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    • 16. 发明授权
    • Method for fabricating a finfet with separate gates
    • Verfahren zu Herstellung eines FinFETS mit getrennten Gates
    • EP2253013B1
    • 2011-07-20
    • EP09711153.8
    • 2009-02-09
    • NXP B.V.
    • SONSKY, JanSURDEANU, Radu
    • H01L21/336H01L29/78
    • H01L29/66545H01L29/66795H01L29/785H01L29/7856
    • The present invention relates to a FinFET with separate gates and to a method for fabricating the same. A dielectric gate-separation layer between first and second gate electrodes has an extension in a direction pointing from a first to a second gate layer that is smaller than a lateral extension of the fin between its opposite lateral faces. This structure corresponds with a processing method that starts from a covered basic FinFET structure with a continuous first gate layer, and proceeds to remove parts of the first gate layer and of a first gate-isolation layer through a contact opening to the gate layer. Subsequently, a replacement gate-isolation layer that at the same time forms the gate separation layer fabricated, followed by filling the tunnel with a replacement gate layer and a metal filling.
    • 本发明涉及具有分离栅极的FinFET及其制造方法。 在第一和第二栅电极之间的电介质栅极分隔层在从第一栅极层到第二栅极层的方向上延伸,其小于翅片在其相对侧面之间的横向延伸。 该结构对应于从具有连续的第一栅极层的覆盖的基本FinFET结构开始的处理方法,并且通过到栅极层的接触开口去除第一栅极层和第一栅极隔离层的部分。 随后,替代栅极隔离层同时形成栅极分离层,随后用替换栅极层和金属填充物填充隧道。