告)号：EP2600116A1
公开(公告)日：2013-06-05
申请号：EP11812226.6
申请日：2011-07-04
申请人： Omron Corporation
发明人： UEDA, Naotsugu , YAMAMOTO, Katsuyuki , NOZOE, Satoshi , MAEDA, Shuji , TSUKUMA, Yuji
IPC分类号： G01F1/00 , G01F1/684 , G01F1/692
CPC分类号： G01F5/00 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01F15/00
摘要： A flow measurement device (1) according to the present invention includes a main flow channel (5) through which fluid flows, and a secondary flow channel unit (20) where the fluid is diverted from the main flow channel (5), supplied to a flow amount detection element (12) and thereafter returned to the main flow channel (5). The secondary flow channel unit (20) includes a diversion flow channel (23) through which the fluid is diverted from the main flow channel (5) and returned to the main channel (5) without the fluid being supplied to the flow amount detection element (12), and a detection channel (27) in which the fluid is diverted from the diversion flow channel (23) and provided to the flow amount detection element (12). The diversion flow channel (23) includes a smooth flow part (45) in which the fluid flows smoothly between the two ends connecting to the main flow channel (5), and a first chamber (41) and a second chamber (42) which, adjacent to the smooth flow part (45), are divided by a partition (43) provided so as to obstruct flow of the fluid. The two ends of the detection channel (27) are connected to the first chamber (41) and the second chamber (42).
摘要翻译：根据本发明的流量测量装置（1）包括流体流过的主流通道（5）和流体从主流通道（5）转向的次流通道单元（20）流量检测元件（12）后返回到主流路（5）。二次流路部（20）具有：分流流路（23），流体从主流路（5）分支而返回到主流路（5），流体不被供给到流量检测元件（12）;以及检测流路（27），流体从分流流路（23）流出并被提供给流量检测元件（12）。分流流路23包括流体在与主流路5连接的两端之间平滑地流动的平滑流动部45以及第一腔室41和第二腔室42，与平滑流动部分（45）相邻的部分被设置用于阻挡流体流动的隔板（43）分开。检测通道（27）的两端连接到第一室（41）和第二室（42）。

34. 发明公开

EP2597433A1 THERMAL TYPE AIR FLOW AMOUNT SENSOR 审中-公开
标题翻译： WÄRMELUFTSTROMMENGENSENSOR
公开(公告)号：EP2597433A1
公开(公告)日：2013-05-29
申请号：EP11809561.1
申请日：2011-07-06
申请人： Hitachi Automotive Systems, Ltd.
发明人： ISHITSUKA Norio , MINAMITANI Rintaro , HANZAWA Keiji
IPC分类号： G01F1/692
CPC分类号： H01L37/00 , B81C1/00793 , G01F1/6845 , G01F1/692
摘要： An object of the present invention is to provide a thermal airflow sensor that prevents moisture absorption by a silicon oxide film formed closest to a surface (formed to be located on an uppermost portion), and that reduces a measuring error. In order to attain the foregoing object, the thermal airflow sensor according to the present invention applies an ion implantation to a silicon oxide film 4, formed closest to a surface (formed to be located on an uppermost portion), by using an atom or molecule selected from at least any one of silicon, oxygen, and an inert element such as argon or nitrogen, in order to increase a concentration of an atom contained in the silicon oxide film 4 more than that before the ion implantation.
摘要翻译：本发明的目的是提供一种热气流传感器，其防止由最靠近表面（形成在最上部的部分）形成的氧化硅膜吸湿，并且减少了测量误差。为了实现上述目的，根据本发明的热气流传感器通过使用原子或分子将离子注入施加到最靠近表面（形成在最上部的部分）形成的氧化硅膜4 选自硅，氧和惰性元素如氩或氮中的至少任一种，以便增加氧化硅膜4中包含的原子的浓度比离子注入之前的浓度更高。

35. 发明公开

EP2554953A1 THERMAL FLOW SENSOR 审中-公开
标题翻译： WÄRMEFLUSSSENSOR
公开(公告)号：EP2554953A1
公开(公告)日：2013-02-06
申请号：EP11765823.7
申请日：2011-04-01
申请人： Hitachi Automotive Systems, Ltd.
发明人： SATO Ryo , HANZAWA Keiji
IPC分类号： G01F1/692 , G01F1/696
CPC分类号： G01F1/692 , G01F1/696 , G01F25/0007
摘要： To reduce a signal variation of a bridge circuit connected with a temperature sensing resistor that is caused by a strain even when the strain is generated at a diaphragm portion of a substrate installed with a heater resistor and the temperature sensing resistor. In a thermal type flow rate resistor including a substrate, a diaphragm 13 formed at the substrate, and a heat generating resistor 2 and temperature detecting resistors 7 through 10 formed on the diaphragm for detecting a flow rate of a measured fluid by heating the heat generating resistor, strain detecting resistors 11 and 12 are formed on an upstream side and on a downstream side of a flow of the measured fluid relative to the heat generating resistor on the diaphragm, an amount of a strain generated on the diaphragm is detected by the strain detecting resistors, and a flow rate signal detected by the heat generating resistor and the temperature detecting resistors is compensated for the strain based on the detected amount of the strain.
摘要翻译：即使当在安装有加热电阻器的基板的隔膜部分和温度感测电阻器上产生应变时，也可以减小由应变引起的与感温电阻器相连的桥接电路的信号变化。在包括基板的热式流量电阻器，形成在基板上的隔膜13和形成在隔膜上的发热电阻器2和温度检测电阻器7至10，用于通过加热发热量来检测被测流体的流量电阻器，应变检测电阻器11和12形成在测量流体相对于隔膜上的发热电阻器的流动的上游侧和下游侧，通过应变检测在隔膜上产生的应变量检测电阻器和由发热电阻器和温度检测电阻器检测的流量信号基于检测到的应变量来补偿应变。

36. 发明公开

EP2492649A1 Strömungssensor mit Stromdurchführung durch den Gehäusedeckel sowie Sensorspitze als Zwischenprodukt 审中-公开
标题翻译：流量传感器通过所述壳体盖的电流通路以及传感器尖端作为中间
公开(公告)号：EP2492649A1
公开(公告)日：2012-08-29
申请号：EP12000312.4
申请日：2012-01-19
申请人： Heraeus Sensor Technology GmbH
发明人： Muziol, Matthias , Wienand, Karlheinz, Dr.
IPC分类号： G01F1/684 , G01F1/692
CPC分类号： G01F1/684 , G01F1/692 , Y10T29/49124
摘要： Zur einfachen reproduzierbaren Massenproduktion von Anemometern fürAGR, für bis zu 200°C oder 300°C heiße Abgasströme werden Leiter und Schichtwiderstände auf ein Bett, z.B. ein keramisches Profil, gelegt und auf diesem Bett zugedeckt, z.B. durch auftragen und einbrennen von Glaspaste.
Bei dieser Massenproduktion von Strömungssensoren, insbesondere Heißfilmanemometern, deren Sensorspitze bis an den Gehäusedeckel aus anorganischen Materialien besteht, beispielsweise Oxiden wie Aluminiumoxid, Magnesiumoxid oder Spinell, führt man erfindungsgemäß ein Kabel in ein Gehäuse und selbsttragende elektrische Leiter durch den Gehäusedeckel. In dem Gehäuse verbindet man Adern des Kabels mit den selbsttragenden elektrischen Leitern, und schließt danach das Gehäuse mit dem Gehäusedeckel. Mit durch den Deckel führenden Bettprofilen werden die Schichtwiderstände vom Gehäuse so weit beabstandet, dass Schichtwiderstände und Gehäuse thermisch weitgehend entkoppelt sind, um die Messgenauigkeit nicht zu beeinträchtigen. Vorzugsweise sind die Schichtwiderstände mit Anschlussdrähten ausgestattet.
Als Zwischenprodukt wird eine Messspitze oder ein Sensorstab als Teil einer Sensorspitze aus rein anorganischen Komponenten geschaffen, um die Massenproduktion zu rationalisieren.
摘要翻译：该方法包括用在由无机材料制成的壳体盖（5）自支撑的电导体（42）相关联的固定的加热元件。的电缆（7）被引导至外壳（6）和所述自支撑电导体由壳体盖领导。的电缆的电线（71）被连接到在壳体中的自支撑的电导体，并且所述壳体与所述壳体盖闭合。一个独立的claimsoft包括用于流量传感器。

37. 发明公开

EP2434263A2 Thermal air flow sensor 有权转让
标题翻译：热空气流量传感器
公开(公告)号：EP2434263A2
公开(公告)日：2012-03-28
申请号：EP11178121.7
申请日：2011-08-19
申请人： Hitachi Automotive Systems, Ltd.
发明人： Doi, Ryosuke , Hanzawa, Keiji
IPC分类号： G01F1/684 , G01F1/692 , G01F5/00
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F5/00 , G01F15/10 , G01F15/105
摘要： In a thermal air flow sensor according to the invention, a hollow (200) formed in a detecting element (50) is communicated with a circuit chamber (400), in which driving circuit parts (401) of the detecting element (50) are mounted, or an intake duct exterior (700).
Thereby, pressure in the hollow (200) balances with pressure on the outside. Also, since the circuit chamber (400) is provided to be isolated from a detection chamber, in which a detecting part of the detecting element (50) is arranged, that is, a passage chamber (300), through which air being a measuring object flows, air flowing in the passage chamber (300) can be restrained from flowing into the hollow (200) to have an influence on flow output characteristics.
摘要翻译：在根据本发明的热式空气流量传感器中，形成在检测元件（50）中的空腔（200）与电路腔室（400）连通，其中检测元件（50）的驱动电路部分（401）或者进气管道外部（700）。由此，空腔（200）中的压力与外部的压力平衡。另外，由于电路室（400）设置成与检测元件（50）的检测部分即检测室（即检测室）（300）隔开，通道室（300）在流动室（300）中流动的空气能够被限制流入空腔（200）中，以对流动输出特性产生影响。

38. 发明公开

EP2357452A1 Thermal type flow sensor 失效转让
标题翻译：热式流量传感器
公开(公告)号：EP2357452A1
公开(公告)日：2011-08-17
申请号：EP10185170.7
申请日：2007-01-26
申请人： Hitachi Ltd.
发明人： Nakano, Hiroshi , Yamada, Masamichi , Matsumoto, Masahiro , Watanabe, Izumi
IPC分类号： G01F1/698 , G01F1/69 , G01F1/692 , G01F1/684 , G01F1/696
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： The invention relates to a thermal type flow sensor for measuring a flow rate of a fluid by means of a heat resistive element (6,7) having a temperature dependency. The sensor (46) is comprised of: plural heat resistive elements (6,7) used for a flow rate measurement and an adjustment resistor (47); and a driver circuit (49) for controlling a current applied to these heat resistive elements (6,7) to cause their heating. The driver circuit (49) is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements (6,7) and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation. The driver circuit (49) is made up of buffers (50,51), a multi-step series resistor (52), a switch (53), a differential amplifier circuit (19), a transistor (20), and a switch control circuit (54).
摘要翻译：本发明涉及一种用于借助于具有温度依赖性的发热电阻元件（6,7）来测量流体的流量的热式流量传感器。传感器（46）包括：用于流量测量的多个热阻元件（6,7）和调节电阻器（47）; 以及驱动电路（49），用于控制施加到这些发热电阻元件（6,7）的电流以使它们发热。驱动电路（49）被配置为感测多个发热电阻元件（6,7）中的低温侧发热电阻元件的电阻变化，并且根据以下方式来控制要施加到多个发热电阻元件的电流：低电阻变化的感测值。（49）由缓冲器（50,51），多级串联电阻（52），开关（53），差动放大电路（19），晶体管（20）和开关控制电路（54）。

39. 发明授权

EP1770389B1 THERMAL SENSOR AND MEASUREMENT DEVICE USING THE SAME 有权转让
标题翻译：热传感器和那些用于测量装置
公开(公告)号：EP1770389B1
公开(公告)日：2011-04-06
申请号：EP05755231.7
申请日：2005-06-28
申请人： MITSUI MINING & SMELTING CO., LTD.
发明人： KUBOTA, Akiko, Mitsui Mining & Smelting Co., Ltd. , TOMONARI, Kenji, Mitsui Mining & Smelting Co.,Ltd. , KAWANISHI, T., Mitsui Mining & Smelting Co., Ltd.
IPC分类号： G01N25/18 , G01F1/692
CPC分类号： G01N27/18 , B01D53/56 , B01D2251/2067 , B01D2257/404 , F01N2610/02 , G01F1/6842 , G01F1/692 , G01F1/699 , G01N25/18
摘要： A thermal sensor in which, when an object to be measured is a water-based liquid, attachment of air bubbles to the external surface of the sensor is reduced to improve measurement accuracy. The thermal sensor has a sensing element (21a) including a heat producing body and a temperature sensing body, a resin mold (23) for sealing the sensing element (21a), and a heat transmission member (21c) for transmitting heat between the sensing element (21a) and a water-based object to be measured. A part of the heat transmission member (21c) is exposed from the resin mold (23) to form an exposed surface section. A hydrophilic film (50) formed of a silicon oxide film is applied to the exposed surface section and to that part of the surface of the resin mold which is positioned around the exposed surface section.

40. 发明授权

EP2201336B1 SOLID STATE MICROANEMOMETER DEVICE AND METHOD OF FABRICATION 有权
标题翻译： FESTKÖRPERMIKROANEMOMETER及其制造方法
公开(公告)号：EP2201336B1
公开(公告)日：2011-03-23
申请号：EP08837158.8
申请日：2008-10-08
申请人： Memsys, Inc.
发明人： PLOWMAN, Thomas, E. , JEWETT, Warren, R.
IPC分类号： G01F1/684 , G01F1/688 , G01F1/692
CPC分类号： G01F1/6845 , G01F1/688 , G01F1/692
摘要： The invention is a solid state microanemometer and a method of making thereof. Specifically, the invention relates to a microanemometer including an electrically conductive resistor in the form of a semiconductor wafer doped with an impurity having an upper surface, a lower surface having a peripheral edge; a substrate bonded to the semiconductor wafer having an upper surface, a cavity having a peripheral edge and a peripheral margin defined on the upper surface and bounded by the peripheral edge of the cavity wherein the lower surface of the semiconductor wafer rests on and is supported by at least part of the peripheral edge of the cavity such that the semiconductor wafer is over the cavity; and a means for electrically connecting the resistor to a current source. The microanemometer also includes a plurality of metal conductors in contact with the resistor. The semiconductor wafer has sloped sidewalls and the metal conductors are placed on sloped sidewalls of the wafer to effectively increase available active area of the resistor.

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