专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明授权

EP3161326B1 DIFFUSIONSPUMPE 有权
公开(公告)号：EP3161326B1
公开(公告)日：2022-08-03
申请号：EP15729420.8
申请日：2015-06-10
发明人： SCHWEIZER, Hans-Werner
IPC分类号： F04F9/00 , F04F9/08 , F04F9/04

32. 发明公开

EP3161326A1 DIFFUSIONSPUMPE 有权
公开(公告)号：EP3161326A1
公开(公告)日：2017-05-03
申请号：EP15729420.8
申请日：2015-06-10
申请人： Leybold GmbH
发明人： SCHWEIZER, Hans-Werner
IPC分类号： F04F9/00 , F04F9/08 , F04F9/04
CPC分类号： F04F9/08 , F04F9/00 , F04F9/04 , F25B30/00 , F25B30/02 , F25B30/04 , F25B49/00
摘要： The invention relates to a diffusion pump, in particular an energy-efficient diffusion pump, comprising a housing (10) and a boiling chamber (14) connected to the housing (10). A heating element (16) is arranged in the region of the boiling chamber (14). Furthermore, a nozzle (20, 22), which is connected to the boiling chamber (14), is arranged in the housing (10). A condenser (24) is arranged on an inside of the housing (10) in the region of the nozzle (20, 22), wherein a cooler (25) for cooling the condenser (24) is provided in the region of the condenser (24). The boiling chamber (14) is thermally separated from the condenser (24) by an insulator (52). Alternatively or additionally, the cooler (26) of the condenser (24) is at least partially a water cooler. Alternatively or additionally, the cooler (26) of the condenser (24) is connected to the heating element (16) by means of a heat pump (40) such that heat is conveyed from the condenser (24) to the heating element (16). Alternatively or additionally, a temperature sensor (34) is provided, which senses the condenser temperature, wherein the temperature sensor (34) is connected to a condenser cooler controller for controlling the cooler (26) of the condenser (24). Alternatively or additionally, a heating element controller is connected to the heating element (16) in order to adapt the heating power of the heating element (16) to the existing pumping situation.
摘要翻译：扩散泵技术领域本发明涉及一种扩散泵，特别是一种能量有效的扩散泵，其包括壳体（10）和连接到壳体（10）的沸腾室（14）。加热元件（16）布置在沸腾室（14）的区域中。此外，连接到沸腾室（14）的喷嘴（20,22）布置在壳体（10）中。冷凝器（24）在喷嘴（20,22）的区域内布置在壳体（10）的内部，其中用于冷却冷凝器（24）的冷却器（25）设置在冷凝器 24）。沸腾室（14）通过绝缘体（52）与冷凝器（24）热分离。可选地或附加地，冷凝器（24）的冷却器（26）至少部分地是水冷却器。可选地或附加地，冷凝器（24）的冷却器（26）通过热泵（40）连接到加热元件（16），使得热量从冷凝器（24）传送到加热元件（16 ）。可选地或附加地，设置感测冷凝器温度的温度传感器（34），其中温度传感器（34）连接到用于控制冷凝器（24）的冷却器（26）的冷凝器冷却器控制器。替代地或附加地，加热元件控制器连接到加热元件（16），以便使加热元件（16）的加热功率适应现有的泵送状况。

33. 发明公开

EP2975271A4 OIL DIFFUSION PUMP AND VACUUM FILM FORMATION DEVICE 审中-公开
标题翻译：油扩散泵及真空成膜装置
公开(公告)号：EP2975271A4
公开(公告)日：2016-11-02
申请号：EP13878178
申请日：2013-03-14
申请人： SHINCRON CO LTD
发明人： SAISHO SHINICHIRO
IPC分类号： F04F9/00 , H05B6/10
CPC分类号： H05B6/108 , F04F5/20 , F04F5/40 , F04F9/00
摘要： Provided is an oil diffusion pump equipped with an oil vapor generator capable of eliminating the problems occurring when a heater wire is used as a heating source for an operating oil. The present invention is a vacuum pump for which an oil vapor generator (70) is arranged within a casing (51) and this oil vapor generator is operated to vaporize an operating oil (8), thereby producing oil vapor and this oil vapor is sprayed from a jet (53, 53a) to exhaust intake air. The oil vapor generator (70) is equipped with: a container (71, 72) in the interior of which oil is stored, with the lower end of the tubular member (71), which comprises a material to be heated, being closed; and induction coil (75) wrapped around the atmosphere-side perimeter of the tubular member (71) (in particular, the case inner wall (71b)) with an insulating material (73) therebetween; and a power supply means that applies a low-frequency alternating current of several tens of Hz to several hundreds of Hz to the induction coil (75). The configuration is such that the tubular member (71) itself is heated when the power supply means is operated and the low-frequency alternating current is applied to the induction coil (75), thereby vaporizing the oil within the container.

34. 发明授权

EP1805420B1 TREIBMITTEL-VAKUUMPUMPE 有权
标题翻译：发泡剂真空泵
公开(公告)号：EP1805420B1
公开(公告)日：2010-07-07
申请号：EP05803340.8
申请日：2005-10-31
申请人： Bayer Technology Services GmbH
发明人： DOMS, Marco , MÜLLER, Jörg
IPC分类号： F04F9/00 , F04F5/20 , F04F5/46
CPC分类号： F04F9/00 , F04B19/006 , F04F5/20 , F04F5/46

35. 发明公开

EP2054631A1 AN OIL DIFFUSION PUMP COMPRISING A BAFFLE DEVICE 无效转让
标题翻译：石-GUARD装置油扩散泵
公开(公告)号：EP2054631A1
公开(公告)日：2009-05-06
申请号：EP07814419.3
申请日：2007-08-24
申请人： Perkinelmer LAS, Inc.
发明人： BARKUS, David A.
IPC分类号： F04F9/00 , F04F9/06
CPC分类号： F04F9/00 , F04F9/06 , H01J49/24
摘要： A baffle comprising a plurality of apertures wherein at least one of the plurality of apertures comprises a convergent portion and a divergent portion is provided. In some examples, a baffle comprising at least two concentric cones may be used. In other examples, the baffle may be used in an oil diffusion pump for use in an analytical device, such as a mass spectrometer.

36. 发明授权

EP0791752B1 Improvements in diffusion pumps 失效
公开(公告)号：EP0791752B1
公开(公告)日：2003-09-24
申请号：EP97300948.3
申请日：1997-02-13
申请人： The BOC Group plc
发明人： Huntley, Graeme
IPC分类号： F04F9/00
CPC分类号： F04F9/00

37. 发明授权

EP0563465B1 Process and apparatus for generating a vacuum 失效
标题翻译：的方法和装置，用于产生真空
公开(公告)号：EP0563465B1
公开(公告)日：1997-11-05
申请号：EP92203755.1
申请日：1992-12-03
申请人： SHELL INTERNATIONALE RESEARCH MAATSCHAPPIJ B.V.
发明人： Ansorge, Joachim , Kueh, Lip Piang
IPC分类号： F04F5/36 , F04F9/00 , F04F5/20
CPC分类号： F04F5/20 , F04F5/36 , F04F9/00

38. 发明授权

EP0601242B1 Diffusion pump 失效
标题翻译：扩散泵
公开(公告)号：EP0601242B1
公开(公告)日：1997-09-03
申请号：EP92305237.7
申请日：1992-06-08
申请人： Broadhurst, John H.
发明人： Broadhurst, John H.
IPC分类号： F04F9/00
CPC分类号： F04F9/00

39. 发明公开

EP0476157A4 Vapour-jet vacuum pump 失效
标题翻译：蒸气真空泵
公开(公告)号：EP0476157A4
公开(公告)日：1992-08-19
申请号：EP91907455
申请日：1991-03-13
申请人： NAUCHNO-PROIZVODSTEVENNOE OBIEDENENIE "VAKUUMMASHPRIBOR"
发明人： GROSHKOV, ANATOLY NIKITICH , KEMENOV, VLADIMIR NIKOLAEVICH , UKSUSOV, ARKADY STEPANOVICH
IPC分类号： F04F9/00
CPC分类号： F04F9/00
摘要： A vapour-jet vacuum pump comprises a vertically mounted hermetic casing (1) with a flange (2) for connection to the cavity to be evacuated and with a discharge sleeve (3). At the lower part of the casing (1) is mounted a bath (6) filled with a working liquid and provided with a heater (7). In the casing (1) is mounted, along its longitudinal axis, a vapour conduit pipe (4) with nozzles (5) for working liquid vapour discharge spaced along its height. A hydroseal (8) providing for the flow of the condensate into the bath (6) is located in the zone where the base of the vapour conduit (4) is mounted on the casing (1). A cooling system for the casing (1) consists of a tube (9) spirally wound around its walls and provided with connecting pipes (10) for the inlet and outlet of a cooling agent. A part of the wall of the casing (1) is formed by stiffening ribs consisting of concave sections (11) in the spirally wound tube (9) area oriented along the winding direction and contacting with the tubes (9) located in them, and having essentially the same curvature as the external radius of the tube (9), and with conical sections conjugating with the concave sections and narrowing in the direction of the vapour jets coming from the nozzles (5).

40. 发明公开

EP0347452A4 COUNTERFLOW LEAK DETECTOR WITH HIGH AND LOW SENSITIVITY OPERATING MODES 失效
标题翻译：具有高灵敏度和低灵敏度运行模式的逆流泄漏检测器
公开(公告)号：EP0347452A4
公开(公告)日：1991-05-08
申请号：EP89901367
申请日：1988-12-01
申请人： VARIAN ASSOCIATES, INC.
发明人： LANDFORS, ARTHUR, A.
IPC分类号： F04B37/00 , F04B37/02 , F04F9/00 , G01M3/20 , G01N27/62 , H01J49/04
CPC分类号： G01M3/202 , F04F9/00
摘要： A counterflow helium mass spectrometer leak detector in which a helium sample passes in a reverse direction through a diffusion pump (26) to a mass spectrometer (36) for measurement. The diffusion pump (26) includes a conventional foreline (24) and a second foreline (32) provided with an ejector stage (79). A test sample (8) is coupled from a test port (10) through a bypass valve (22) to the conventional foreline (24) in a high sensitivity mode and is coupled to the second foreline (32) in a low sensitivity mode. In the low sensitivity mode, the bypass valve (22) is closed. An apertured control plate (84) in the diffusion pump (26) controls the relative reverse rates of diffusion from each foreline (24, 32) to the diffusion pump inlet (38) by controlling the rates of vapor flow to annular pumping stages (75, 77) and to the ejector stage (79). The ejector stage (79) includes a nozzle (80) for directing a stream of vapor into the second foreline (32) so as to inhibit flow of helium into the diffusion pump (26) and establish a lower reverse diffusion rate at the second foreline (32). The disclosed configuration permits measurement of a large range of leak rates.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式