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1. 发明授权

US5976907A Solid state imaging device and production method for the same 失效
标题翻译：固态成像装置及其制作方法相同
公开(公告)号：US5976907A
公开(公告)日：1999-11-02
申请号：US5048
申请日：1998-01-09
申请人： Yoko Shigeta , Michiyo Ichikawa , Akira Tsukamoto
发明人： Yoko Shigeta , Michiyo Ichikawa , Akira Tsukamoto
IPC分类号： H01L31/0216 , H01L31/0232 , H01L31/036 , H01L79/04
CPC分类号： H01L31/0232 , H01L27/14627 , H01L31/02162
摘要： The invention provides a solid state imaging device with high photosensitivity. A lens resin coated on the surface of the device is subjected to an exposing treatment using lens masks and a developing treatment, thereby forming lens patterns. After improving the light transmittance of the lens patterns through irradiation of UV, the lens patterns are heated so as to form micro lenses each in the shape of a hemisphere. At this point, the heating temperature is set at a temperature lower than a temperature at which the lens patterns are completely melted. As a result, the lens patterns are prevented from flowing out, and a distance between the adjacent micro lenses becomes equal to a distance between the adjacent lens patterns. Accordingly, by making small the distance between the adjacent lens patterns, the light receiving area of each micro lens can be enlarged.
摘要翻译：本发明提供具有高光敏性的固态成像装置。使用透镜掩模和显影处理对涂覆在器件表面上的透镜树脂进行曝光处理，从而形成透镜图案。在通过照射UV改善透镜图案的透光率之后，透镜图案被加热以形成每个半球形状的微透镜。此时，将加热温度设定为低于透镜图案完全熔融的温度的温度。结果，防止透镜图案流出，并且相邻微透镜之间的距离变得等于相邻透镜图案之间的距离。因此，通过使相邻透镜图案之间的距离变小，可以扩大每个微透镜的光接收面积。

2. 发明授权

US5739548A Solid state imaging device having a flattening layer and optical lenses 失效
标题翻译：具有平坦化层和光学透镜的固态成像装置
公开(公告)号：US5739548A
公开(公告)日：1998-04-14
申请号：US640050
申请日：1996-04-30
申请人： Yoko Shigeta , Michiyo Ichikawa , Akira Tsukamoto
发明人： Yoko Shigeta , Michiyo Ichikawa , Akira Tsukamoto
IPC分类号： H01L31/0216 , H01L31/0232 , H01L31/036 , H01L79/04
CPC分类号： H01L31/0232 , H01L27/14627 , H01L31/02162
摘要： The invention provides a solid state imaging device with high photosensitivity. A lens resin coated on the surface of the device is subjected to an exposing treatment using lens masks and a developing treatment, thereby forming lens patterns. After improving the light transmittance of the lens patterns through irradiation of UV, the lens patterns are heated so as to form micro lenses each in the shape of a hemisphere. At this point, the heating temperature is set at a temperature lower than a temperature at which the lens patterns are completely melted. As a result, the lens patterns are prevented from flowing out, and a distance between the adjacent micro lenses becomes equal to a distance between the adjacent lens patterns. Accordingly, by making small the distance between the adjacent lens patterns, the light receiving area of each micro lens can be enlarged.
摘要翻译：本发明提供具有高光敏性的固态成像装置。使用透镜掩模和显影处理对涂覆在器件表面上的透镜树脂进行曝光处理，从而形成透镜图案。在通过照射UV改善透镜图案的透光率之后，透镜图案被加热以形成每个半球形状的微透镜。此时，将加热温度设定为低于透镜图案完全熔融的温度的温度。结果，防止透镜图案流出，并且相邻微透镜之间的距离变得等于相邻透镜图案之间的距离。因此，通过使相邻透镜图案之间的距离变小，可以扩大每个微透镜的光接收面积。

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