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    • 28. 发明公开
    • PIEZOELECTRIC DEVICE
    • 压电装置
    • EP2124269A1
    • 2009-11-25
    • EP08711274.4
    • 2008-02-14
    • NGK Insulators, Ltd.
    • SHIMIZU, HidekiEBIGASE, Takashi
    • H01L41/09H01L41/187H01L41/22
    • H01L41/0477B41J2/14233B41J2002/14258B41J2202/03H01L41/083H01L41/0973H01L41/187H01L41/1871H01L41/1876H01L41/27H01L41/273Y10T428/26
    • In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 µm or less, both or either one of yttrium oxide (Y 2 O 3 ) and cerium oxide (CeO 2 ) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.
    • 在通过层压压电/电致伸缩膜和包含铂或主要由铂组成的厚度为2.0μm或更小的合金的电极膜制造层压压电/电致伸缩元件时,氧化钇( Y 2 O 3)和氧化铈(CeO 2)添加到电极膜或压电/电致伸缩膜中,并同时烧制电极膜和压电/电致伸缩膜。 这同时实现了电极膜的减小的厚度和改善的热阻,并且减小了压电/电致伸缩特性随时间的变化,由此产生具有良好的初始压电/电致伸缩特性并且压电/电致伸缩性变化小的压电/电致伸缩元件 随着时间的推移。