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    • 1. 发明授权
    • Microwave excited gas laser oscillator
    • 微波激发气体激光振荡器
    • US06259716B1
    • 2001-07-10
    • US09238634
    • 1999-01-28
    • Yutaka IwasakiShigeki Yamane
    • Yutaka IwasakiShigeki Yamane
    • H01S30975
    • H01S3/0975
    • In one discharge tube in which laser gas flows, a plurality of microwave generating units composed of microwave power sources, magnetrons and waveguides are disposed, and each magnetron oscillates intermittently by switching the drive of the microwave power source. A main controller provides a reference clock to a power source unit composed of the plurality of microwave power sources. By this reference clock, adjacent microwave power sources in the power source unit are switched and driven at a predetermined phase difference through a phase shifter. Accordingly, discharge interference in adjacent discharge areas is avoided, so that a stable laser beam output may be obtained.
    • 在激光气体流过的一个放电管中,设置由微波电源,磁控管和波导构成的多个微波发生单元,通过切换微波功率源的驱动,每个磁控管间歇地摆动。 主控制器为由多个微波功率源组成的电源单元提供参考时钟。 通过该参考时钟,电源单元中的相邻微波功率源通过移相器以预定的相位差被切换和驱动。 因此,避免了相邻放电区域的放电干扰,从而可以获得稳定的激光束输出。