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1. 发明授权

US5804087A Method of adjusting natural frequency of dual-axis vibratory structure 失效
标题翻译：调整双轴振动结构固有频率的方法
公开(公告)号：US5804087A
公开(公告)日：1998-09-08
申请号：US646817
申请日：1996-05-21
申请人： Ki-bang Lee , Young-ho Cho , Ci-moo Song
发明人： Ki-bang Lee , Young-ho Cho , Ci-moo Song
IPC分类号： G01C19/56 , G01C19/5755 , G01C19/5769 , G01H13/00 , H03H3/04 , H01L22/027
CPC分类号： G01C19/5769
摘要： There is provided a method of adjusting the natural frequency of a dual-axis vibratory structure having: a first spring member having a lengthwise direction coinciding to a first axis direction receiving an electrostatic force; a second spring member having a lengthwise direction coinciding to a second direction perpendicular to the first axis direction and having a width narrower than that of the first spring member; and a mass portion, the method comprising the steps of: measuring the natural frequencies relative to the first axis direction of the vibratory structure and a third axis direction perpendicular to a plane formed by the first and second axes; varying the thickness of the first spring member so as to adjust the natural frequency of the third axis direction while fixing the natural frequency of the first axis direction; and repeating the measuring step and the thickness varying step until the natural frequency of the first and third axes directions are within the scope of a permissible error. The method can be adjusted to coincide the natural frequency of the vibratory structure with a design value, so that linearity and the sensitivity of a sensor are improved and operation bandwidth increases.
摘要翻译：提供了一种调节双轴振动结构的固有频率的方法，其具有：第一弹簧构件，其具有与接收静电力的第一轴线方向一致的纵向方向; 第二弹簧构件，其纵向方向与垂直于第一轴线方向的第二方向重合，并且具有比第一弹簧构件的宽度窄的宽度; 和质量部分，该方法包括以下步骤：测量相对于振动结构的第一轴方向的固有频率和垂直于由第一和第二轴形成的平面的第三轴线方向; 改变第一弹簧构件的厚度，以便固定第一轴线方向的固有频率来调节第三轴方向的固有频率; 并且重复测量步骤和厚度变化步骤，直到第一和第三轴向方向的固有频率在容许误差的范围内。可以调整该方法以使振动结构的固有频率与设计值一致，使得传感器的线性和灵敏度提高，并且操作带宽增加。

2. 发明授权

US5951881A Fabrication of small-scale cylindrical articles 失效
标题翻译：小型圆柱形制品的制造
公开(公告)号：US5951881A
公开(公告)日：1999-09-14
申请号：US681235
申请日：1996-07-22
申请人： John A. Rogers , Rebecca J. Jackman , George M. Whitesides
发明人： John A. Rogers , Rebecca J. Jackman , George M. Whitesides
IPC分类号： B05D1/28 , G03F7/00 , G03F7/16 , G03F7/18 , G03F7/24 , H01F41/04 , H01L22/027
CPC分类号： G02B6/02142 , B05D1/283 , B82Y30/00 , B82Y40/00 , G02B6/02138 , G03F7/00 , G03F7/161 , G03F7/18 , G03F7/24 , H01F41/042 , G02B6/02152
摘要： Techniques for fabrication of small-scale metallic structures such as microinductors, microtransformers and stents are described. A chemically active agent such as a catalyst is applied from an applicator in a pattern to an exterior surface of an article, metal is deposited according to the pattern and optionally, removed from the substrate. Where the substrate is cylindrical, the pattern can serve as a stent. Alternatively, a pattern of a self-assembled monolayer can be printed on a surface, which pattern can dictate metal plating or etching resulting in a patterned metal structure that can be cylindrical. In another embodiment, a structure is patterned on a surface that serves as a phase-modulating pattern or amplitude-modulating pattern. The article subsequently is exposed to radiation that can induce a change in refractive index within the article, and the phase-modulating or amplitude-modulating pattern results in different indices of refraction being created in different portions of the article. By this technique, a grating can be written into a core of an optical fiber.
摘要翻译：描述了微型电感器，微型变压器和支架等小型金属结构的制造技术。将化学活性剂如催化剂从涂布器以图案施加到制品的外表面，根据图案沉积金属，并任选地从基材上除去金属。在基底为圆柱形的情况下，图案可用作支架。或者，自组装单层的图案可以印刷在表面上，该图案可以规定金属电镀或蚀刻，导致可以是圆柱形的图案化金属结构。在另一个实施例中，在用作相位调制图案或幅度调制图案的表面上图案化结构。该物品随后暴露于可引起制品内的折射率变化的辐射，并且相位调制或幅度调制图案导致在制品的不同部分产生不同的折射率。通过这种技术，可以将光栅写入光纤的核心。

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