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    • 1. 发明授权
    • Polishing method
    • 抛光方法
    • US06777335B2
    • 2004-08-17
    • US09995613
    • 2001-11-29
    • Kou Hasegawa
    • Kou Hasegawa
    • H01K21302
    • B24D3/34B24B37/24
    • It is an object of the present invention to provide a polishing method, with which a surface of high flatness can be obtained without fail at a high removal rate and in a stable manner. The polishing method is to polish a surface to be polished of an object to be polished by using a polishing pad while existing an aqueous chemical mechanical polishing solution containing an oxidizing agent such as hydrogen peroxide between polishing surface of the polishing pad equipped with a polishing part that contains abrasive, and the surface to be polished to be polished of the object to be polished. The aqueous chemical mechanical polishing solution may be contained a heterocyclic compound, a multivalent metal ion, an organic acid and the like. Also, the aqueous chemical mechanical solution may be contained no abrasive.
    • 本发明的目的是提供一种抛光方法,其以高的去除率和稳定的方式可以获得高平坦度的表面。 抛光方法是通过使用抛光垫来抛光待抛光物体的待抛光表面,同时在抛光垫的抛光表面上装有含有氧化剂如过氧化氢的水性化学机械抛光溶液, 其中含有研磨剂,待抛光的表面被抛光的被抛物体。 水性化学机械研磨液可以含有杂环化合物,多价金属离子,有机酸等。 此外,水性化学机械溶液可以不含磨料。
    • 2. 发明授权
    • Carrier substrate and carrier assembly using residual organic compounds to facilitate gate break
    • 载体衬底和载体组件使用残留的有机化合物来促进浇口断裂
    • US06677681B2
    • 2004-01-13
    • US10172157
    • 2002-06-14
    • Richard W. Wensel
    • Richard W. Wensel
    • H01K21302
    • H01L21/565H01L2224/48227H01L2924/01078H01L2924/01079H01L2924/01087H01L2924/09701H01L2924/12044H01L2924/3025H01L2924/00
    • An encapsulant molding technique used in chip-on-board encapsulation wherein a residual organic compound layer on the surface of a substrate is used to facilitate removal of unwanted encapsulant material. An organic compound layer which inherently forms on the substrate during the fabrication of the substrate or during various chip attachment processes is masked in a predetermined location with a mask. The substrate is then cleaned to remove the organic compound layer. The mask protects the masked portion of the organic material layer which becomes a release layer to facilitate gate break. An encapsulant mold is placed over the substrate and chip and an encapsulant material is injected into the encapsulant mold cavity through an interconnection channel. The release layer is formed in a position to reside as the bottom of the interconnection channel. Preferably, the interconnection channel has a gate adjacent the encapsulant mold cavity. The encapsulant material solidifies and the encapsulant mold is removed, wherein the gate forms an indentation abutting the cavity. Excess encapsulant solidified in the interconnection channel is leveraged from the surface of the substrate and broken free at the indentation. The remaining release layer may then be removed.
    • 用于板上封装封装的密封剂模制技术,其中使用衬底表面上的残余有机化合物层来促进去除不需要的密封剂材料。 在制造衬底期间或在各种芯片附接过程期间固有地在衬底上形成的有机化合物层被掩模在预定位置。 然后清洗基材以除去有机化合物层。 掩模保护有机材料层的掩蔽部分,该有机材料层成为剥离层以便于断裂。 将密封剂模具放置在衬底和芯片上方,并且通过互连通道将密封剂材料注入到密封剂模腔中。 释放层形成在作为互连通道的底部的位置。 优选地,互连通道具有邻近密封模腔的门。 密封剂材料固化并且去除密封剂模具,其中门形成邻接空腔的凹陷。 在互连通道中凝固的过量的密封剂从基材的表面被利用,并在压痕处断裂。 然后可以除去剩余的释放层。