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1. 发明授权

EP2835688B1 NANO-PATTERNED SYSTEM AND MAGNETIC-FIELD APPLYING DEVICE THEREOF 有权
标题翻译：纳米图案化的系统及其磁场施加装置
公开(公告)号：EP2835688B1
公开(公告)日：2017-05-17
申请号：EP12873678.2
申请日：2012-07-17
申请人： Institute Of Physics Chinese Academy Of Sciences
发明人： YU, Guoqiang , GUO, Peng , HAN, Xiufeng , GUO, Chaohui , SUN, Xiaoyu , ZHOU, Xiangqian
IPC分类号： G03F7/20 , G01R31/00 , G01R33/09 , H01F7/20 , H01F41/00 , H01J37/09 , H01L43/12
CPC分类号： H01J37/09 , G01R33/093 , G01R33/096 , H01F7/202 , H01F7/204 , H01F41/00 , H01J37/141 , H01J2237/0262 , H01J2237/0264 , H01J2237/28 , H01J2237/31754 , H01L43/12

2. 发明授权

EP2738607B1 NANOPATTERNING AND ULTRA-WIDEBAND ELECTROMAGNETIC CHARACTERISTIC MEASUREMENT SYSTEM 有权
标题翻译：测量系统的纳米结构和超宽带电磁特性
公开(公告)号：EP2738607B1
公开(公告)日：2016-05-18
申请号：EP12818389.4
申请日：2012-07-17
申请人： Institute Of Physics Chinese Academy Of Sciences , Germantech Co., Ltd.
发明人： HAN, Xiufeng , MA, Qinli , YU, Guoqiang , LIU, Houfang , YU, Tian , ZHOU, Xiangqian , AI, Jinhu , SUN, Xiaoyu
IPC分类号： G03F7/20 , G01R31/00 , G01R31/315 , H01L21/66 , H01J37/317 , H01J37/26
CPC分类号： H01J37/26 , G01R31/2822 , G01R31/315 , H01J37/3174 , H01J2237/24564 , H01J2237/28 , H01L22/12

3. 发明公开

EP2835688A1 NANO-PATTERNED SYSTEM AND MAGNETIC-FIELD APPLYING DEVICE THEREOF 有权
标题翻译：纳米结构和设备以便在其是应用磁FIELDS
公开(公告)号：EP2835688A1
公开(公告)日：2015-02-11
申请号：EP12873678.2
申请日：2012-07-17
申请人： Institute Of Physics Chinese Academy Of Sciences
发明人： YU, Guoqiang , GUO, Peng , HAN, Xiufeng , GUO, Chaohui , SUN, Xiaoyu , ZHOU, Xiangqian
IPC分类号： G03F7/20 , G01R31/00
CPC分类号： H01J37/09 , G01R33/093 , G01R33/096 , H01F7/202 , H01F7/204 , H01F41/00 , H01J37/141 , H01J2237/0262 , H01J2237/0264 , H01J2237/28 , H01J2237/31754 , H01L43/12
摘要： Disclosed are a nano-patterned system and a magnetic-field applying device thereof. The nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device. The magnetic-field applying device comprises a power supply, a magnetic-feld generation device and a pair of magnetic poles. The magnetic-field generation device comprises a coil and a magnetic conductive soft iron core. The power supply is connected to the coil, and the coil is wound on the magnetic conductive soft iron core to generate a magnetic field. The magnetic conductive soft iron core is of a semi-closed frame structure, and the magnetic poles are respectively arranged at the two ends of the semi-closed frame structure. The sample stage is arranged inside a vacuum chamber of the nano-patterned system. The magnetic poles are oppositely arranged inside the vacuum chamber relative to the sample stage. The coil and the magnetic conductive soft iron core are arranged outside the vacuum chamber. The magnetic conductive soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles are used for locating a sample on the sample stage and applying a local magnetic field.

4. 发明公开

EP2738607A1 NANO GRAPHICS AND ULTRA-WIDEBAND ELECTROMAGNETIC CHARACTERISTIC MEASUREMENT SYSTEM 有权
标题翻译：系统ZUR MESSUNG VON NANOSTRUKTURIERUNGEN UND VON ULTRABREITBANDIGEN ELEKTROMAGNETISCHEN CHARAKTERISTIKEN
公开(公告)号：EP2738607A1
公开(公告)日：2014-06-04
申请号：EP12818389.4
申请日：2012-07-17
申请人： Institute Of Physics Chinese Academy Of Sciences , Germantech Co., Ltd.
发明人： HAN, Xiufeng , MA, Qinli , YU, Guoqiang , LIU, Houfang , YU, Tian , ZHOU, Xiangqian , AI, Jinhu , SUN, Xiaoyu
IPC分类号： G03F7/20 , G01R31/00
CPC分类号： H01J37/26 , G01R31/2822 , G01R31/315 , H01J37/3174 , H01J2237/24564 , H01J2237/28 , H01L22/12
摘要： Disclosed is a nano-patterned and ultra-wideband electromagnetic characteristic measurement system, including a power source, a control device and a measurement device. The control device is connected to the measurement device. The control device and the measurement device are respectively connected to the power source. The measurement device includes an imaging device with an SEM imaging or EBL patterning function, a vacuum chamber, a vacuum system, a sample stage and a magnetic-field response characteristic test device, wherein the vacuum system is connected to the vacuum chamber, wherein the imaging device, the sample stage and the magnetic-field response characteristic test device all are arranged inside the vacuum chamber, and wherein the imaging device and the magnetic-field response characteristic test device are arranged relative to the sample stage. The present invention can be used to quickly and efficiently test and study nanomaterials and devices as well as the array samples thereof, can be widely used in many fields and can meet the extensive market demand.
摘要翻译：公开了一种纳米图案和超宽带电磁特征测量系统，包括电源，控制装置和测量装置。控制装置连接到测量装置。控制装置和测量装置分别连接到电源。测量装置包括具有SEM成像或EBL构图功能的成像装置，真空室，真空系统，样品台和磁场响应特性测试装置，其中真空系统连接到真空室，其中成像装置，样品台和磁场响应特性测试装置均布置在真空室内，并且其中成像装置和磁场响应特性测试装置相对于样品台布置。本发明可用于快速有效地测试和研究纳米材料和器件及其阵列样品，可广泛应用于许多领域，可以满足广泛的市场需求。

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