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1. 发明公开

EP2518462A1 FORCE SENSOR AND METHOD OF MANUFACTURING THE SAME 有权转让
标题翻译： KRAFTSENSOR UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP2518462A1
公开(公告)日：2012-10-31
申请号：EP10839276.2
申请日：2010-12-16
申请人： Alps Electric Co., Ltd.
发明人： UMETSU, Eiji , ISHIZONE, Masahiko , HIRAYAMA, Motoki , GOCHOU, Hideki
IPC分类号： G01L1/18
CPC分类号： G01L1/18 , G01L5/162 , Y10T29/42
摘要： Provided are a force sensor and a method of manufacturing the force sensor in which distortion of substrates due to residual stress after joining of substrates can be decreased, and with which the yield can be improved.
A sensor substrate includes a plurality of piezoresistance elements. The electrical resistance of each piezoresistance element changes in accordance with an amount of displacement of a displacement portion displaced by an external load applied through a pressure receiving unit. A base substrate supports the sensor substrate. The sensor substrate and the base substrate each include a support supporting the displacement portion such that the displacement portion can be displaced and a plurality of electrically connecting portions electrically connected to the plurality of piezoresistance elements. The supports of the sensor and base substrates are joined to each other and the plurality of electrically connecting portions of the sensor and base substrates are joined to each other. Furthermore, in each of the sensor and base substrates, either the support or the plurality of electrically connecting portions or both extend to the periphery of the sensor substrate or the base substrate.
摘要翻译：提供一种力传感器和制造力传感器的方法，其中可以减少由于基板接合之后的残余应力引起的基板的变形，并且可以提高成品率。传感器基板包括多个压阻元件。每个压电元件的电阻根据通过压力接收单元施加的外部负载而移位的位移部分的位移量而变化。基底支撑传感器基底。传感器基板和基板各自包括支撑位移部分的支撑件，使得位移部分可以移位，并且多个电连接部分电连接到多个压阻元件。传感器和基底基板的支撑体彼此接合，并且传感器和基底基板的多个电连接部分彼此接合。此外，在每个传感器和基底中，支撑件或多个电连接部分或两者都延伸到传感器基板或基底基板的周边。

2. 发明授权

EP2098879B1 MAGNETIC DETECTING DEVICE, AND ITS MANUFACTURING METHOD 有权转让
标题翻译：磁检测装置及其制造方法
公开(公告)号：EP2098879B1
公开(公告)日：2012-12-26
申请号：EP07831897.9
申请日：2007-11-15
申请人： Alps Electric Co., Ltd.
发明人： GOCHO, Hideki , ANDO, Hideto , HIRAYAMA, Motoki
IPC分类号： G01R33/09 , H01L43/08 , G01R33/00
CPC分类号： G01R33/093 , B82Y25/00 , G01R33/0052 , H01L43/08 , H01L43/12

3. 发明公开

EP2098879A1 MAGNETIC DETECTING DEVICE, AND ITS MANUFACTURING METHOD 有权转让
标题翻译： MAGNETISCHE DETEKTIONSANORDNUNG UND HERSTELLUNGSVERFAHRENDAFÜR
公开(公告)号：EP2098879A1
公开(公告)日：2009-09-09
申请号：EP07831897.9
申请日：2007-11-15
申请人： Alps Electric Co., Ltd.
发明人： GOCHO, Hideki , ANDO, Hideto , HIRAYAMA, Motoki
IPC分类号： G01R33/09 , H01L43/08
CPC分类号： G01R33/093 , B82Y25/00 , G01R33/0052 , H01L43/08 , H01L43/12
摘要： It is an object of the present invention to provide a magnetic detection device in which, in particular, the environment resistance of the magnetoresistance effect element is improved and a reduction in size is realized and to provide a process of producing the same. The magnetoresistance effect element 10 is entirely covered with an alumina layer 31 except through-holes 31a. Electrode layers 15 and 18 are disposed from the through-holes 31a over the alumina layer 31. A silica layer 32 is disposed on the electrode layers 15 and 18 over the alumina layer 31 on the magnetoresistance effect element 10. Since the alumina layer 31 is formed on the entire top surface of the magnetoresistance effect element 10 before the formation of the electrode layers 15 and 18, unlike a conventional case in which the alumina layer 31 is formed on the magnetoresistance effect elements 10 over the electrode layers through the level difference portions 21 having a steep difference in level, the insulation and protection can be adequately achieved even if the alumina layer 31 has a small thickness. Therefore, the environment resistance of the magnetoresistance effect element can be increased, and the magnetic detection device can be reduced in thickness.
摘要翻译：本发明的目的是提供一种特别是提高磁阻效应元件的环境电阻并实现尺寸减小并提供其制造方法的磁检测装置。除了通孔31a之外，磁阻效应元件10完全被氧化铝层31覆盖。电极层15和18从氧化铝层31上的通孔31a设置。氧化硅层32设置在磁阻效应元件10上的氧化铝层31上的电极层15和18上。由于氧化铝层31是形成在形成电极层15和18之前的磁阻效应元件10的整个顶表面上，这与传统的在电极层上通过电平差部分形成氧化铝层31在磁阻效应元件10上的情况不同 21具有陡峭的水平差异，即使氧化铝层31具有小的厚度，也可以充分地实现绝缘和保护。因此，可以提高磁阻效应元件的耐环境性，并且可以减小磁检测装置的厚度。

4. 发明授权

EP2071349B1 MAGNETISM DETECTOR AND ITS MANUFACTURING METHOD 有权转让
标题翻译：磁力检测元件及其制造方法
公开(公告)号：EP2071349B1
公开(公告)日：2013-01-09
申请号：EP07713901.2
申请日：2007-02-07
申请人： Alps Electric Co., Ltd.
发明人： SASAKI, Yoshito , SASAKI, Shinichi , HIRAYAMA, Motoki , ANDO, Hideto , AOKI, Daigo
IPC分类号： G01R33/09 , G01R33/00
CPC分类号： G01R33/093 , B82Y25/00 , G01R33/0052

5. 发明公开

EP2071349A1 MAGNETISM DETECTOR AND ITS MANUFACTURING METHOD 有权转让
标题翻译： VERFAHREN ZU SEINER HERSTELLUNG的MAGNETISMUSDETEKTOR
公开(公告)号：EP2071349A1
公开(公告)日：2009-06-17
申请号：EP07713901.2
申请日：2007-02-07
申请人： Alps Electric Co., Ltd.
发明人： SASAKI, Yoshito , SASAKI, Shinichi , HIRAYAMA, Motoki , ANDO, Hideto , AOKI, Daigo
IPC分类号： G01R33/09
CPC分类号： G01R33/093 , B82Y25/00 , G01R33/0052
摘要： [Object] To provide a magnetic detection element having stable characteristics in which, in particular, the formation area of a resist layer that covers an insulation protection layer is adjusted so that a magnetic detection element and a connection layer can be formed with high precision on a surface having small steps and the resist layer can be prevented from being separated, and to provide a method of manufacturing the same.
[Solving Means] A resist layer 42 is disposed so as to overlap an interconnection layer 35 through the insulation protection layer 41. A lower edge portion 42b1 of a hole formation surface 42b of the resist layer 42 is disposed on the insulation protection layer 41 so that the resist layer 42 does not extend to an exposed surface 35b of the interconnection layer 35. Thereby, a magnetic detection element 10, electrode layers connected to the magnetic detection element 10, and a lead layer 17 can be formed on a smooth insulating surface with small steps, and also the resist layer 42 can be prevented from being separated. As a result, a magnetic detection device having stable characteristics can be obtained.
摘要翻译：本发明提供一种具有稳定特性的磁性检测元件，特别是调整覆盖绝缘保护层的抗蚀剂层的形成区域，使得可以高精度地形成磁性检测元件和连接层可以防止具有小步骤的表面和抗蚀剂层分离，并提供其制造方法。 [解决方案]抗蚀剂层42设置成通过绝缘保护层41与互连层35重叠。抗蚀剂层42的孔形成面42b的下边缘部分42b1设置在绝缘保护层41上抗蚀剂层42不延伸到互连层35的暴露表面35b。由此，可以在平滑的绝缘表面上形成磁性检测元件10，连接到磁性检测元件10的电极层和引线层17 具有小的台阶，并且还可以防止抗蚀剂层42分离。结果，可以获得具有稳定特性的磁检测装置。

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