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    • 91. 发明公开
    • SEPARATION TYPE UNIT PIXEL HAVING 3D STRUCTURE FOR IMAGE SENSOR AND MANUFACTURING METHOD THEREOF
    • 随着3D结构的分离模板单元的用于生产图像传感器和过程PIXEL
    • EP1869706A1
    • 2007-12-26
    • EP06747321.5
    • 2006-03-29
    • SiliconFile Technologies Inc.
    • LEE, Do Young
    • H01L27/146
    • H01L27/14634H01L27/14621H01L27/14625H01L27/14632H01L27/14636H01L27/1464H01L27/14645H01L27/14685H01L27/14687H01L27/14689
    • A separation type unit pixel of an image sensor, which can handle light that incidents onto a photodiode at various angles, and provides a zoom function in a mini camera module by securing an incident angle margin, and a manufacturing method thereof are provided. The separation type unit pixel having a 3D structure for an image sensor, composed of a plurality of transistors, includes: a first wafer which includes a photodiode, a transfer transistor, a node of a floating diffusion area functioning as static electricity for converting electric charge into a voltage, and a pad connecting the floating diffusion area and the transfer transistor to an external circuit, respectively; a second wafer which includes the rest of the circuit elements constituting a pixel (i.e., a reset transistor, a source-follower transistor, and a blocking switch transistor), a read-out circuit, a vertical/horizontal decoder, a correlated double sampling (CDS) circuit which involves in a sensor operation and an image quality, an analog circuit, an analog-digital converter (ADC), a digital circuit, and a pad connecting each pixel; and a connecting means which connects the pad of the first wafer and the pad of the second wafer. Accordingly, by forming an area for a photodiode and an area for a pixel almost the same, an image sensor can be manufactured to have a good sensitivity, without having to use a micro lens. In addition, by disposing the photodiode at the top layer, an incident angle margin of incident light can be secured, which has to be basically provided by the sensor for its auto focusing function or zoom function.
    • 98. 发明公开
    • Electron bombarded image sensor array device and its manufactoring method
    • ren ren ren ren ren ren ren ren ren ren ren ren ren ren
    • EP1734583A1
    • 2006-12-20
    • EP05076385.3
    • 2005-06-14
    • Photonis-DEP B.V.
    • Tomuta, Daniela GeorgetaMeinen, Albert Hendrik JanRuiter, GezinusVan Spijker, Jan
    • H01L27/146H01L31/0203
    • H01J31/26H01L24/14H01L27/14618H01L27/14634H01L31/0203H01L2224/0554H01L2224/0557H01L2224/05571H01L2224/05573H01L2224/16225H01L2924/00014H01L2924/15174H01L2924/15311H01L2224/05599H01L2224/0555H01L2224/0556
    • The invention relates to an electron bombarded image sensor array device comprising a vacuum chamber having a photocathode capable of releasing electrons into said vacuum chamber when exposed to light impinging on said photocathode, a photocathode capable of releasing electrons into said vacuum chamber when exposed to light impinging on said photocathode, electric field means for accelerating said released electrons from said photocathode towards an anode spaced apart from said photocathode in a facing relationship to receive an electron image from said photocathode, said anode being constructed as a back-thinned image sensor array having electric connecting pads distributed according to a pattern along the surface area of said sensor facing away from said photocathode, a carrier on which said image sensor array is mounted, said carrier having electric connecting pads distributed according to a pattern to feed electric signals from said image sensor array outside said vacuum chamber and electric connecting means for electrically connecting at least one of said electric connecting pads of said image sensor array with at least one of said electric connecting pads of said carrier.
    • 本发明涉及一种电子轰击图像传感器阵列装置,其包括具有光电阴极的真空室,该真空室当暴露于入射到所述光电阴极上的光时,能够将电子释放到所述真空室中,当暴露于光照射时能够将电子释放到所述真空室中的光电阴极 在所述光电阴极上,电场装置用于将所述释放的电子从所述光电阴极朝向与所述光电阴极隔开的阳极以面对的关系加速,以接收来自所述光电阴极的电子图像,所述阳极被构造为具有电气的背面薄化图像传感器阵列 沿着所述传感器的表面区域背离所述光电阴极分布的连接焊盘,安装有所述图像传感器阵列的载体,所述载体具有根据图案分布的电连接焊盘,以馈送来自所述图像传感器的电信号 阵列外面的真空室a d电连接装置,用于将所述图像传感器阵列的至少一个所述电连接焊盘与所述载体的所述电连接焊盘中的至少一个电连接。