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    • 18. 发明公开
    • INTERFEROMETER
    • 干涉
    • EP3183535A1
    • 2017-06-28
    • EP15753035.3
    • 2015-08-19
    • Berz, Martin
    • Berz, Martin
    • G01B11/24G01B9/02G02B21/00G01J9/02
    • G01B9/02072G01B9/02097G01B11/2441G01J3/45G01J3/453G01J9/02
    • The invention relates to an interferometer, comprising a first interferometer arm and a second interferometer arm, wherein the first interferometer arm and the second interferometer arm are arranged in such a way that a first central beam, originating from a central pixel of an original image to be imaged, passes through the first interferometer arm, a second central beam, originating from the central pixel of the original image to be imaged, passes through the second interferometer arm, wherein, after passing through the first or second interferometer arm, the first central beam and the second central beam are superimposed and generate a k
      perpendicular =0-interference at a superposition point of the first central beam and the second central beam, a first light beam, originating from a pixel of the original image to be imaged, passes through the first interferometer arm, and a second light beam, originating from a pixel of the original image to be imaged, passes through the second interferometer arm, wherein, after passing through the first or second interferometer arm, the first light beam and the second light beam overlap at the superposition point of the first central beam and the second central beam, and wherein, at the superposition point, a wave vector component of the first light beam, which is perpendicular to the first central beam, and a wave vector component of the second light beam, which is perpendicular to the second central beam, are arranged in an opposing manner. The invention also relates to a method for reconstructing an original image from an image measured using an interferometer according to the invention. The invention further relates to a method for calibrating an interferometer according to the invention.
    • 本发明涉及一种干涉仪,其包括第一干涉仪臂和第二干涉仪臂,其中第一干涉仪臂和第二干涉仪臂被布置为使得第一中心光束源自原始图像的中心像素到 通过第一干涉仪臂,从待成像的原始图像的中心像素发出的第二中心光束通过第二干涉仪臂,其中,在通过第一或第二干涉仪臂之后,第一中心臂 第一中心光束和第二中心光束叠加并且在第一中心光束和第二中心光束的重叠点处产生垂直= 0干涉,源于待成像的原始图像的像素的第一光束通过 第一干涉仪臂和源自待成像的原始图像的像素的第二光束通过第二干涉仪臂 其中,在通过所述第一或第二干涉仪臂之后,所述第一光束和所述第二光束在所述第一中心光束和所述第二中心光束的重叠点处重叠,并且其中,在所述重叠点处, 垂直于第一中心波束的第一光束的矢量分量和垂直于第二中心波束的第二光束的波矢分量以相反的方式排列。 本发明还涉及根据本发明的用于使用干涉仪测量的图像来重建原始图像的方法。 本发明还涉及根据本发明的用于校准干涉仪的方法。
    • 19. 发明公开
    • COLLIMATION EVALUATION DEVICE AND COLLIMATION EVALUATION METHOD
    • 科学评价装置与评价方法
    • EP3176552A1
    • 2017-06-07
    • EP15827109.8
    • 2015-07-29
    • Hamamatsu Photonics K.K.
    • OKUMA, JunjiIGASAKI, Yasunori
    • G01J9/02G01B9/02G01M11/00
    • G01M11/00G01J9/02G01J9/0215
    • A first reflection member 10, when light transmitted through a second reflection member 20 is incident, reflects a part of the light by a first reflection surface 11, reflects light transmitted through the first reflection surface 11 in the light by a second reflection surface 12, and emits reflected light components in an opposite direction. The second reflection member 20, when light emitted from the first reflection member 10 is incident, reflects a part of the light by a first reflection surface 21, reflects light transmitted through the first reflection surface 21 in the light by a second reflection surface 22, and emits reflected light components. Interference fringes are formed on a screen 30 by light L 12 reflected on the first reflection surface 11 of the first reflection member 10 and the second reflection surface 22 of the second reflection member 20 and light L 21 reflected on the second reflection surface 12 of the first reflection member 10 and the first reflection surface 21 of the second reflection member 20. Thus, a device and a method that can evaluate collimation of light with high sensitivity, even when a coherence length of the light is short, are realized.
    • 当透过第二反射构件20的光入射时,第一反射构件10通过第一反射面11反射一部分光,通过第二反射面12反射透过第一反射面11的光中的光, 并沿相反方向发射反射光分量。 当从第一反射构件10发射的光入射时,第二反射构件20通过第一反射表面21反射一部分光,通过第二反射表面22将透过第一反射表面21的光反射到光中, 并发射反射光分量。 通过在第一反射部件10的第一反射表面11和第二反射部件20的第二反射表面22上反射的光L12以及在第一反射的第二反射表面12上反射的光L21,在屏幕30上形成干涉条纹 构件10和第二反射构件20的第一反射表面21.因此,实现了即使在光的相干长度短的情况下也能够以高灵敏度评估光的准直的装置和方法。