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    • 7. 发明专利
    • Device containing controllable thin-film bulk acoustic resonator for amplitude and phase modulation
    • 包含可控薄膜泡沫谐振器的装置,用于振幅和相位调制
    • JP2007202171A
    • 2007-08-09
    • JP2007042874
    • 2007-02-22
    • Nokia Corpノキア コーポレーション
    • ELLA JUHA
    • H03C1/08H04R17/00H01L41/09H01L41/18H01L41/22H03C1/46H03C3/10H03C3/42H03H3/02H03H3/04H03H9/17H03H9/54
    • H03H9/175H03C1/46H03C3/42H03H3/04H03H9/173H03H9/174H03H2003/0428
    • PROBLEM TO BE SOLVED: To provide a device containing a controllable BAW resonator for amplitude modulating or phase modulating desired signals. SOLUTION: The bulk acoustic wave resonator comprises a substrate, a resonation means, a first electrode adjacent to the first surface of the resonation means, a second electrode adjacent to the second surface of the resonation means, a membrane positioned between the second electrode and the substrate, a pair of etching windows, and an air gap separating at least a portion of the substrate from at least a portion of the membrane. The air gap is formed by etching a portion of the substrate through the etching windows, the resonation means resonates in response to an electric field generated between the electrodes by a voltage applied between the first and second electrodes, and the air gap insulates vibrations generated by the resonation means from the bulk acoustic wave resonator insulated from the substrate. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种包含用于振幅调制或相位调制所需信号的可控BAW谐振器的装置。 解决方案:体声波谐振器包括衬底,谐振装置,与谐振装置的第一表面相邻的第一电极,与谐振装置的第二表面相邻的第二电极,位于第二电极之间的膜 电极和衬底,一对蚀刻窗口和将至少一部分衬底与膜的至少一部分分开的气隙。 通过蚀刻窗口蚀刻衬底的一部分来形成气隙,谐振装置响应于通过施加在第一和第二电极之间的电压而在电极之间产生的电场而谐振,并且气隙绝缘由 来自与基板绝缘的体声波谐振器的谐振装置。 版权所有(C)2007,JPO&INPIT