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1. 发明申请

WO1996003789A1 DISCHARGE ARRANGEMENT FOR PULSED GAS LASERS 审中-公开
标题翻译：放电安排气体激光脉冲
公开(公告)号：WO1996003789A1
公开(公告)日：1996-02-08
申请号：PCT/EP1995002870
申请日：1995-07-20
申请人： ATL LASERTECHNIK & ACCESSOIRES GMBH , OSMANOW, Rustem
发明人： ATL LASERTECHNIK & ACCESSOIRES GMBH
IPC分类号： H01S03/038
CPC分类号： H01S3/0385 , H01S3/0384 , H01S3/0388 , H01S3/09716
摘要： The description relates to a discharge arrangement (1) for pulsed gas lasers in which there are laser electrodes (8, 9) in the space (15) between which discharges with intense u/v emission are produced by an arrangement on at least one side, by means of which the space (15) between the laser electrodes (8, 9) is pre-ionised. Essentially in the invention, the arrangement (2, 3, 4) consists of at least one rod electrode (2) which is surrounded by an insulating, preferably ceramic, material (4) and has a conductive contact (5) with the surface (6) of insulating ceramic material (4) and on this surface (6) there is at least one counter-electrode (7) spaced from the rod electrode (2) which is conductively connected to one of the laser electrodes (8), whereby sliding discharge paths (13) are formed between the rod electrode (2) and the counter-electrode (7). This provides a discharge arrangement (1) making the laser beam generation markedly more effective and lengthening the useful life of the components and gas filling of the laser.
摘要翻译：公开了一种用于脉冲气体激光器的排出装置（1），与激光的电极（8,9）是由至少单面装置来布置，在它们的中间空间（15）（2，3，4），用于与密集的UV发射放电的产生，借助于该产生激光的电极（8,9）之间的间隙（15）的预电离。本发明的本质特征在于，该装置被形成（2，3，4）至少一种棒状电极（2）由绝缘的，优选陶瓷材料的（4）所环绕，并具有导电触点（5）具有表面（6）的绝缘性的陶瓷材料（4），并且在这个表面上在从所述棒状电极的距离（2）被布置（6）至少一个对电极（7），其导电地连接到激光电极中的一个（8）其中，所述杆状电极（2）和对电极（7）Gleitentladungsstrecken（13）形式之间。有被创建的排出装置（1），使激光束产生的显著增加的效率和延长了元件的寿命及激光的气体填充物。

2. 发明申请

WO1991019336A1 ION LASER AND MANUFACTURING PROCESS 审中-公开
标题翻译：离子激光和制造工艺
公开(公告)号：WO1991019336A1
公开(公告)日：1991-12-12
申请号：PCT/EP1991000851
申请日：1991-05-06
申请人： NWL LASER-TECHNOLOGIE GMBH , WEIMEL, Erich
发明人： NWL LASER-TECHNOLOGIE GMBH
IPC分类号： H01S03/038
CPC分类号： H01S3/0323 , H01S3/038 , H01S3/041
摘要： An argon ion laser has a cathode (2) and an anode (3) at the two ends of its gas-tight discharge tube (1). The anode (3) is designed as a one-piece anode tube (11) made of sintered aluminium oxide powder which does not conduct electricity but is a good conductor of heat; the tube has an electrically conductive inner partial coating (10a). The conductive inner partial coating (10a) acts as an anode electrode and is connected by a solder joint to a flange (7) which serves as an anode lead. The two ends of the tube have a coating (10a, 12), preferably of nickel, which permits gas-tight soldering of the anode tube (11) to both the discharge tube (1) and the flange (7). The flange (7) and the discharge tube (1) are electrically insulated from each other by the anode tube (11). This anode tube (11) can be used to construct a simple and an extremely reliable argon laser; the heat is dissipated from the anode (3) of the laser of the invention much more efficiently than in known lasers because the heat generated at the anode (3) is absorbed directly by the cooling water.
摘要翻译：氩离子激光器在其气密放电管（1）的两端具有阴极（2）和阳极（3）。阳极（3）被设计为由烧结的氧化铝粉末制成的一体式阳极管（11），其不导电，但是是良好的导热体; 该管具有导电内部部分涂层（10a）。导电内部部分涂层（10a）用作阳极电极，并通过焊接接头连接到用作阳极引线的凸缘（7）。管的两端具有优选镍的涂层（10a，12），其允许阳极管（11）气体密封地焊接到排放管（1）和凸缘（7）。凸缘（7）和放电管（1）通过阳极管（11）彼此电绝缘。该阳极管（11）可用于构造简单且极为可靠的氩激光器; 因为在阳极（3）处产生的热量直接被冷却水吸收，因此本发明的激光器的阳极（3）比已知的激光器更有效地散发热量。

3. 发明申请

WO1994009536A1 PRE-IONIZER FOR A LASER 审中-公开
标题翻译：预激光激光
公开(公告)号：WO1994009536A1
公开(公告)日：1994-04-28
申请号：PCT/US1993009491
申请日：1993-10-05
申请人： CYMER LASER TECHNOLOGIES
发明人： CYMER LASER TECHNOLOGIES , LARSON, Donald, G.
IPC分类号： H01S03/038
CPC分类号： H01S3/038 , H01S3/0384
摘要： An anode (14) and a cathode (16) in a laser (10) are spaced in a first direction. A voltage difference between these members produces an electrical discharge which ionizes gases (18) in the laser (10) to react chemically and produce coherent radiation. First and second tubes (22) made from a dielectric material are spaced in the laser (10) in a second direction transverse (preferably perpendicular) to the first direction. The anode (14), the cathode (16) and the tubes (22) extend through the laser (10) in a direction transverse (preferably perpendicular) to the first and second directions. The tubes (22) are preferably at least a 99.9 % pure polycrystalline aluminum oxide ceramic with traces of other metallic elements than aluminum. Bushings (24) made from a material homogenous (preferably identical) to the tube material are integral with the tube (22) near the opposite tube ends. First electrical conductors (30) extend through the tubes (22). Second electrical conductors (32) (preferably resilient) contact (preferably line contact) the external tube surfaces to define capacitors with the first conductors (30) and the tube material. Positioning members (36) movably engage the tube external surfaces near the tube ends in co-operation with the resilient members establishing three (3) - line contacts with the tubes (22) for positioning the tubes (22) precisely in the cavity (1). When a voltage pulse is applied between the first conductor (30) inside each tube (22) and the conductors (32) on such tube (22), the resultant corona discharge from the external tube surface produces ultraviolet light which pre-ionizes the gases (18) in the cavity (12). This facilitates the ionization of the gases (18) in the cavity (12) when an anode (14)-cathode (16) electrical discharge is produced.
摘要翻译：激光器（10）中的阳极（14）和阴极（16）在第一方向上间隔开。这些构件之间的电压差产生放电，其使激光器（10）中的气体（18）电离化学反应并产生相干辐射。由电介质材料制成的第一和第二管（22）在与第一方向横向（优选垂直）的第二方向上在激光器（10）中间隔开。阳极（14），阴极（16）和管（22）在横向（优选垂直于）第一和第二方向的方向上延伸穿过激光器（10）。管（22）优选为至少99.9％的纯多晶氧化铝陶瓷，其余的金属元素比铝更多。由与材料同质（优选相同）的材料制成的衬套（24）与相对管端附近的管（22）成一体。第一电导体（30）延伸穿过管（22）。第二电导体（32）（优选弹性的）与外管表面接触（优选线接触）以限定具有第一导体（30）和管材料的电容器。定位构件（36）可以与弹性构件相配合地运动地接合管端附近的管外表面，与管（22）建立三（3）线接触，用于将管（22）精确地定位在腔（1）中）。当在每个管（22）内部的第一导体（30）和这种管（22）上的导体（32）之间施加电压脉冲时，从外管表面产生的电晕放电产生紫外光，其将气体（18）在空腔（12）中。当产生阳极（14） - 阴极（16）放电时，这有助于空腔（12）中的气体（18）的电离。

4. 发明申请

WO1990012434A1 ELECTRODE FOR PULSED GAS LASER, AND PROCESS FOR ITS MANUFACTURE 审中-公开
标题翻译：用于脉冲气体激光的电极及其制造方法
公开(公告)号：WO1990012434A1
公开(公告)日：1990-10-18
申请号：PCT/EP1990000516
申请日：1990-04-02
申请人： ELTRO GMBH GESELLSCHAFT FÜR STRAHLUNGSTECHNIK , DODUCO GMBH & CO. DR. EUGEN DÜRRWÄCHTER , BOSCH, Wolfgang , BREGEL, Thomas , GANZ, Joachim , MICHAL, Roland , SAEGER, Karl, Erdmann , SCHEINER, Ludwig , PREIN, Franz , WIEGAND, Jürgen
发明人： ELTRO GMBH GESELLSCHAFT FÜR STRAHLUNGSTECHNIK , DODUCO GMBH & CO. DR. EUGEN DÜRRWÄCHTER
IPC分类号： H01S03/038
CPC分类号： H01S3/0388
摘要： The electrode of the invention consists of a metal substrate (1) with, deposited on it, a 0.1 to 20 mu m thick surface film (3) of a material different from that of the substrate. The surface-film material has a lower electron work function and a lower thermal and electrical conductivity than the substrate material and is selected from the group comprising tungsten, niobium, tantalum, rhenium and chromium. The substrate (1) consists of a deep-drawable material. There is preferably also an intermediate layer (2) of a metal which is a good conductor.
摘要翻译：本发明的电极由沉积在其上的金属基底（1）组成，具有不同于基底的材料的0.1至20μm厚的表面膜（3）。表面膜材料具有比基底材料低的电子功函数和较低的导热性和导电性，并且选自包括钨，铌，钽，铼和铬的组。基底（1）由深拉伸材料组成。优选还有作为良导体的金属的中间层（2）。

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