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31. 发明授权

EP1707915B1 Verfahren zum Vermessen eines in einer Referenzlage gehalterten Werkstücks 有权
标题翻译：测量参考位置的方法保持在工件
公开(公告)号：EP1707915B1
公开(公告)日：2008-09-03
申请号：EP06005696.7
申请日：2006-03-21
申请人： Junker & Partner GmbH
发明人： Huber, Alfred , Junker, Franz-Rudlof
IPC分类号： G01B5/00 , B25B11/00
CPC分类号： G01B5/0004 , B25B5/006 , B25B5/12 , B25B5/16

32. 发明授权

EP1125096B1 METHOD OF AND DEVICE FOR DETERMINING THE WARPAGE OF A WAFER 有权
标题翻译：方法和设备用于确定翘曲的半导体晶片
公开(公告)号：EP1125096B1
公开(公告)日：2008-07-16
申请号：EP00962314.1
申请日：2000-08-14
申请人： NXP B.V.
发明人： SCHOBER, Joachim
IPC分类号： G01B11/30 , G01B7/34 , G01B5/28 , G01B5/00 , G01B21/30
CPC分类号： G01B11/306 , G01B5/0004 , G01B5/0016 , G01B21/30
摘要： In a device (1) for determining deviations of a nominally planar surface (2) of a thin and, in essence, circular disk-shaped object (3), such as a wafer, relative to a reference plane (4), support means (6) comprising three support members (11, 12, 13) are provided for supporting the object (3) and detection means (20) for detecting these deviations, while the three support members (11, 12, 13) take up a position relative to each other so that each support member (11, 12, 13) is located underneath the point of gravity (26, 27, 28) of a circular sector (29, 30, 31) of the object (3) extending over an angular range of 120°.

33. 发明公开

EP1625347A1 THREE-POINT EXTENSOMETER 审中-公开
标题翻译： DREIPUNKT，伸缩仪
公开(公告)号：EP1625347A1
公开(公告)日：2006-02-15
申请号：EP04752831.0
申请日：2004-05-20
申请人： Crane Nuclear, Inc.
发明人： SMITH, Christopher, P.
IPC分类号： G01B5/30 , G01B5/00 , G01N3/06
CPC分类号： G01B5/0004 , G01B5/30 , G01N3/06 , G01N3/062 , G01N2203/0682
摘要： An instrument mounting system for repeatable field testing of equipment or other test object, comprising a frame and an inner surface defined at least in part by the frame. Exactly three object contact points are disposed upon the inner surface, the three object contact points defining a plane.

34. 发明公开

EP1336816A3 Head, apparatus and method for the linear dimension checking of mechanical pieces 有权
标题翻译：用于检查工件的线性尺寸头，装置和方法
公开(公告)号：EP1336816A3
公开(公告)日：2003-10-15
申请号：EP03008236.6
申请日：1999-02-26
申请人： MARPOSS SOCIETA' PER AZIONI
发明人： Dall'aglio, Carlo , Ventura, Luciano
IPC分类号： G01B5/00 , G01B7/00 , G01B7/12 , G01B3/00 , G01B7/012 , G01B7/34 , H01R13/627 , H01R13/629 , H01R13/639
CPC分类号： G01B5/0004 , B24B49/04 , G01B3/008 , G01B7/001 , G01B7/012 , G01B7/12 , G01B7/34 , G01D3/022
摘要： A head for the linear dimension checking of mechanical pieces including a casing, an arm carrying a feeler for touching a surface of the mechanical piece to be checked, a fulcrum, coupled to the casing and the arm, for enabling displacements of the arm with respect to the casing and a transducer for providing signals depending on the position of the arm with respect to the casing. The head has specific flexibility and modularity features, thanks to the possibility of operating from the exterior for adjusting and replacing various components. The transducer is of the inductive, half-bridge type, with multiple windings. An integral element for the electric connection to a processing unit includes the windings of the transducer, a cable and a connector, and the latter comprises a rapid locking/unlocking device. The ends of the cable are connected between the windings of the transducer and the connector by means of an over-moulding process of a plastic material. A checking apparatus, including at least a gauging or measuring head, includes a stationary structure and at least a support structure for the head, coupled to the stationary structure in an adjustable and removable way.

35. 发明公开

EP1335180A2 Messgerät mit einem Tragkörper 有权
标题翻译： Messgerätmit einemTragkörper
公开(公告)号：EP1335180A2
公开(公告)日：2003-08-13
申请号：EP03002223.0
申请日：2003-01-31
申请人： Carl Zeiss
发明人： Jacobs, Klaus , Piwek, Volker , Waletz, Franz
IPC分类号： G01B5/00
CPC分类号： G01B5/008 , G01B5/0004
摘要： Bei einem Meßgerät mit einem Tragkörper, auf dem Führungen für verfahr- und verstellbare Meßeinrichtungen angebracht sind, mit einem Untergestell (1), das den Tragkörper abstützt und einen aus Rahmenträgern (3) gebildeten Rahmen (2) aufspannt, der eine im wesentlichen rechteckförmige Rahmenöffnung (4) umgrenzt und auf Stützelementen (5) zur Abstützung auf einem Fundament befestigt ist, und mit einer Meßauflage zur Aufnahme des zu vermessenden Werkstücks ist bei zwei einander gegenüberliegenden Rahmenträgern (3) neben diesen innerhalb der Rahmenöffnung (4) jeweils ein Tragbalken (6) angebracht, der mit jedem seiner Enden auf einer auf der Rahmenunterseite in den von der Rahmenöffnung (4) aufgespannten Flächenbereich vorragenden Oberfläche (5') eines Stützelementes (5) über eine Gelenkstelle abstützt. Dabei stützt sich die Meßauflage über Stützkörper (7) auf jedem der beiden Tragbalken (6) ab.
摘要翻译：该单元具有支撑体，其具有用于可移动和可调测量装置的引导件，支撑框架（1），框架（2），其围绕基本上矩形的开口并且布置在支撑元件（5）上，用于将其支撑在基座上，测量支撑用于工件。测量支撑件横向支撑在框架开口中的承载梁（6）上。

36. 发明公开

EP1225421A3 Holder for an object to be optically measured 审中-公开
标题翻译：待测量保持件的光学对象
公开(公告)号：EP1225421A3
公开(公告)日：2003-04-02
申请号：EP02001316.5
申请日：2002-01-18
申请人： Hint- ELs GmbH
发明人： Hintersehr, Josef
IPC分类号： G01B11/25 , G01B11/24 , A61C13/00
CPC分类号： G01B11/25 , A61C9/0053 , A61C9/0093 , G01B5/0004
摘要： The invention describes a holder for an object, for example a mandibular model or similar dental model, or a precious stone or the like, which is secured on a receiving plate with a coupling pin, in which holder, to make positioning easier, the coupling pin is coupled to a coupling member having reference elements, and the receiving plate is provided with mating reference elements which are intended to interact in a reproducible and defined position when the receiving plate is mounted on the holder, and the coupling member can swivel relative to the coupling pin about a first axis perpendicular to the axis of the coupling pin.

37. 发明公开

EP1278998A1 VORRICHTUNG ZUM MESSEN ÜBER MEHRERE ACHSEN AN EINEM GEGENSTAND 有权
标题翻译：用于测量使用多轴一个对象
公开(公告)号：EP1278998A1
公开(公告)日：2003-01-29
申请号：EP01942983.6
申请日：2001-04-30
申请人： Komeg Industrielle Messtechnik GmbH
发明人： HAAGE, Klaus , LAUER, Josef
IPC分类号： G01B5/004
CPC分类号： G01B5/0004 , G01B5/0002
摘要： The invention relates to a device for measuring across several axes of an object, whereby the object to be measured can be fixed to a measuring table. According to the invention, base strips, which from a lateral view are configured as half a swallow-tail and can be fixed on the measuring plane, are provided. The device also comprises attachment strips that are adapted to said base strips, having a toothed profile on one side and being furnished with a groove, to which retaining screws are allocated. The base strips and attachment strips are arranged in relation to the measuring table and are proportioned in such a way, that the plane of the measuring table acts as a reference plane for the underside of the attachment strips. A clamping piece, which fixes the object, is also provided. The invention is suitable for both contactless optical measuring and tactile measuring. One of the advantages of the invention is that objects to be measured can be securely and rapidly fixed to the measuring table, even if the latter is mobile.

38. 发明公开

EP1150092A3 Gage set for measuring ring shaped parts 审中-公开
标题翻译： Messatz为环状构件的测量
公开(公告)号：EP1150092A3
公开(公告)日：2001-11-07
申请号：EP01109052.9
申请日：2001-04-11
申请人： Bidwell Corporation
发明人： Bidwell, Steven T.
IPC分类号： G01B5/08
CPC分类号： G01B5/201 , G01B5/0004 , G01B5/025 , G01B5/08
摘要： An adjustable gage comprises a centerline hub (22) and a swing gage (24). The hub (22) includes a body (26) with position jaws (215) adjustably attached thereto, and a central post (28). The gage (24) comprises a pair of parallel slide bars and front and rear blocks slidable along the slide bars. A movable, spring-biased probe (46) is slidably connected to the front block via a rail and carriage bearing apparatus. The probe (46) is operably connected to a probe-movement indicator (62). The rear block has a fixed probe (48). Both probes have end roller bearings (42,44). In use, the ring shaped part (32) to be measured is placed within the position jaws (215), previously adjusted to the approximate inner or outer diameter of the part. Then, the gage (24) is placed over the post (28), with the roller bearings (42,44) coming into contact with the part (32), and the gage (24) is rotated. The probes (46,48) track along the part, with any variances in part diameter showing up on the indicator (62).

39. 发明公开

EP0680598A1 APPARATUS FOR CHECKING THE DIMENSIONS OF A MECHANICAL PIECE 失效
标题翻译：安排控制机械履带的尺寸。
公开(公告)号：EP0680598A1
公开(公告)日：1995-11-08
申请号：EP94905050.0
申请日：1994-01-13
申请人： MARPOSS SOCIETA' PER AZIONI
发明人： GOLINELLI, Guido
IPC分类号： G01B5
CPC分类号： G01B5/0004 , G01B5/02 , G01B5/08 , G01B5/201 , G01B5/207
摘要： An apparatus for checking dimensions and other geometrical features of pieces like shafts (20) or bushings (120) comprises support and reference devices (21; 110) for the piece, and checking devices (40; 70; 100; 119). Modular elements (5), equal to one another, are secured to two longitudinal cylindrical bars (1, 2) arranged one over the other. Linear guide portions (7) of the modular elements lie transversally, parallel to one another, and both the support and reference devices (21; 110) and the checking devices (40; 70; 100; 119) are adjustably connected to the linear guide portions (7). The checking devices comprise integral structures with movable arms (45; 73; 129) that touch the piece to be checked, and gauging heads (50, 85, 101, 134) actuated by the movable arms.

40. 发明授权

EP0426868B1 POSITIONING TABLE 失效
标题翻译：定位表
公开(公告)号：EP0426868B1
公开(公告)日：1995-08-02
申请号：EP90907383.5
申请日：1990-04-26
申请人： NISSHA PRINTING CO., LTD.
发明人： NOGUCHI, Satoshi c/o Nissha Printing Co., Ltd.
IPC分类号： G12B5/00 , G01B21/00 , G01B5/00 , G03F9/00
CPC分类号： G12B5/00 , G01B5/0004 , G01B5/004 , G03F9/00 , Y10S248/913
摘要： A positionng table for setting a work (17) in a predetermined position in a film forming apparatus, in which a base plate (2) movable in the X-direction is supported under a table (12) on which the work is placed, a reference member supporting member (4) attached to the base plate being set movable in the Y-direction and the Υ-direction around a predetermined axis, first second and third reference members (5a, 5b, 5c) which can be engaged with the work by a reference member urging unit being supported on the reference member supporting member. When these three reference members are moved in the X-direction or Y-direction so as to set the work in a predetermined position, the reference members are moved unitarily with the reference member supporting member (4) in each direction, and, even when the work is moved in the Υ-direction, the reference members are turned necessarily around the mentioned predetermined axis, and the axis of rotation of the work is fixed.
摘要翻译：一种用于将工件（17）放置在成膜设备中的预定位置的定位台，其中，可沿X方向移动的底板（2）支撑在工件放置在其上的工作台（12）的下方，安装在基板上的基准部件支承部件（4）能够以预定的轴线为中心在Y方向和Y方向上移动，能够与工件接合的第一基准部件（5a，5b，5c）通过参考构件推动单元支撑在参考构件支撑构件上。当这三个基准构件沿X方向或Y方向移动以将工件设置在预定位置时，基准构件与基准构件支撑构件（4）一起在每个方向上整体移动，并且即使当工件在Y方向上移动，参考部件必然围绕所述预定轴线旋转，并且工件的旋转轴线是固定的。

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