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91. 发明公开

EP1665352A2 MONITORING SYSTEM COMPRISING INFRARED THERMOPILE DETECTOR 审中-公开
标题翻译：有红外探测器热电堆监测系统
公开(公告)号：EP1665352A2
公开(公告)日：2006-06-07
申请号：EP04809711.7
申请日：2004-09-10
申请人： ADVANCED TECHNOLOGY MATERIALS, INC.
发明人： ARNO, Jose, I.
IPC分类号： H01L21/302 , H01L21/50 , H01L21/00
CPC分类号： G01N21/3504 , G01J3/32 , G01J3/427 , G01N21/05 , G01N21/15 , G01N21/85 , G01N2021/151 , G01N2021/8411 , H01L21/67253
摘要： The present invention relates to a semiconductor processing system that employs infrared-based thermopile detector for process control, by analyzing a material of interest, based on absorption of infrared light at a characteristic wavelength by such material. Specifically, an infrared light beam is transmitted through a linear transmission path from an infrared light source through a sampling region containing material of interest into the thermopile detector. The linear transmission path reduces the risk of signal loss during transmission of the infrared light. The transmission path of the infrared light may comprise a highly smooth and reflective inner surface for minimizing such signal loss during transmission.

92. 发明公开

EP1548414A3 Spectrophotometer with optical filters and electrostatic shutters 有权
标题翻译：分光光度计滤光器和静电封
公开(公告)号：EP1548414A3
公开(公告)日：2005-09-07
申请号：EP04022758.9
申请日：2004-09-24
申请人： C.R.F. Società Consortile per Azioni
发明人： Pizzi, Marco
IPC分类号： G01J3/04 , G01J3/51
CPC分类号： G01J3/51 , G01J3/04 , G01J3/32
摘要： A spectrophotometer comprises selection means for selecting one or more of the components of a light beam corresponding to different wavelengths, formed by optical micro-filters (20).

93. 发明公开

EP1393026A1 OPTICAL CHANNEL MONITOR 审中-公开
标题翻译：监事光通道
公开(公告)号：EP1393026A1
公开(公告)日：2004-03-03
申请号：EP02739543.3
申请日：2002-05-31
申请人： CiDra Corporation
发明人： MOON, Jhon , JONES, Raph , WINSTON, Charles, , SIRKIS, James , FOURNIER, David , PINTO, Joseph , BRUCATO, Robert, N. , DUNPHY, James , CHESTNUT, Christopher
IPC分类号： G01J3/06 , G02B6/34
CPC分类号： G01J3/28 , G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/021 , G01J3/0218 , G01J3/0256 , G01J3/0291 , G01J3/06 , G01J3/32 , G01J3/36 , G01J2003/064 , G01J2003/1819 , G02B6/2706 , G02B6/2793 , G02B6/2931 , G02B6/29313 , G02B6/29314 , G02B6/29385 , G02B6/29398 , G02B6/3512 , G02B6/359 , G02B6/4215 , G02B6/4246 , H04B10/077 , H04B10/07955 , H04Q2011/0026 , H04Q2011/0049 , H04Q2011/0083
摘要： An optical channel monitor is provided that sequentially or selectively filters an optical channel(s) (11) of light from a (WDM) optical input signal (12) and senses predetermined parameters of the each filtered optical signal (e.g., channel power, channel presence, signal-noise-ratio). The OCM (200) is a free-space optical device that includes a collimator assembly (224), a diffraction grating (214) and a mirror (202). A launch pigtail (220) emits into free space the input signal through the collimator assembly (224) and onto the diffraction grating (214), which separates spatially each of the optical channels (11) of the collimated light, and reflects the sep arated channels of light onto the mirror (202). The mirror reflects the separated light back to the diffraction grating (214), which reflects the channels of light back through the collimating lens. The lens focuses each separated channel of light (μ1 - μN) at a different focal point in space. One of the optical channels (11) is focused onto a receive pigtail (204), which then propagates to a photodetector (206). A pivoting mechanism (201) pivots the mirror about a pivot point (203) to sequentially or selectively focus each optical channel (11) to the receive pigtail (204). A position sensor detects the displacement of the mirror. The position sensor comprises additional mirror (210, 212) mounted adjacently the grating (214). These mirrors deflect light reflected from the scanning mirror (202) into the pigtail (242) and provide there by start and stop reference signals for a scan cycle of the OCM.

94. 发明公开

EP1368622A1 SPECTROMETRE COMPORTANT UNE OPTIQUE MATRICIELLE ACTIVE 有权
标题翻译：与有源光矩阵光谱仪
公开(公告)号：EP1368622A1
公开(公告)日：2003-12-10
申请号：EP02718233.6
申请日：2002-03-01
申请人： Jobin Yvon S.A.S.
发明人： DA SILVA, Edouard
IPC分类号： G01J3/06 , H04J14/02 , G02B26/08
CPC分类号： G01J3/02 , G01J3/021 , G01J3/06 , G01J3/32 , G01J3/36 , G02B26/0833
摘要： The invention relates to a spectrometer (1) comprising an element for dispersing a light beam formed by a set of spectral components, said dispersing element spatially dispersing the spectral components in the form of a spatially-distributed dispersion spectrum (6), and at least one photonic detector (5, 52) comprising at least one detection element (51) which is disposed at one point of said dispersion. According to the invention, a matrix optics electro-micromechanical device (3) is disposed between the dispersing element and the detector in the dispersion spectrum, said electro-micromechanical device comprising a matrix of optical components. Each of said optical components can reflect one part of the dispersion spectrum in at least two directions according to a control signal so that at least one subset of the spectrum can be selected for said detection element. A method and an application of the spectrometer are claimed.

95. 发明公开

EP1282809A1 WAVELENGTH MONITOR FOR WDM SYSTEMS 审中-公开
标题翻译：波长监控装置技术的WDM系统
公开(公告)号：EP1282809A1
公开(公告)日：2003-02-12
申请号：EP01928317.5
申请日：2001-03-22
申请人： Network Photonics, Inc.
发明人： GEORGIS, Steven, P. , WEVERKA, Robert, T.
IPC分类号： G01J3/28 , H04J14/08
CPC分类号： G02B6/4215 , G01J1/4257 , G01J3/32 , G02B6/2931 , G02B6/29313 , G02B6/29385 , G02B6/29395 , H04J14/02
摘要： A method of monitoring input light having a plurality of spectral bands includes the following: carried out for at least two different spectral bands at different times, using a common photodetector (30) and wavelength-monitoring circuit (20) that is coupled to the photodetector, separating one of the spectral bands from the plurality of spectral bands, directing light in only that spectral band to the photodetector and generating, with the wavelengthmonitoring circuit, a signal representing a quality characteristic of a modulated or unmodulated pattern of light in that spectral band. If desired, the optical power of the plurality of spectral bands can be monitored by directing the light in the spectral bands other than the band that has been separated from the plurality to an additional common photodetector and a common power-monitoring circuit (42).

96. 发明公开

EP1178345A1 Spektroskopische Anordnung in einem konfokalen Mikroskop 有权
标题翻译： Spektroskopische Anordnung在einem konfokalen Mikroskop
公开(公告)号：EP1178345A1
公开(公告)日：2002-02-06
申请号：EP01117981.9
申请日：2001-07-25
申请人： Leica Microsystems Heidelberg GmbH
发明人： Knebel, Werner, Dr.
IPC分类号： G02B21/00 , G01J3/32
CPC分类号： G01J3/32 , G01J3/14 , G02B21/0048 , G02B21/0064 , G02B21/008
摘要： Die vorliegende Erfindung betrifft eine optische Anordnung zur Selektion und Detektion des Spektralbereichs eines Lichtstrahls (1) in einem konfokalen Rastermikroskop, mit einem Mittel (2) zur spektralen Zerlegung des Lichtstrahls (1), mit Mitteln (3) zum Selektieren eines vorgebbaren spektralen Bereichs (4) und mit einer Detektionsvorrichtung (5). Die optische Anordnung sollte von einem zu detektierenden spektralen Bereich mehrere schmalbandige spektrale Bereiche möglichst lückenlos und in variabel einstellbaren Schritten abtasten bzw. detektieren können. Weiterhin sollte eine schnelle und variable spektrale Detektion möglich sein, die gleichzeitig kostengünstig realisierbar ist. Die erfindungsgemäße optische Anordnung ist dadurch gekennzeichnet, dass zur Beeinflussung des zu detektierenden spektralen Bereichs (4, 18) der spektral zerlegte Lichtstrahl (19) und die Detektionsvorrichtung (5) relativ zueinander in ihrer Position veränderbar sind.
摘要翻译：用于在具有用于光束的光谱分离的棱镜（2）的共焦光栅显微镜中用于选择和检测来自光束（1）的光谱区域的光的光学布置，以及用于选择特定光谱的快门（3）区域（4）。为了影响光谱分割光束（19）的光谱区域（4），它和检测器装置可以相对于彼此移动。使用用于旋转或平移位移的电流计实现光束和检测器的光谱区域的相对位移。

97. 发明公开

EP1141677A1 GASQUALITÄTSBESTIMMUNG 有权
公开(公告)号：EP1141677A1
公开(公告)日：2001-10-10
申请号：EP00902551.1
申请日：2000-01-04
申请人： Flowcomp Systemtechnik GmbH
发明人： STIRNBERG, Dieter , KASTNER, Joachim
IPC分类号： G01N21/35 , G01N33/28
CPC分类号： G01J3/02 , G01J3/0218 , G01J3/0229 , G01J3/0232 , G01J3/10 , G01J3/32 , G01J3/42 , G01J2003/2866 , G01J2003/326 , G01N21/3504 , G01N21/359 , G01N33/225
摘要： The invention relates to a method of determining mainly the compressibility number K, the standard volumetric gross calorific value Hv,n and the standard density ςn of test gases (1) using values determined from a spectrum of the test gases (1). The invention describes various approaches of translating the values for determining the desired values using the data of the spectrum in the operational condition to the standard reference condition using two-step iteration processes without having to subject the test gases (1) to time-consuming treatments. The invention further relates to devices which are useful for determining the values required for said methods and which further develop devices that can be used for carrying out said methods.

98. 发明公开

EP0961107A2 Method of calculating optical frequency spectrum 审中-公开
标题翻译： Verfahren zur Berechnung eines optischen Frequenzspektrums
公开(公告)号：EP0961107A2
公开(公告)日：1999-12-01
申请号：EP99110044.7
申请日：1999-05-21
申请人： ANDO ELECTRIC CO., LTD.
发明人： Iwasaki, Takashi, c/o Ando Electric Co., Ltd.
IPC分类号： G01J3/28
CPC分类号： G01J3/02 , G01J3/027 , G01J3/06 , G01J3/18 , G01J3/28 , G01J3/32
摘要： A method of calculating optical frequency spectrum for use in an optical-spectrum measuring apparatus for measuring optical spectrum characteristics of a light source. In the method, a bandwidth storage section stores a characteristic of a bandwidth of passed wavelengths with respect to a measuring wavelength of a spectrometer. A CPU obtains a bandwidth of wavelengths with respect to each measuring point in accordance with the stored bandwidth of wavelengths. Then, measured intensities of light at the measuring points are used to add measured values across the measured value in a required range of bandwidth of optical frequencies. Moreover, correction is performed in accordance with a ratio of the bandwidth of wavelengths at each of the measuring points and the intervals of wavelength at the measuring points. Thus, an intensity of light at each of the measuring points is obtained.
摘要翻译：一种用于测量光源的光谱特性的光谱测量装置中使用的光谱的方法。在该方法中，带宽存储部存储相对于光谱仪的测定波长的通过的波长的带宽的特性。 CPU根据存储的波长带宽获得相对于每个测量点的波长带宽。然后，测量点的光强度用于在光频带宽的所需范围内的测量值上加上测量值。此外，根据测量点的每个测量点处的波长带宽和测量点处的波长间隔的比率执行校正。因此，获得每个测量点的光强度。

99. 发明公开

EP0344783A3 Monochromator drift compensation 失效
标题翻译：单色缓冲器补偿
公开(公告)号：EP0344783A3
公开(公告)日：1990-12-27
申请号：EP89109948.3
申请日：1989-06-01
申请人： THE PERKIN-ELMER CORPORATION
发明人： Wuest, Charles E. , Collins, John B.
IPC分类号： G01J3/28
CPC分类号： G01J3/28 , G01J3/18 , G01J3/32 , G01J2003/063 , G01J2003/066 , G01N21/73 , G01N21/74
摘要： Iterative compensation of drift of peak positions of spectral lines in a spectral monochromator including a grating, a detector of spectral fractions of a spectral band, a stepper motor for varying relative orientation of the grating and the detector, and a computer. A series of computer-defined spectral windows each encompasses one spectral band and has a nominal spectral position and an initial spectral center. Each window is scanned such as to determine a peak spectral position. Calculations are made for a spectral offset of the peak position from the initial center for each corresponding window, an average of the offsets for the peaks as a linear function of window position, and a revised spectral center for each window equal to the initial center plus the average offset for the window position determined from the linear function. Each window is shifted correspondingly. The step of successively scanning through each window is repeated such as to determined a new peak position for each corresponding band, whereby each new peak position is maintained near the spectral center of each corresponding window.

100. 发明公开

EP0205050A3 Simultaneous multiple wavelength photometer 失效
标题翻译：同时多波长光电测定仪
公开(公告)号：EP0205050A3
公开(公告)日：1988-04-27
申请号：EP86107340
申请日：1986-05-30
申请人： MILES LABORATORIES, INC.
发明人： Brunsting, Albert
IPC分类号： G01N21/31 , G01J03/36 , G01N21/47 , G01J03/26
CPC分类号： G01N21/31 , G01J3/0294 , G01J3/12 , G01J3/32 , G01J2003/1234 , G01N21/4738 , G01N21/59
摘要： Simultaneous multiple photometer measurements are made by simultaneously passing light to be measured through multiple light paths to different locations of a circularly variable filter; passing the light through the circularly variable filter at said locations; collecting the light passed through the circularly variable filter at each location; transmitting the light passed through the circularly variable filter to separate detectors; and measuring the light transmitted along each light path by said detectors.

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