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1. 发明授权

US06320936B1 X-ray tube assembly with beam limiting device for reducing off-focus radiation 失效
标题翻译：具有用于减少离焦辐射的光束限制装置的X射线管组件
公开(公告)号：US06320936B1
公开(公告)日：2001-11-20
申请号：US09449778
申请日：1999-11-26
申请人： William P. Holland, Sr. , Timothy J. Holland , Matthew J. Holland , Michael L. Holland
发明人： William P. Holland, Sr. , Timothy J. Holland , Matthew J. Holland , Michael L. Holland
IPC分类号： G21K102
CPC分类号： G21K1/10 , G21K1/02
摘要： A beam limiting apparatus is provided for reducing the amount of off-focus radiation in the image-forming beam emitted from an x-ray tube assembly. The x-ray tube assembly has a housing with an x-ray port for the passage of x-rays therethrough, a mounting boss defining the x-ray port, an x-ray tube mounted within the housing and defining a glass envelope, an anode mounted within the glass envelope, and a cathode spaced relative to the anode within the glass envelope. A peripheral flange of the beam limiting apparatus is mountable to the mounting boss of the x-ray tube housing, and a radiation-absorbing body of the beam limiting apparatus projects downwardly from the peripheral flange through the x-ray port. The radiation-absorbing body is formed of an electrically nonconductive, filled epoxy resin material, and defines a base surface, an x-ray entrance aperture formed through the base surface, an x-ray exit aperture spaced relative to the x-ray entrance aperture, and an x-ray transmissive beam conduit formed between the entrance and exit apertures. An x-ray transmissive window is integrally molded with the radiation-absorbing body and extends across the beam conduit. The base surface of the radiation-absorbing body is spaced closely adjacent to the glass envelope of the x-ray tube and defines a predetermined gap therebetween. The x-ray tube housing also is molded of an electrically non-conductive, radiopaque, filled epoxy resin material, and includes a conductive outer surface formed of a conductive coating.
摘要翻译：提供了一种用于减少从X射线管组件发射的图像形成光束中的离焦辐射量的光束限制装置。 X射线管组件具有一个带X射线端口的外壳，用于通过X射线通道，一个安装凸台限定x射线端口，x射线管安装在外壳内并限定玻璃外壳，安装在玻璃外壳内的阳极以及在玻璃封套内相对于阳极隔开的阴极。光束限制装置的外围法兰可安装到X射线管壳体的安装凸台上，并且光束限制装置的辐射吸收体从周边凸缘通过x射线端口向下突出。辐射吸收体由不导电的填充的环氧树脂材料形成，并且限定基底表面，穿过基底表面形成的x射线入口孔，相对于x射线入口孔间隔的X射线出射孔以及形成在入口孔和出口孔之间的x射线透射束导管。 x射线透射窗与辐射吸收体整体模制并且横跨束导管延伸。辐射吸收体的基面与X射线管的玻璃外壳紧密地隔开并且在它们之间形成预定的间隙。 X射线管外壳也由不导电的不透射线填充的环氧树脂材料模制，并且包括由导电涂层形成的导电外表面。

2. 发明授权

US06628753B2 X-ray imaging apparatus 失效
公开(公告)号：US06628753B2
公开(公告)日：2003-09-30
申请号：US10039133
申请日：2002-01-02
申请人： Esa Suuronen
发明人： Esa Suuronen
IPC分类号： G21K102
CPC分类号： A61B6/08 , A61B6/06 , A61B6/14 , A61B6/501
摘要： The invention relates to an apparatus for X-ray imaging, in which imaging an X-ray beam (11) is directed through the object being imaged. The X-ray imaging apparatus (1) comprises an X-ray source (5) in front of the object being imaged, a primary collimator (6) in conjunction with the X-ray source, and radiation receiving means (15), which are located in a position behind the object being imaged. The apparatus relating to the invention comprises identifying means (20-22) which react to X-ray radiation, by means of which is ensured the entry of radiation inside the imaging area of the radiation receiving means (15).

3. 发明授权

US06624431B1 High collection angle short wavelength radiation collimator and focusing optic 失效
标题翻译：高采集角度短波长辐射准直仪和聚焦光学元件
公开(公告)号：US06624431B1
公开(公告)日：2003-09-23
申请号：US09621404
申请日：2000-07-21
申请人： Richard M. Foster , I. C. Edmond Turcu
发明人： Richard M. Foster , I. C. Edmond Turcu
IPC分类号： G21K102
CPC分类号： G21K1/025 , B82Y10/00 , G02B27/30 , G03F7/70166 , G21K1/06
摘要： The present invention provides a high gain collimator producing generally uniform intensity profiles for use in lithography and other applications. A focusing optic is also provided. The collimator includes a reflector and guide channel. The guide channel preferably includes polycapillary tubes and/or microchannel plates. The polycapillary tubes are used to collimate or focus the central portion of the x-ray beam in a circular, elliptic, square, or rectangular shape. A conical, parabolic resonance reflector or grazing incidence reflector with a shape similar to the polycapillary collimator is used to increase the solid angle collected and produce a circular, square, etc. annular x-ray beam whose inside dimensions are approximately equal to the exit dimensions of the polycapillary collimator. The annular beam shape, intensity profile and collimation angle is adjusted, if necessary, by an absorber, or polycapillary tubes to provide the desired intensity profile at the exit aperture of the hybrid x-ray collimator optic. A focusing optic is obtained by placing two collimating optics end to end.
摘要翻译：本发明提供了一种高增益准直器，其产生用于光刻和其它应用的大致均匀的强度分布。还提供聚焦光学元件。准直器包括反射器和引导通道。引导通道优选地包括多毛细管和/或微通道板。多毛细管用于将X射线束的中心部分准直或聚焦成圆形，椭圆形，正方形或矩形。使用具有类似于多毛发准直仪的形状的圆锥形抛物面共振反射器或掠入射反射器以增加所收集的立体角，并产生圆形，正方形等环形X射线束，其内部尺寸近似等于出口尺寸的多毛细管准直仪。如果需要，通过吸收器或多毛细管调节环形束形状，强度分布和准直角，以在混合X射线准直器光学器件的出射孔处提供期望的强度分布。通过将两个准直光学器件端到端放置来获得聚焦光学元件。

4. 发明授权

US06483894B2 Apparatus and method for adjusting a collimator 有权
标题翻译：用于调整准直仪的装置和方法
公开(公告)号：US06483894B2
公开(公告)日：2002-11-19
申请号：US09759643
申请日：2001-01-16
申请人： Martin Hartick , Frank Cordes
发明人： Martin Hartick , Frank Cordes
IPC分类号： G21K102
CPC分类号： G01V5/0016 , G01N23/20 , G01V5/0025 , G01V5/0041 , G21K5/04
摘要： A collimator for an X-ray testing machine and a method for adjusting the collimator with the aid of a detection system disposed in the collimator that includes at least two spatially separate detection devices, disposed and spacing one behind the other.
摘要翻译：用于X射线测试机的准直器和借助于设置在准直器中的检测系统来调整准直器的方法，该检测系统包括至少两个空间上分离的检测装置，该检测装置设置并间隔开。

5. 发明授权

US06365900B1 Sensing head and collimator for gamma-camera 失效
标题翻译：用于伽马相机的感应头和准直器
公开(公告)号：US06365900B1
公开(公告)日：2002-04-02
申请号：US09331582
申请日：1999-06-30
申请人： Corinne Mestais , Raymond Campagnolo , Robert Allemand
发明人： Corinne Mestais , Raymond Campagnolo , Robert Allemand
IPC分类号： G21K102
CPC分类号： G01T1/1648 , A61B6/4258 , G01T1/1642
摘要： A detection head and collimator for a gamma camera. The detection head includes several elementary detectors with semiconductors adjacent to each other to form a detection plane. The collimator is placed in front of the detection plane and includes a number of ducts laid out in a repetition pattern. The shape of the elementary detectors and the repetition pattern are rectangular in the detection plane.
摘要翻译：用于伽马相机的检测头和准直器。检测头包括几个具有彼此相邻的半导体的基本检测器以形成检测平面。准直器被放置在检测平面的前面，并且包括以重复图案布置的多个管道。基本检测器的形状和重复图案在检测平面中是矩形的。

6. 发明授权

US06183817B2 Method and apparatus for direct write fabrication of nanostructures 失效
标题翻译：用于直接制造纳米结构的方法和装置
公开(公告)号：US06183817B2
公开(公告)日：2001-02-06
申请号：US09086005
申请日：1998-05-27
申请人： Michael S. Gersonde
发明人： Michael S. Gersonde
IPC分类号： G21K102
CPC分类号： G21K5/04 , H01J2237/31735
摘要： A method and apparatus to fabricate nano-device and semiconductor device structures and features by controlling a coherent or near coherent particle beam to directly deposit, or direct write, onto a preselected deposition site of a substrate and into a predetermined shape is provided. Evanescent wave plates are optionally included to increase the order of the particle beam prior to interaction with a photonic lens. The photonic lens is holographically generated by means of a source laser and an optical lens to focus the atomic beam onto the deposition site by means of Lorenz force interaction between light fields of the photonic lens and dipole moments of the atoms of the atomic beam. The diffraction pattern of the optical lens is computer calculated to precisely form the desired photonic lens in accordance with the shape and size of the desired feature or structure to be built on the substrate and the characteristics of the atomic beam, the source laser, the shape and position of the substrate and the location of the deposition site.
摘要翻译：提供了一种通过控制相干或近似相干的粒子束来直接沉积或直接写入到基片的预选沉积位置并形成预定形状来制造纳米器件和半导体器件结构和特征的方法和装置。任选地包括消逝波片以在与光子晶体相互作用之前增加粒子束的次序。通过源激光器和光学透镜全息地产生光子透镜，以通过光子晶体的光场和原子束的原子的偶极矩之间的洛伦茨力相互作用将原子束聚焦到沉积位置上。计算机计算光学透镜的衍射图，以根据要建立在基板上的期望特征或结构的形状和尺寸精确地形成期望的光子晶体，并且原子束，源激光器，形状基板的位置和沉积位置的位置。

7. 发明授权

US06778637B2 Method and apparatus for alignment of anti-scatter grids for computed tomography detector arrays 有权
标题翻译：用于计算机断层摄影检测器阵列的反散射网格的对准的方法和装置
公开(公告)号：US06778637B2
公开(公告)日：2004-08-17
申请号：US10251387
申请日：2002-09-20
申请人： Randall P. Luhta , William C. Brunnett , Rodney A. Mattson
发明人： Randall P. Luhta , William C. Brunnett , Rodney A. Mattson
IPC分类号： G21K102
CPC分类号： G21K1/025 , A61B6/4258
摘要： A radiation detector (30) for a computed tomography scanner (12) includes a support structure (62). An alignment board (60) secures to the support structure (62) and includes photolithographically defined alignment openings (70) arranged to define a spatial focal point (34) relative to the alignment board (60). An anti-scatter element (32) is disposed on the support element (62) and includes one or more protrusions (86) which mate with the alignment openings (70) of the alignment board (60) to align the anti-scatter element (32) with the spatial focal point (34). A detector board (104) includes alignment structures (106) that align the detector board (104) with the anti-scatter element (32).
摘要翻译：用于计算机断层摄影扫描器（12）的辐射检测器（30）包括支撑结构（62）。对准板（60）固定到支撑结构（62）并且包括光刻定义的对准开口（70），其布置成相对于对准板（60）限定空间焦点（34）。防散射元件（32）设置在支撑元件（62）上并且包括与对准板（60）的对准开口（70）配合的一个或多个突起（86），以将防散射元件 32）与空间焦点（34）。检测器板（104）包括使检测器板（104）与防散射元件（32）对准的对准结构（106）。

8. 发明授权

US06711235B2 X-ray inspection apparatus and method 失效
标题翻译： X射线检查装置及方法
公开(公告)号：US06711235B2
公开(公告)日：2004-03-23
申请号：US10161276
申请日：2002-05-31
申请人： Andrew Joseph Galish , Thomas William Birdwell , Ralph Gerald Isaacs , Francis Howard Little
发明人： Andrew Joseph Galish , Thomas William Birdwell , Ralph Gerald Isaacs , Francis Howard Little
IPC分类号： G21K102
CPC分类号： G01N23/04 , G01N2223/316 , G21K1/025
摘要： An X-ray inspection system is provided having an X-ray source and first and second collimators. The first and second collimators are arranged in relation to the source and the target such that the portion of the target actually illuminated by The X-ray beam is substantially equal to the size of a selected inspection zone.
摘要翻译：提供具有X射线源和第一和第二准直仪的X射线检查系统。第一和第二准直器相对于源和目标被布置，使得由X射线束实际照射的目标的部分基本上等于所选择的检查区的大小。

9. 发明授权

US06556657B1 X-ray collimator and method of manufacturing an x-ray collimator 有权
标题翻译： X射线准直仪和制造X射线准直仪的方法
公开(公告)号：US06556657B1
公开(公告)日：2003-04-29
申请号：US09761495
申请日：2001-01-16
申请人： Andrew P. Tybinkowski , Ronald E. Swain , Michael J. Duffy
发明人： Andrew P. Tybinkowski , Ronald E. Swain , Michael J. Duffy
IPC分类号： G21K102
CPC分类号： G21K1/02
摘要： A method of manufacturing a collimator including providing a plate-like body, coating a predetermined portion of a surface of the body with an x-ray absorbing material, and machining at least one collimating slit through the coating and the plate-like body. According to one exemplary embodiment, the coating is applied through a thermal spray process. According to another exemplary embodiment, wire electrical discharge machining (EDM) is used to machine the collimating slits. A collimator manufactured in accordance with the presently disclosed method produces precise energy beam cross-sections, yet is less expensive to manufacture.
摘要翻译：一种制造准直器的方法，包括提供板状体，用X射线吸收材料涂覆身体的表面的预定部分，以及通过涂层和板状体加工至少一个准直缝。根据一个示例性实施方案，通过热喷涂方法施加涂层。根据另一示例性实施例，使用线放电加工（EDM）来加工准直缝。根据本公开的方法制造的准直器产生精确的能量束横截面，但制造成本较低。

10. 发明授权

US06453005B2 SiO2-coated mirror substrate for EUV 有权
标题翻译：用于EUV的SiO2涂层镜面基板
公开(公告)号：US06453005B2
公开(公告)日：2002-09-17
申请号：US09756018
申请日：2001-01-05
申请人： Winfried Kaiser
发明人： Winfried Kaiser
IPC分类号： G21K102
CPC分类号： B82Y10/00 , G21K1/062 , G21K2201/061 , G21K2201/062 , G21K2201/067
摘要： Mirror substrate consisting of crystal, especially silicon crystal, on which an amorphous layer, especially a quartz glass layer, is applied.
摘要翻译：由晶体特别是硅晶体组成的镜面衬底，其上施加有非晶层，特别是石英玻璃层。

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