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1. 发明公开

EP0384754A2 Localized vacuum apparatus and method 失效
标题翻译： Teilvakuumgerätund -verfahren。
公开(公告)号：EP0384754A2
公开(公告)日：1990-08-29
申请号：EP90301905.7
申请日：1990-02-22
申请人： MICRION CORPORATION
发明人： Economou, Nicholas P. , Guarino, Nicholas , Edwards, David, Jr.
IPC分类号： H01J37/18 , H01J37/30 , H01L21/00
CPC分类号： H01J37/18 , H01J2237/006
摘要： Apparatus (10) generates a localized, non-contact vacuum seal at a selected process region (15) of a workpiece surface (13) and includes a vacuum body (42) with a workpiece-facing surface (44) having a plurality of concentric grooves (46a-d) and a central bore (52) through which a process energy beam (17) can be transmitted. The method of generating a localized vacuum seal includes placing the vacuum body (42) into selected proximity with the process region (15) of the workpiece surface (13), and differentially evacuating the grooves (46b-d), thereby defining differentially pumped vacuum chambers which reduce the influx of atmospheric particles to the process region (15). A selected control gas from source (24) is introduced into a vacuum body groove (46a) to further reduce the influx of atmospheric particles to the process region (15), and selected process gases can be introduced into the vacuum body (42) to react with the process beam (17).
摘要翻译：设备（10）在工件表面（13）的所选择的工艺区域（15）处产生局部的非接触真空密封件，并且包括真空体（42），具有面向工件的表面（44）具有多个同心凹槽（46a-d）和中心孔（52），过程能量束（17）可通过该中心孔传播。产生局部真空密封的方法包括将真空体（42）放置在与工件表面（13）的工艺区域（15）附近的选定附近，并差别地排出凹槽（46b-d），从而限定差分抽真空减少大气颗粒流入工艺区域的腔室（15）。来自源极（24）的选择的控制气体被引入真空体槽（46a）中，以进一步减少大气颗粒向工艺区域（15）的流入，并且可以将选择的工艺气体引入真空体（42）至与过程梁（17）反应。

2. 发明授权

EP0384754B1 Localized vacuum apparatus and method 失效
标题翻译：部分真空的装置和方法
公开(公告)号：EP0384754B1
公开(公告)日：1997-05-14
申请号：EP90301905.7
申请日：1990-02-22
申请人： MICRION CORPORATION
发明人： Economou, Nicholas P. , Guarino, Nicholas , Edwards, David, Jr.
IPC分类号： H01J37/18 , H01J37/30 , H01L21/00
CPC分类号： H01J37/18 , H01J2237/006

3. 发明公开

EP0384754A3 Localized vacuum apparatus and method 失效
标题翻译：本地化真空设备和方法
公开(公告)号：EP0384754A3
公开(公告)日：1991-05-02
申请号：EP90301905.7
申请日：1990-02-22
申请人： MICRION CORPORATION
发明人： Economou, Nicholas P. , Guarino, Nicholas , Edwards, David, Jr.
IPC分类号： H01J37/18 , H01J37/30 , H01L21/00
CPC分类号： H01J37/18 , H01J2237/006
摘要： Apparatus (10) generates a localized, non-contact vacuum seal at a selected process region (15) of a workpiece surface (13) and includes a vacuum body (42) with a workpiece-facing surface (44) having a plurality of concentric grooves (46a-d) and a central bore (52) through which a process energy beam (17) can be transmitted. The method of generating a localized vacuum seal includes placing the vacuum body (42) into selected proximity with the process region (15) of the workpiece surface (13), and differentially evacuating the grooves (46b-d), thereby defining differentially pumped vacuum chambers which reduce the influx of atmospheric particles to the process region (15). A selected control gas from source (24) is introduced into a vacuum body groove (46a) to further reduce the influx of atmospheric particles to the process region (15), and selected process gases can be introduced into the vacuum body (42) to react with the process beam (17).

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