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1. 发明授权

US06627899B2 Magnetic lenses, charged-particle-beam optical systems, and charged-particle-beam pattern-transfer apparatus 失效
标题翻译：磁性透镜，带电粒子束光学系统和带电粒子束图案转移装置
公开(公告)号：US06627899B2
公开(公告)日：2003-09-30
申请号：US09320199
申请日：1999-05-26
申请人： Hiroyasu Simizu
发明人： Hiroyasu Simizu
IPC分类号： H01J37141
CPC分类号： H01J37/141 , G21K1/093 , H01J37/3007 , H01J2237/3175
摘要： Magnetic lenses and coils for magnetic lenses, charged-particle-beam (CPB) optical systems and pattern-transfer apparatus comprising such magnetic lenses, and manufacturing methods for such lenses, systems, and apparatus are disclosed. In the coils for magnetic lenses, the number of coil turns per unit length is adjusted so that the axial magnetic field at the ends of the coils more closely approximates an ideal magnetic field. In another example, a coil for a magnetic lens comprises two or more subcoils. The currents in the subcoils or the products of current and coil turns for respective subcoils are adjusted to approximate a selected magnetic field, such as to correct or at least reduce magnetic field “droop” at the ends of the coil. Magnetic lenses including such coils and a yoke are provided as well as CPB pattern-transfer apparatus using these magnetic lenses.
摘要翻译：公开了用于磁性透镜的磁性透镜和线圈，带电粒子束（CPB）光学系统和包括这种磁性透镜的图案转印装置，以及用于这种透镜，系统和装置的制造方法。在用于磁性透镜的线圈中，调整每单位长度的线圈匝数，使得线圈端部处的轴向磁场更接近理想的磁场。在另一示例中，用于磁性透镜的线圈包括两个或更多个子线圈。辅助线圈中的电流或相应辅助线圈的电流和线圈匝的电流被调整为近似所选择的磁场，例如校正或至少减小线圈末端的磁场“下垂”。提供包括这种线圈和磁轭的磁性透镜以及使用这些磁性透镜的CPB图案转印装置。

2. 发明授权

US06566663B1 Charged-particle-beam optical components and systems including ferrite exhibiting reduced image displacement from temperature fluctuations 失效
标题翻译：带电粒子束光学元件和系统包括铁氧体，其表现出从温度波动减小的图像位移
公开(公告)号：US06566663B1
公开(公告)日：2003-05-20
申请号：US09788123
申请日：2001-02-16
申请人： Koichi Kamijo , Shinichi Kojima , Katsushi Nakano , Kazuya Okamoto
发明人： Koichi Kamijo , Shinichi Kojima , Katsushi Nakano , Kazuya Okamoto
IPC分类号： H01J37141
CPC分类号： H01J37/141 , H01J2237/3175
摘要： Charged-particle-beam (CPB) optical components (e.g., electromagnetic lenses and deflectors) are disclosed that exhibit very low to no image displacement or loss of focus accompanying changes in temperature of the optical components during use. An optical component includes a unit of ferrite (typically in a ferrite stack). The ferrite is configured to exhibit substantially no permeability change with a change in temperature relative to normal operating temperature, thereby maintaining image displacement caused by permeability changes to below a predetermined threshold. As the ferrite temperature T rises to T′, the saturation magnetic flux density Bs of the ferrite decreases while the initial permeability &mgr;i increases. Thus, the initial magnetization curves of the ferrite intersect at a particular magnetic field intensity H, which exhibits substantially no change from T to T′. With HAC being the particular magnetic field intensity, the ferrite is selected so that the magnetic field intensity acting on the ferrite during operation is near HAC.
摘要翻译：公开了带电粒子束（CPB）的光学部件（例如，电磁透镜和偏转器），其在使用期间伴随着光学部件的温度变化而表现出非常低至无图像位移或失焦。光学部件包括铁氧体单元（通常为铁氧体叠层）。铁氧体被配置为相对于正常工作温度而基本上不显示温度变化的磁导率变化，从而将由磁导率引起的图像位移维持在低于预定阈值以下。当铁氧体温度T上升到T'时，铁氧体的饱和磁通密度Bs降低，而初始磁导率μi增加。因此，铁素体的初始磁化曲线在特定的磁场强度H处相交，其从T到T'基本上没有变化。使用HAC作为特定的磁场强度，选择铁氧体，使得在操作期间作用在铁氧体上的磁场强度接近HAC。

3. 发明授权

US06388261B1 Charged-particle-beam microlithography apparatus and methods exhibiting reduced astigmatisms and linear distortion 失效
标题翻译：带电粒子束微光刻设备和减少散光和线性变形的方法
公开(公告)号：US06388261B1
公开(公告)日：2002-05-14
申请号：US09393012
申请日：1999-09-10
申请人： Mamoru Nakasuji
发明人： Mamoru Nakasuji
IPC分类号： H01J37141
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/141 , H01J37/153 , H01J37/3174
摘要： Apparatus and methods are disclosed for making accurate yet simple corrections of astigmatism that would otherwise degrade edge resolution and astigmatism, and cause linear distortion of, a reticle image. Astigmatism that would otherwise degrade edge resolution of the reticle image is corrected by a stigmator lens (including a respective set of stigmator coils) having a principal plane coincident with a plane of a contrast aperture. Linear distortion of the reticle image is corrected by a separate stigmator lens (including a respective pair of stigmator coils) having a principal plane coincident with the principal plane of a projection lens.
摘要翻译：公开了用于对散光进行准确而简单的校正的装置和方法，否则会降低边缘分辨率和散光，并导致标线图像的线性失真。否则会降低标线片图像的边缘分辨率的散光通过具有与对比度孔径的平面重合的主平面的标称透镜（包括相应的一组标记线圈）来校正。通过具有与投影透镜的主平面重合的主平面的单独的标示器透镜（包括相应的一对标示线圈）校正标线片图像的线性变形。

4. 发明授权

US06380545B1 Uniform raster pattern generating system 失效
标题翻译：均匀光栅图案生成系统
公开(公告)号：US06380545B1
公开(公告)日：2002-04-30
申请号：US09385803
申请日：1999-08-30
申请人： Chen Yan
发明人： Chen Yan
IPC分类号： H01J37141
CPC分类号： H01J37/147
摘要： A conventional particle generation and magnet configuration are used in combination with a relatively low-power power amplifier, a resonant loop magnet driver system, an amplitude modulator that induces a homogeneous amplitude function proportional to (t)½ and, when individual X and Y magnets are used, a precision phase shifter that induces a 90° phase shift in the applied power to one of the magnets to produce a circular raster pattern of virtually uniform density.
摘要翻译：传统的粒子产生和磁体配置与相对较低功率的功率放大器，谐振环路磁体驱动器系统，振幅调制器结合使用，该振幅调制器引起与（t）1/2成比例的均匀幅度函数，并且当个体X和Y磁体被使用的是精密移相器，其将所施加的功率中的90°相移诱导到一个磁体，以产生几乎均匀密度的圆形光栅图案。

5. 发明授权

US06605805B2 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method 有权
公开(公告)号：US06605805B2
公开(公告)日：2003-08-12
申请号：US10113002
申请日：2002-03-28
申请人： Zhong-Wei Chen
发明人： Zhong-Wei Chen
IPC分类号： H01J37141
CPC分类号： H01J37/28 , H01J37/141 , H01J2237/04756 , H01J2237/1035
摘要： A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency. The objective lens includes a magnetic lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, an electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen; a deflection system including a plurality of deflection units situated along the beam axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the magnetic lens; and a annular detection unit with a relatively small aperture, located underneath the primary beam define aperture, to capture secondary electron (SE) and backscattered electrons (BSE).

6. 发明授权

US06362486B1 Magnetic lens for focusing a charged particle beam 有权
标题翻译：用于聚焦带电粒子束的磁性透镜
公开(公告)号：US06362486B1
公开(公告)日：2002-03-26
申请号：US09191102
申请日：1998-11-12
申请人： Stephen W. Into
发明人： Stephen W. Into
IPC分类号： H01J37141
CPC分类号： H01J37/141 , H01J2237/28
摘要： A magnetic lens focuses a charged particle beam generated by an instrument to a very small spot for deriving characteristics of a sample. A magnetic flux pattern is created which provides improved high resolution. The lens includes a polepiece with an inner yoke, an outer yoke and a winding. A lens outer pole is secured to the outer yoke and includes a first surface having a first opening defined therein positioned such that the beam passes therethrough. A lens inner pole is secured to the inner yoke and includes a second surface having a second opening defined therein aligned with the first opening, but with a smaller inner diameter.
摘要翻译：磁性透镜将由仪器产生的带电粒子束聚焦到非常小的点上，以获得样品的特性。产生磁通图形，提供改进的高分辨率。透镜包括具有内磁轭的磁极，外磁轭和绕组。透镜外极固定到外磁轭，并且包括第一表面，其具有限定在其中的第一开口，使得光束通过。透镜内极固定到内轭，并且包括具有限定在其中与第一开口对准但具有较小内径的第二开口的第二表面。

7. 发明授权

US06515287B2 Sectored magnetic lens and method of use 有权
公开(公告)号：US06515287B2
公开(公告)日：2003-02-04
申请号：US09882804
申请日：2001-06-15
申请人： John A. Notte, IV
发明人： John A. Notte, IV
IPC分类号： H01J37141
CPC分类号： H01J37/21 , H01J37/141 , H01J37/265 , H01J37/28 , H01J2237/1405
摘要： A magnetic lens configured to apply a magnetic field to a charged particle beam is provided. The magnetic lens may include an outer pole piece and an inner pole piece. The outer pole piece may have at least two sectors and at least two slots. The magnetic lens may also have a primary coil winding interposed between the outer pole piece and the inner pole piece. In addition, the magnetic lens may have a number of sector coil windings, and each sector of the outer pole piece may be coupled to one sector coil winding. A magnetic potential of the outer pole piece relative to the inner pole piece may be generated by applying a current to the primary coil winding. A separate magnetic potential of each sector may also be generated by applying a current to the respective sector coil windings of each sector of the outer pole piece.

8. 发明授权

US06501077B1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US06501077B1
公开(公告)日：2002-12-31
申请号：US09462769
申请日：2000-01-13
申请人： Tetsuya Sawahata , Mitsugu Sato , Yoichi Ose
发明人： Tetsuya Sawahata , Mitsugu Sato , Yoichi Ose
IPC分类号： H01J37141
CPC分类号： H01J37/244 , H01J37/28
摘要： A scanning electron microscope which obtains a two-dimensional scan image of a sample includes an electron source and a scan deflector for scanning a primary electron ray generated from said electron source onto the sample. An objective lens forms a focusing magnetic field onto the sample, such as to surround the sample, the focusing magnetic field focusing the primary electron ray. A secondary signal detector for deflecting and detecting a secondary signal generated from the sample by irradiation of the primary electron ray obtains secondary electrons from a secondary electron conversion electrode for generating secondary electrons by collision of electrons, which is disposed between the objective lens and the detector at a location that is closer to the electron source than the objective lens is and at a location that is closer to the sample than the secondary signal detector is.
摘要翻译：获得样品的二维扫描图像的扫描电子显微镜包括用于将从所述电子源产生的一次电子束扫描到样品上的电子源和扫描偏转器。物镜在样品上形成聚焦磁场，例如围绕样品，聚焦磁场聚焦初级电子。用于偏转和检测从样品通过一次电子射线照射产生的二次信号的二次信号检测器从二次电子转换电极获得二次电子，用于通过电子碰撞产生二次电子，该电子被设置在物镜和检测器之间在比物镜更靠近电子源的位置处，并且位于比次级信号检测器更靠近样品的位置处。

9. 发明授权

US06335530B1 Objective lens for scanning electron microscope 失效
标题翻译：物镜用于扫描电子显微镜
公开(公告)号：US06335530B1
公开(公告)日：2002-01-01
申请号：US09126404
申请日：1998-07-30
申请人： Osamu Takaoka , Akira Yonezawa
发明人： Osamu Takaoka , Akira Yonezawa
IPC分类号： H01J37141
CPC分类号： H01J37/141 , H01J37/28
摘要： In an object lens of a type of generating a magnetic field of the side of a specimen and maing a principal plan of the lens close to the specimen for reducing aberration coefficients, an inner magnetic pole is formed in a shape of a cone having an angle of 30° of less to an optical axis and an outer magnetic pole is also provided inside the cone by which even the large-size specimen can be inclined up to about 60° and the large-size specimen can be observed with high resolution even when the specimen is inclined at a high angle.
摘要翻译：在产生样本侧的磁场的类型的物镜中，并且为了减小像差系数而使靠近样本的透镜的主平面形成为内圆磁极，其形状为具有角度的锥形在锥体内还设置有30°以下的光轴，外部磁极也通过该锥形体设置，即使大尺寸的试样也能够倾斜到大约60°，并且即使在高分辨率的情况下也可以高分辨率地观察大尺寸的试样样品以高角度倾斜。

10. 发明授权

US06420713B1 Image position and lens field control in electron beam systems 失效
标题翻译：电子束系统中的图像位置和透镜场控制
公开(公告)号：US06420713B1
公开(公告)日：2002-07-16
申请号：US09301000
申请日：1999-04-28
申请人： Werner Stickel , Steven Douglas Golladay
发明人： Werner Stickel , Steven Douglas Golladay
IPC分类号： H01J37141
CPC分类号： H01J37/141 , H01J37/3007 , H01J2237/3175
摘要： A charged particle beam system with a source of charged particles produces a beam directed along a path. A given electromagnetic lens is located along the path. The given electromagnetic lens is adapted to produce a first field directed with a first orientation adapted for affecting a beam of charged particles directed along the path through the lens. A bucking electromagnetic lens is juxtaposed with the given electromagnetic lens adapted to produce a bucking field directed with a bucking orientation adapted for affecting the beam of charged particles directed along the path. The bucking field has an orientation opposing the first field. A fringe field from the bucking electromagnetic lens produces a nulling field to compensate for aberrations and/or beam disturbances.
摘要翻译：具有带电粒子源的带电粒子束系统产生沿着路径指向的光束。给定的电磁透镜沿着路径定位。给定的电磁透镜适于产生用适于影响沿着穿过透镜的路径引导的带电粒子束的第一取向引导的第一场。屈曲电磁透镜与给定的电磁透镜并置，其适于产生用于影响沿着路径引导的带电粒子束的抵抗定向的屈曲场。屈曲场具有与第一场相反的方向。来自屈曲电磁透镜的边缘场产生归零场以补偿像差和/或光束干扰。

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